LNEYA Industrial Chillers Manufacturer Supplier -
FLT -100℃~90℃
semiconductor production process water chiller- Temperture accuracy±0.1℃
- Flow control12~45/min
- TypeFrequency Variable Series
- Power range380V
FLTZ -100℃～+90℃ Low Temperature Cascade Refrigeration Series
| Model | FLTZ-002 | FLTZ-003 | FLTZ-004 | FLTZ-006 | FLTZ-008 | FLTZ-010 | FLTZ-015 |
| FLTZ-002W | FLTZ-003W | FLTZ-004W | FLTZ-006W | FLTZ-008W | FLTZ-010W | FLTZ-015W | |
| Temperature range | 5℃～90℃ | ||||||
| Temperature control accuracy | ±0.05℃（Steady state outlet temperature） | ||||||
| Cooling capacity @10℃ | 6kW | 8kW | 10kW | 15kW | 20kW | 25kW | 40kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| Expansion tank volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| Refrigerant | R410A | ||||||
| Refrigerating medium | Silicone oil, fluorinated liquid, polyol aqueous solution, DI, etc. (DI temp needs to be controlled above 10 ℃) | ||||||
| Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling water connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG1 | ZG1 | ZG1 | ZG1 1/8 |
| Cooling water flow @20℃ | 1.5m³/h | 2m³/h | 2.5m³/h | 4m³/h | 4.5m³/h | 5.6m³/h | 9m³/h |
| Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
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| Dimension cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*600*1500 | 1080*600*1500 |
| Model | FLTZ-1002W | FLTZ-1004W |
| Temperature range | -100℃～+90℃ | |
| Temperature control accuracy | ±0.05℃（Steady state outlet temperature） | |
| Flow control | 7～25L/min | 12～45L/min |
| Cooling capacityat-90℃ | 1.5kW | 3kW |
| Heating capacity | 3.5kW | 5.5kW |
| Internal circulating fluid volume | 5L | 8L |
| Expansion tank volume | 10L | 15L |
| Heat-conduction medium | Fluorinated liquid | |
| Connection size | ZG3/4 | ZG3/4 |
| Cooling water connection size | ZG3/4 | ZG1 |
| Cooling water@20℃ | 50L/min 2bar~7bar | 100L/min 2bar~7bar |
| Circuit breaker | 32A | 63A |
| Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
|
FLTZ -45℃～90℃
| Model | FLTZ-002 | FLTZ-003 | FLTZ-004 | FLTZ-006 | FLTZ-008 | FLTZ-010 | FLTZ-015 |
| FLTZ-002W | FLTZ-003W | FLTZ-004W | FLTZ-006W | FLTZ-008W | FLTZ-010W | FLTZ-015W | |
| Temperature range | 5℃～90℃ | ||||||
| Temperature control accuracy | ±0.05℃（Steady state outlet temperature） | ||||||
| Cooling capacity @10℃ | 6kW | 8kW | 10kW | 15kW | 20kW | 25kW | 40kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| Expansion tank volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| Refrigerant | R410A | ||||||
| Refrigerating medium | Silicone oil, fluorinated liquid, polyol aqueous solution, DI, etc. (DI temp needs to be controlled above 10 ℃) | ||||||
| Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling water connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG1 | ZG1 | ZG1 | ZG1 1/8 |
| Cooling water flow @20℃ | 1.5m³/h | 2m³/h | 2.5m³/h | 4m³/h | 4.5m³/h | 5.6m³/h | 9m³/h |
| Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
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| Dimension cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*600*1500 | 1080*600*1500 |
| Model | FLTZ-202 | FLTZ-203 | FLTZ-204 | FLTZ-206 | FLTZ-208 | FLTZ-210 | FLTZ-215 |
| FLTZ-202W | FLTZ-203W | FLTZ-204W | FLTZ-206W | FLTZ-208W | FLTZ-210W | FLTZ-215W | |
| Temperature range | -25℃～90℃ | ||||||
| Temperature control accuracy | ±0.05℃（Steady state outlet temperature） | ||||||
| Flow control | 10～25L/min | 15～45L/min | 25～75L/min | ||||
| Cooling capacity @-15℃ | 2kW | 3kW | 3.8kW | 6kW | 7.6kW | 10kW | 15kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| Expansion tank volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| Refrigerant | R404A | ||||||
| Refrigerating medium | Silicone oil, fluorinated liquid, glycol solution etc | ||||||
| Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling water connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG1 | ZG1 | ZG1 1/8 |
| Cooling water flow @20℃ | 1.2m³/H | 1.6m³/H | 2.6m³/H | 3.6m³/H | 5.5m³/H | 7m³/H | 10.2m³/H |
| Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
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| Dimension cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*600*1500 | 1080*600*1500 |
| Model | FLTZ-402 | FLTZ-403 | FLTZ-404 | FLTZ-406 | FLTZ-408 | FLTZ-410 | FLTZ-415 |
| FLTZ-402W | FLTZ-403W | FLTZ-404W | FLTZ-406W | FLTZ-408W | FLTZ-410W | FLTZ-415W | |
| Temperature range | -45℃～90℃ | ||||||
| Temperature control accuracy | ±0.05℃（Steady state outlet temperature） | ||||||
| Flow control | 10～25L/min 5bar max | 15～45L/min 5bar max | 25～75L/min 5bar max | ||||
| Heating | Using compressor heating, prevent condenser frosting technology | ||||||
| Cooling capacity @-35℃ | 1kW | 1.4kW | 1.8kW | 2.5kW | 3.3kW | 5kW | 8kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| Expansion tank volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| Refrigerant | R404A | ||||||
| Refrigerating medium | Silicone oil, fluorinated liquid, glycol solution etc | ||||||
| Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling water connection size | ZG1/2 | ZG3/4 | ZG3/4 | ZG1 | ZG1 | ZG1 | ZG1 1/8 |
| Cooling water flow @20℃ | 1.5m³/H | 2.4m³/H | 3.5m³/H | 5m³/H | 5.5m³/H | 6m³/H | 8m³/H |
| Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
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| Dimension cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*500*1500 | 1080*500*1500 |
Heat exchange Chiller Compressor-free
| Model | ETCU-005W | ETCU-015W | ETCU-030W | ETCU-050W | ETCU-100W | ETCU-200W | ETCU-300W |
| Temperature range | Cooling water temperature +5℃~90℃ | ||||||
| Temperature control accuracy | ±0.05℃（Steady state outlet temperature） | ||||||
| Cooling water temperature | 7℃~30℃ Cooling water flow is controlled by Siemens/Honeywell regulating valves | ||||||
| Cooling capacity | 5kW | 15kW | 30kW | 50kW | 100kW | 200kW | 300kW |
| Test conditions: When the maximum circulation amount, the temperature difference between the temperature control temperature and the cooling water temperature is 15℃ |
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| Circulation pump | 7~20L/min 5bar | 15~40L/min 5bar | 20~60L/min 5bar | 40~110L/min 5bar | 150~250L/min 5bar | 250~500L/min 5bar | 400~650L/min 5bar |
| Tank volume | 5L | 10L | 20L | 30L | 60L | 120L | 240L |
| Dimension cm | 480*750*390 | 480*750*390 | 480*750*500 | Customization | Customization | Customization | Customization |
chillers that control the processing temperature on the Fab equipments
Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.
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