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Heat Exchange Chiller ETCU

Heat Exchange Chiller (Semiconductor temperature control )

ETCU 5℃~90℃

The main application is to accurately control the temperature in the semiconductor production process and testing process.

The heating method is within 40°C and uses compressor hot gas to heat the concentrate.

The circulation system adopts a fully sealed design, and the circulation pump adopts a magnetic drive pump.

Ammonia testing and safety testing to ensure system safety, reliability and prosperity;

After 24 hours of continuous running of the copy machine

Product data download

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Configuration Details

Model

ETCU-005W

ETCU-008W

ETCU-015W

ETCU-030W

Temp Range

Cooling Water Temp +5℃~90℃   ±0.3℃

Cooling Water Temp

7℃~30℃ Use Siemens/Honeywell regulating valve to control cooling water flow

Cooling Capacity

5kw

8kw

15kw

30kw

 

Test conditions: At maximum circulation volume, the temperature difference between the temperature control temperature and the cooling water temperature is 15°C

Circulation pump flow

7~20L/min 5bar

7~20L/min 5bar

15~40L/min 5bar

20~60L/min 5bar

Tank volume

6L

8L

10L

15L

Size

480*750*390

480*750*390

480*750*390

480*750*500

Power

220V 50HZ/60hz    0.6kw

220V 50HZ/60hz1.3kw

220V 50HZ/60hz 1.6kw

Product Description

The semiconductor temperature control device Chiller is mainly used for precise temperature control in semiconductor production and testing processes. Its products include fluid fluorinated liquid temperature control (minimum -100 degrees), rapid temperature change of gas cooling and heating, rapid temperature change chuck, low-temperature gas refrigeration machine (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies various algorithms (PID, feedforward PID, and model free self built tree algorithm) in the system to achieve fast response and high control accuracy.

Applications

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