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LNEYA is a high-end equipment manufacturing enterprise that integrates research and development, production, and sales. Its main products include specialized semiconductor temperature control equipment, jet low-temperature impact testing machines, and semiconductor process waste water treatment devices, which are widely used in fields such as semiconductors, LEDs, LCDs, and solar photovoltaics. High product accuracy, intelligent temperature control, wide temperature control range, from -150 ℃ to+350 ℃, suitable for the constant temperature control needs of most enterprises. The temperature control accuracy can reach ± 0.1 ℃, and corresponding products can be provided from 0.5kW to 1200kW of refrigeration power.

Such as chillers that control the processing temperature on the Fab equipments.

Used for plasma bevel etch and deposition; Thermal Atomic Layer Etching of Metal Tungsten.

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Multi-channel

Channel 1Channel 2Channel 3

Voltage

50HZ single phase50HZ three phase60HZ single phase60HZ three phase*
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  1. Efficient production stability and repeatability results;
  2. Using plate heat exchangers and pipeline heaters to improve cooling and heating rates;
  3. Very wide temperature range, no need to replace liquid medium;
  4. Fully enclosed system, extending the lifespan of thermal conductive liquids;
  5. Adopting magnetic drive pump, there is no problem of shaft seal leakage;
  6. High temperature cooling technology, directly start the compressor to cool down at 300 ℃.

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Solve the problem of frequent on-off and frost formation in the evaporation system; The defrosting process of the evaporation system does not affect it.

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    Temperature Control :-120℃~350℃

    Temperature Control: -40℃~100℃

    Temperature Control: -85℃~250℃

    Outdoor Chiller

    Indoor Chiller