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Conventional Type FLT -45℃~80℃

Semiconductor Production & Testing Process Chiller

Conventional type FLT -45℃~80℃
  • Temperture accuracy±0.1℃
  • Flow control25~75/min 6bar max
  • RefrigentR404A
  • Power range380V 3.5kW~16kW

Product data download

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Configuration Details

Model

FLT-002

FLT-002W

FLT-003

FLT-003W

FLT-004

FLT-004W

FLT-006

FLT-006W

FLT-008

FLT-008W

FLT-010

FLT-010W

FLT-015

FLT-015W

Tempearature Control

 5℃~40℃

Temperature accuracy

±0.05℃  

Flow control  

10~25L/min  5bar max

15~45L/min  6bar max

25~75L/min  6bar max

Refrigeration capacity@10℃

 6kw

 8kw

 10kw

15 kw

 20kw

 25kw

 40kw

Internal circulation liquid volume

4L

5L

6L

8L

10L

12L

20L

Expansion tank capacity

10L

10L

15L

15L

20L

25L

35L

Refrigerant

R410A

Secondary Refrigerant

Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, DI, etc. (DI temperature needs to be controlled above 10 ℃)

Entry and exit interfaces

ZG1/2

ZG1/2

ZG3/4

ZG3/4

ZG3/4

ZG1

ZG1

Cooling water outlet

ZG1/2

ZG1/2

ZG3/4

ZG1

ZG1

ZG1

ZG1 1/8

Cooling water flow rate@20℃

1.5m³/h

2m³/h

2.5m³/h

4m³/h

4.5m³/h

5.6m³/h

9m³/h

power supply 380V

3.5kW

4kW

5.5kW

7kW

9.5kW

12kW

16kW

Temperature extension

By adding an electric heater, expand the temperature range from -25 ℃ to 80 ℃

Model

FLT-202

FLT-202W

FLT-203

FLT-203W

FLT-204

FLT-204W

FLT-206

FLT-206W

FLT-208

FLT-208W

FLT-210

FLT-210W

FLT-215

FLT-215W

Temp Range

-25℃~40℃

Temp Control Accuracy

±0.05℃  

Flow Control  

10~25L/min ±0.3

15~45L/min ±0.3

25~75L/min ±0.3

The flow control is adjusted by a frequency converter, and the maximum pressure of the circulation pump is 5bar.

Refrigeration

@-15℃

2kw

3kw

3.8kw

6kw

7.6kw

10kw

15kw

Internal Circulation Fluid Volume

4L

5L

6L

8L

10L

12L

20L

Expansion tank volume

10L

10L

15L

15L

20L

25L

35L

refrigerant

R404A

Secondary Refrigerant

Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, etc.

Ingress and egress interface

ZG1/2

ZG1/2

ZG3/4

ZG3/4

ZG3/4

ZG1

ZG1

Cooling water connection

ZG1/2

ZG1/2

ZG3/4

ZG3/4

ZG1

ZG1

ZG1 1/8

Cooling water flow@20℃

1.2m³/H

1.6m³/H

2.6m³/H

3.6m³/H

5.5m³/H

7m³/H

10.2m³/H

Power 380V

3KW

4KW

6KW

8KW

9KW

13KW

17KW

Temp Expansion

By adding an electric heater, it can be extended to -25℃~80℃

Model

FLT-402

FLT-402W

FLT-403

FLT-403W

FLT-404

FLT-404W

FLT-406

FLT-406W

FLT-408

FLT-408W

FLT-410

FLT-410W

FLT-415

FLT-415W

Temp Control

 -45℃~40℃

Temp control accuracy

±0.05℃  

Flow Control  

10~25L/min  5bar max

15~45L/min 6bar max

25~75L/min 6bar max

Heating

Compressor heating is used to prevent condenser frosting technology

Refrigeration Capacity

@-35℃

1kw

1.4kw

1.8kw

2.5kw

3.3kw

5kw

8kw

Internal circulation fluid volume

4L

5L

6L

8L

10L

12L

20L

Expansion tank volume

10L

10L

15L

15L

20L

25L

35L

Refrigerant

R404A

Secondary Refrigerant

Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, etc.

Ingress and egress interface

ZG1/2

ZG1/2

ZG3/4

ZG3/4

ZG3/4

ZG1

ZG3/4

Cooling water connection

ZG1/2

ZG3/4

ZG3/4

ZG1

ZG1

ZG1

ZG1 1/8

Cooling water flow @20℃

1.5m³/H

2.4m³/H

3.5m³/H

5m³/H

5.5m³/H

6m³/H

8m³/H

Power 380V

3KW

4KW

6KW

7.5KW

9KW

12KW

15KW

Temperature Expansion

By adding an electric heater, it can be extended to -25℃~80℃

Product Description

The semiconductor temperature control device Chiller is mainly used for precise temperature control in semiconductor production and testing processes. Its products include fluid fluorinated liquid temperature control (minimum -100 degrees), rapid temperature change of gas cooling and heating, rapid temperature change chuck, low-temperature gas refrigeration machine (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies various algorithms (PID, feedforward PID, and model free self built tree algorithm) in the system to achieve fast response and high control accuracy.

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