Cooling Chiller

In order to improve the yield rate of products and ensure profitability, quality control needs to be carried out at every stage of the semiconductor industry. One important factor affecting product quality is temperature, and temperature stability and accuracy are very important to ensure stable and reliable products. Ensure stable and reliable overall semiconductor process flow from front-end to back-end.

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Can be used in process processes: oxidation, glue coating, photolithography, development, etching, ion implantation, glue removal, film deposition, CMP, cleaning.

Top dielectric etching dual channel chiller
Metal hard mask etching single channel chiller
Shallow trench isolation trench etching single channel chiller
Side wall etching single channel chiller
Metal hard mask etching single channel chiller
Shallow trench isolation trench etching single channel chiller
Polycrystalline silicon etching single channel chiller
Side wall etching single channel chiller
Edge etching single channel chiller
Dielectric etching dual channel chiller
Photoresist etching back dual channel chiller
Polycrystalline silicon etching dual channel chiller
Shallow trench isolation trench etching dual channel chiller
Top layer dielectric etching (cathode) single channel chiller
Top layer dielectric etching (chamber wall) single channel chiller
Dielectric etching dual channel chiller
Contact hole etching dual channel chiller