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Fluorinated Liquid Temperature Control System

The fluorinated liquid cooling and heating temperature control system is widely used in the semiconductor manufacturing process to control the temperature of the reaction chamber, the temperature control of the heat sink plate, and the temperature control of the non-flammable fluid where heat transfer is required. It is suitable for the semiconductor chip manufacturing process, power devices, and avionics Cooling and heating temperature control in equipment.
Fluorinated fluids are low-toxicity, non-flammable, high-performance products that do not affect the sustainable development of the environment, and can reduce greenhouse gas emissions. At the same time, according to the volatile characteristics of fluorinated liquid, the joint design and system sealing design are strengthened to ensure the service life of the medium.
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