Chiller for Semiconductor Industry
LNEYA is a high-end equipment manufacturing enterprise that integrates research and development, production, and sales. Its main products include specialized semiconductor temperature control equipment, jet low-temperature impact testing machines, and semiconductor process waste water treatment devices, which are widely used in fields such as semiconductors, LEDs, LCDs, and solar photovoltaics. High product accuracy, intelligent temperature control, wide temperature control range, from -150 ℃ to+350 ℃, suitable for the constant temperature control needs of most enterprises. The temperature control accuracy can reach ± 0.1 ℃, and corresponding products can be provided from 0.5kW to 1200kW of refrigeration power.
Applications
Suitable for semiconductor process wet washing, photolithography, etching, chemical meteorological deposition, physical meteorological deposition, and the electronics industry (photolithography process).
Such as chillers that control the processing temperature on the Fab equipments.
Cooling of CMOS/CCD sensors in semiconductor metrology systems.
Recirculating Chiller for semiconductor metering AOI system.
Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.
Used for plasma bevel etch and deposition; Thermal Atomic Layer Etching of Metal Tungsten.
Customized Semiconductor Water Chiller
product advantages
- Efficient production stability and repeatability results;
- Using plate heat exchangers and pipeline heaters to improve cooling and heating rates;
- Very wide temperature range, no need to replace liquid medium;
- Fully enclosed system, extending the lifespan of thermal conductive liquids;
- Adopting magnetic drive pump, there is no problem of shaft seal leakage;
- High temperature cooling technology, directly start the compressor to cool down at 300 ℃.
Semiconductor Manufacturing Chiller -40℃~100℃
Heating within 40 ° C by the hot air of the gas extraction compressor
The Chiller circulation system adopts a fully enclosed design and uses a magnetic driven pump.
Chiller 100% helium testing, 100% safety compliance testing to ensure safety and reliability.
Chiller 100% continuous operation of the copying machine after 24 hours
FLT-100℃~90℃ low temperature cascade
Product data downloadConfiguration Detailschillers that control the processing temperature on the Fab equipmentsApplicationsrecommend products Model FLTZ-803W FLTZ-805W FLTZ-806W FLT-Z808W FLTZ-810W Temp Range -80℃~+90℃ …
FLTZ -30℃~40℃ Double frequency conversion series
Product data downloadConfiguration Detailschillers that control the processing temperature on the Fab equipmentsApplicationsrecommend products Model FLTZ-305W FLTZ-305W/2T Double System Temp Range -30℃~40℃ -30℃~40℃…
Heat Exchange Chiller ETCU
Temperature control in semiconductor production and testing processesEnsure stable and reliable overall semiconductor process flow from front-end to back-endConfiguration DetailsProductDescriptionApplication scenarios of temperature control in sem…
FLTZ -45℃~90℃
Product data downloadTemperature control in semiconductor production and testing processesEnsure stable and reliable overall semiconductor process flow from front-end to back-endProductDescriptionchillers that control the processing temperature on…
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Gas Cooling Chiller
Gas Cooling Chiller LQ -40°C~-110°C
ProductDescription You may also be interested in these products It is used to cool the gas (non corrosive) or recover it as non corrosive gas by condensation and liquefaction. Pressure resistance of gas heat exchange system: 25ba…
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Temperature control range: -110 ℃ to -40 ℃
Air volume range: 15m ³/ H~100m ³/ H
Efforts should be made to cool down the corrosion of materials, such as dry compressed air, nitrogen gas, argon gas, etc., and introduce them into the LQ series equipment at room temperature. The resulting materials can reach the standard low temperature and be supplied to the components or heat exchangers for demand testing.
Air Circulating Cooling Chiller
Circulation Air Chiller AI -85℃~125℃
Product data downloadProductDescriptionYou may also be interested in these products * 1. Widely used in high and low temperature testing of semiconductor equipment.Cold and heat source of electronic equipment at …
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Applications:
Temperature control range: -105 ℃ to+125 ℃
Used for low-temperature testing of semiconductor equipment. Electrical equipment – temperature, low temperature, constant temperature testing of cold and heat sources; Unique refrigeration cycle unit.
Features:
Can work continuously for a long time, automatically defrost, and the defrosting process does not affect the storage temperature; Modular design, easy replacement of backup units (only one backup unit is needed)
Solve the problem of frequent on-off and frost formation in the evaporation system; The defrosting process of the evaporation system does not affect it.
Temperature Forcing System
Temperture Forcing System/ Jet Impact Testing Machine
Temperature forcing system is Thermal Stream Equipment AES series
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Applications:
The jet type high and low temperature impact testing machine provides accurate and fast environmental temperature for chips, modules, integrated circuit boards, electronic components, etc. It is an indispensable instrument and equipment for product electrical performance testing, failure analysis, and reliability evaluation.
Temperature control range: -120 ℃ to+300 ℃, with a very fast temperature rise and fall rate, 150 ℃ to -55 ℃<10 seconds, maximum flow rate: 30m ³/ H
Features:
Real time monitoring of the actual temperature of the tested IC, achieving closed-loop feedback, real-time adjustment of the temperature rise and fall time of the body, programmable operation, manual operation, and remote control
Test conditions: ambient temperature of 20 ℃, 30m ³/ h. 5 bar, compressed air or nitrogen can be customized for 100m ³/ H-body flow rapid impact testing machine, suitable for testing power requirements at full flow rate.
Data Center Servers Cooling Chiller
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Applications:
A full chain layout of liquid cooled server supporting infrastructure is provided by liquid cooled CDU distribution units to provide cooling liquid for the cooling plates inside the server rack. The maximum utilization of liquid cooled plate heat exchange cools the main heat sources inside the server, reducing the use of the cooling system, helping the server achieve higher power cooling requirements and higher computational density for individual cabinets, further reducing PUE, achieving “carbon peak” and “carbon neutrality” Under the vision, we aim to promote the development of green and high-quality data.
Features:
Cold Plate Type 15kW
Cabinet Type 300kW
Variable frequency pump can adjust circulating hydraulic pressure and flow
chillers that control the processing temperature on the Fab equipments
Heating function
Due to the use of heat generated during heating, circulating heating can be achieved without the need for a heater.
Communication function
Standard equipment includes serial communication (RS232C, RS485) and contact input/output. Can communicate with customer devices or build systems.
client output signal
Provide 7 * 24 free consultation and comprehensive solutions
Recommended products
Dynamic Temperature Control Systems (Biochemistry Pharmaceutical Process)
Temperature Control :-120℃~350℃
Temperature control for high pressure reactor;Double-layer glass reactor;Double-layer reactor;Microchannel Reactor;Distillation system;Material aging test;Vacuum chamber etc.
Control Temperature Control Flow Systems(Vehicle/Battery Pack Test)
Temperature Control: -40℃~100℃
Temperature simulation for vehicle quality test: battery life test, fuel injector/motor test bench, airbag test, component test bench, etc. It can simulate the external environmental conditions in the climate chamber or replace the internal system, which can create the necessary actual temperature conditions for the test bench.
Cooling Heating Systems (Semiconductor Production)
Temperature Control: -85℃~250℃
Suitable for semiconductor process wet washing, photolithography, etching, chemical meteorological deposition, physical meteorological deposition, and the electronics industry (photolithography process)
Accept Customized Outdoor Chiller and Indoor Chiller
Outdoor Chiller
Indoor Chiller