FLT -25℃~-40℃

Mainly used for precise temperature control in semiconductor production and testing processes, heating within 40 ° C using a compressor hot gas heating method

Semiconductor Test Chillers

Temperture accuracy±0.1℃
Flow control25~75/min 6bar max
RefrigentR404A
Power range380V 3kW~17kW

cooling chiller semiconductor chiller

INQUIRY

Product data download

manual.pdf

Temperature control in semiconductor production and testing processes

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Ensure stable and reliable overall semiconductor process flow from front-end to back-end

Configuration Details

Model	FLT-202 FLT-202W	FLT-203 FLT-203W	FLT-204 FLT-204W	FLT-206 FLT-206W	FLT-208 FLT-208W	FLT-210 FLT-210W	FLT-215 FLT-215W
Temp Range	-25℃～40℃
Temp Control Accuracy	±0.1℃
Flow Control	10～25L/min ±0.3		15～45L/min ±0.3			25～75L/min ±0.3
Flow Control	The flow control is adjusted by a frequency converter, and the maximum pressure of the circulation pump is 5bar.
Refrigeration @-15℃	2kw	3kw	3.8kw	6kw	7.6kw	10kw	15kw
Internal Circulation Fluid Volume	4L	5L	6L	8L	10L	12L	20L
Expansion tank volume	10L	10L	15L	15L	20L	25L	35L
refrigerant	R404A
Secondary Refrigerant	Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, etc.
Ingress and egress interface	G1/2	G1/2	G3/4	G3/4	G3/4	G1	G1
Cooling water connection	G1/2	G1/2	G3/4	G3/4	G1	G1	G1 1/8
Cooling water flow@20℃	1.2m³/H	1.6m³/H	2.6m³/H	3.6m³/H	5.5m³/H	7m³/H	10.2m³/H
Power 380V	3KW	4KW	6KW	8KW	9KW	13KW	17KW
Temp Expansion	By adding an electric heater, it can be extended to -25℃~80℃

Product Description

The semiconductor temperature control device Chiller is mainly used for precise temperature control in semiconductor production and testing processes. Its products include fluid fluorinated liquid temperature control (minimum -100 degrees), rapid temperature change of gas cooling and heating, rapid temperature change chuck, low-temperature gas refrigeration machine (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies various algorithms (PID, feedforward PID, and model free self built tree algorithm) in the system to achieve fast response and high control accuracy.

The important information such as the exhaust and suction temperature (pressure), condensation temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), electrical power, current and voltage of each component, and water tank level of the chiller are all comprehensively managed, monitored and recorded through sensors connected to the control system.

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.