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Such as chillers that control the processing temperature on the Fab equipments.

Cooling of CMOS/CCD sensors in semiconductor metrology systems.

Recirculating Chiller for semiconductor metering AOI system.

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

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  • Efficient production stability and repeatability results;
  • Using plate heat exchangers and pipeline heaters to improve cooling and heating rates;
  • Very wide temperature range, no need to replace liquid medium;
  • Fully enclosed system, extending the lifespan of thermal conductive liquids;
  • Adopting magnetic drive pump, there is no problem of shaft seal leakage;
  • High temperature cooling technology, directly start the compressor to cool down at 300 ℃.

Chiller 100% helium testing, 100% safety compliance testing to ensure safety and reliability.

Chiller 100% continuous operation of the copying machine after 24 hours

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Used for low-temperature testing of semiconductor equipment. Electrical equipment – temperature, low temperature, constant temperature testing of cold and heat sources; Unique refrigeration cycle unit.

Can work continuously for a long time, automatically defrost, and the defrosting process does not affect the storage temperature; Modular design, easy replacement of backup units (only one backup unit is needed)

Solve the problem of frequent on-off and frost formation in the evaporation system; The defrosting process of the evaporation system does not affect it.

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Temperature control range: -120 ℃ to+300 ℃, with a very fast temperature rise and fall rate, 150 ℃ to -55 ℃<10 seconds, maximum flow rate: 30m ³/ H

Real time monitoring of the actual temperature of the tested IC, achieving closed-loop feedback, real-time adjustment of the temperature rise and fall time of the body, programmable operation, manual operation, and remote control

Test conditions: ambient temperature of 20 ℃, 30m ³/ h. 5 bar, compressed air or nitrogen can be customized for 100m ³/ H-body flow rapid impact testing machine, suitable for testing power requirements at full flow rate.

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Cold Plate Type 15kW

Cabinet Type 300kW

Temperature Control :-120℃~350℃

Temperature Control: -40℃~100℃

Temperature Control: -85℃~250℃