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Thermal Chillers for Semiconductor ATE & Process

Advanced liquid temperature control technology, actively exploring and researching component test systems, mainly used for temperature test simulation in pharmaceutical chemicals, new energy, semiconductors, and aerospace testing, with wide temperature direction and high temperature rise and fall, temperature range: -80°C~+90°C, temperature control accuracy up to: ±0.05℃, suitable for various test requirements.

Such as chillers that control the processing temperature on the Fab equipments.

Cooling of CMOS/CCD sensors in semiconductor metrology systems.

Recirculating Chiller for semiconductor metering AOI system.

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Used for plasma bevel etch and deposition; Thermal Atomic Layer Etching of Metal Tungsten.

FLTZ Frequency Conversion Series

Model 5℃~90℃  -25℃~90℃  -45℃~90℃  -80℃~+90℃  -100℃~+90℃
Temperature control accuracy ±0.05℃ ±0.05℃ ±0.05℃ ±0.05℃ ±0.05℃
Cooling capacity 6KW~40KW @10℃ 2KW~15KW @-15℃ 1KW~8KW @-35℃ 0.6KW~3KW @-70℃ 1.5KW~3KW @-90℃

FLTZ Frequency Conversion Multi-channel Series

Model -20℃~+90℃  -45℃~+80℃ -10℃~+80℃  -25℃~+100℃
Pipeline channel 2 channel 2 channel 3 channel 3
Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ ±0.1℃
Cooling capacity 4kW@-10℃ 11kW@-20℃
5kW@-40℃
4kW@-10℃/21kW@+20℃ 13kW@PCW+15℃
Heating capacity 2kW 2kW 4.5+6kW 6kW

Model FLTZ-203W/2T dual system FLTZ-305W/2T  dual system FLTZ-406W/2T dual system
Temperature range -20℃~90℃  -30℃~90℃ -45℃~90℃
Temperature control accuracy ±0.1℃
Heat conducting medium flow rate 15~45l/min 6bar max
Heating capacity 2.5kW 2.5kW 2.5kW 2.5kW 3.5kW 3.5kW
Cooling capacity 3kW @-15℃ 3kW @-15℃ 5kW @-15℃ 5kW @-15℃ 2.5kW @-35℃ 2.5kW @-35℃

ETCU Heat Exchange Chiller Series

Model ETCU-005W ETCU-015W ETCU-030W ETCU-050W ETCU-100W ETCU-200W ETCU-300W
Temperature range Cooling water temperature +5℃~90℃
Temperature control accuracy ±0.05℃(Steady state outlet temperature)
Cooling water temperature 7℃~30℃ Cooling water flow is controlled by Siemens/Honeywell regulating valves
Cooling capacity 5kW 15kW 30kW 50kW 100kW 200kW 300kW

AES Series Thermal Stream

Model AES-4535
AES-4535W
AES-6035
AES-6035W
AES-8035
AES-8035W
AES-A1035W AES-A1235W
Temperature range -40℃~225℃ -60℃~225℃ -80℃~225℃ -100℃~225℃ -120℃~225℃
Temperature accuracy ±0.1℃(Steady state outlet temperature)
Air requirements Air filter < 5um air oil content < 0.1um air temp and humidity:5℃-32℃ 0-50%RH
Air treatment capacity 10m³/h-m³/h  pressure 5bar-7.6bar

Contact LNEYA technical engineer for model selection

  • Efficient production stability and repeatability results;
  • Using plate heat exchangers and pipeline heaters to improve cooling and heating rates;
  • Very wide temperature range, no need to replace liquid medium;
  • Fully enclosed system, extending the lifespan of thermal conductive liquids;
  • Adopting magnetic drive pump, there is no problem of shaft seal leakage;
  • High temperature cooling technology, directly start the compressor to cool down at 300 ℃.

Submit your request to us and we will contact you within 24 hours
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Multi-channel

Channel 1Channel 2Channel 3

Temperature control range

-30℃~25℃-80℃~90℃5℃~90℃-60℃~-30℃*
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Temperature Control :-120℃~350℃

Temperature Control: -40℃~100℃

Temperature Control: -85℃~250℃

Outdoor Chiller

Indoor Chiller