Semiconductor Cooling ChillerFLTZ -45℃~90℃Cooling Chiller Temperture accuracy±0.1℃Flow control25~75/min 6bar maxRefrigentR404A Power range380V 3.5kW~16kWcooling chillersemiconductor chiller REQUEST Product data downloadmanual.pdf Temperature control in semiconductor production and testing processes Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours Ensure stable and reliable overall semiconductor process flow from front-end to back-end Product Description The semiconductor temperature control device Chiller is mainly used for precise temperature control in semiconductor production and testing processes. Its products include fluid fluorinated liquid temperature control (minimum -100 degrees), rapid temperature change of gas cooling and heating, rapid temperature change chuck, low-temperature gas refrigeration machine (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies various algorithms (PID, feedforward PID, and model free self built tree algorithm) in the system to achieve fast response and high control accuracy. The important information such as the exhaust and suction temperature (pressure), condensation temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), electrical power, current and voltage of each component, and water tank level of the chiller are all comprehensively managed, monitored and recorded through sensors connected to the control system. Heating method within 40 ℃ adopts compressor hot gas heating. The chiller circulation system adopts a fully enclosed design, and the circulation pump adopts a magnetic drive pump. Chiller 100% helium testing, 100% safety regulations testing to ensure system safety and reliability. The chiller runs the copying machine continuously for 24 hours at 100%. chillers that control the processing temperature on the Fab equipments Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls. Configuration Details Model FLTZ-002 FLTZ-002W FLTZ-003 FLTZ-003W FLTZ-004 FLTZ-004W FLTZ-006 FLTZ-006W FLTZ-008 FLTZ-008W FLTZ-010 FLTZ-010W FLTZ-015 FLTZ-015W Tempearature Control 5℃～90℃ Temperature accuracy ±0.05℃ Flow control 10～25L/min 5bar max 15～45L/min 6bar max 25～75L/min 6bar max Refrigeration capacity@10℃ 6kw 8kw 10kw 15 kw 20kw 25kw 40kw Internal circulation liquid volume 4L 5L 6L 8L 10L 12L 20L Expansion tank capacity 10L 10L 15L 15L 20L 25L 35L Refrigerant R410A Secondary Refrigerant Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, DI, etc. (DI temperature needs to be controlled above 10 ℃) Entry and exit interfaces ZG1/2 ZG1/2 ZG3/4 ZG3/4 ZG3/4 ZG1 ZG1 Cooling water outlet ZG1/2 ZG1/2 ZG3/4 ZG1 ZG1 ZG1 ZG1 1/8 Cooling water flow rate@20℃ 1.5m³/h 2m³/h 2.5m³/h 4m³/h 4.5m³/h 5.6m³/h 9m³/h power supply 380V 3.5kW 4kW 5.5kW 7kW 9.5kW 12kW 16kW Temperature extension By adding an electric heater, expand the temperature range from -25 ℃ to 80 ℃ Model FLTZ-202 FLTZ-202W FLTZ-203 FLTZ-203W FLTZ-204 FLTZ-204W FLTZ-206 FLTZ-206W FLTZ-208 FLTZ-208W FLTZ-210 FLTZ-210W FLTZ-215 FLTZ-215W Temp Range -25℃～90℃ Temp Control Accuracy ±0.05℃ Flow Control 10～25L/min ±0.3 15～45L/min ±0.3 25～75L/min ±0.3 The flow control is adjusted by a frequency converter, and the maximum pressure of the circulation pump is 5bar. Refrigeration @-15℃ 2kw 3kw 3.8kw 6kw 7.6kw 10kw 15kw Internal Circulation Fluid Volume 4L 5L 6L 8L 10L 12L 20L Expansion tank volume 10L 10L 15L 15L 20L 25L 35L refrigerant R404A Secondary Refrigerant Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, etc. Ingress and egress interface ZG1/2 ZG1/2 ZG3/4 ZG3/4 ZG3/4 ZG1 ZG1 Cooling water connection ZG1/2 ZG1/2 ZG3/4 ZG3/4 ZG1 ZG1 ZG1 1/8 Cooling water flow@20℃ 1.2m³/H 1.6m³/H 2.6m³/H 3.6m³/H 5.5m³/H 7m³/H 10.2m³/H Power 380V 3KW 4KW 6KW 8KW 9KW 13KW 17KW Temp Expansion By adding an electric heater, it can be extended to -25℃~80℃ Model FLTZ-402FLTZ-402W FLTZ-403FLTZ-403W FLTZ-404FLTZ-404W FLTZ-406FLTZ-406W FLTZ-408FLTZ-408W FLTZ-410FLTZ-410W FLTZ-415FLTZ-415W Temp Control -45℃～90℃ Temp control accuracy ±0.05℃ Flow Control 10～25L/min 5bar max 15～45L/min 6bar max 25～75L/min 6bar max Heating Compressor heating is used to prevent condenser frosting technology Refrigeration Capacity @-35℃ 1kw 1.4kw 1.8kw 2.5kw 3.3kw 5kw 8kw Internal circulation fluid volume 4L 5L 6L 8L 10L 12L 20L Expansion tank volume 10L 10L 15L 15L 20L 25L 35L Refrigerant R404A Secondary Refrigerant Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, etc. Ingress and egress interface ZG1/2 ZG1/2 ZG3/4 ZG3/4 ZG3/4 ZG1 ZG3/4 Cooling water connection ZG1/2 ZG3/4 ZG3/4 ZG1 ZG1 ZG1 ZG1 1/8 Cooling water flow @20℃ 1.5m³/H 2.4m³/H 3.5m³/H 5m³/H 5.5m³/H 6m³/H 8m³/H Power 380V 3KW 4KW 6KW 7.5KW 9KW 12KW 15KW Temperature Expansion By adding an electric heater, it can be extended to -25℃~80℃ Communication function Standard equipment includes serial Communication (RS232C, RS485) and contact input/output. Can communicate with customer devices or build systems. client output signal Submit your request to us and we will contact you within 24 hours**Multi-channelChannel 1Channel 2Channel 3Voltage50HZ single phase50HZ three phase60HZ single phase60HZ three phase*Submitting….Submitted successfully!Submission failed! Please try again laterEmail error!Phone error! recommend products Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber sid… FLT-100℃~90℃ Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber sid…loading…已经是到最后一篇内容了！
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