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Recirculating Water Chillers

FLTZ -80℃~90℃

Have strong cooling capacity, wide temperature control range and precise temperature control accuracy (±0.05℃), and are designed for semiconductor, aerospace and other applications.

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fltz series

-80°C

lowest

90°C

Highest

±0.05°C

Temperature control accuracy

have unparalleled advantages in low-temperature refrigeration applications.

Contact LNEYA sales engineer for catalog or price.


Model FLTZ-803W~810W
Temperature range  -80℃～+90℃
Temperature control accuracy ±0.05℃（Steady state outlet temperature）
Flow control 7～45L/min 6bar max
Cooling capacityat-70℃ 0.6kW~3kW
Heating capacity 2kW~3.5kW
Internal circulating fluid volume 4L~10L
Expansion tank volume 10L~20L
Heat-conduction medium Fluorinated liquid
Cooling water@20℃ 1.8m3/h~6m3/h
Dimension cm 550*700*1750~800*1200*1850

The recirculating water chiller system is a fully closed circulation system. It does not absorb moisture in the air at low temperatures, and does not volatilize heat transfer media or produce oil mist at high temperatures.


Compressor hot gas heating within -40 degrees Celsius
Variable frequency pump adjusts circulating fluid pressure and flow.




LNEYA has been focusing on low-temperature chillers for 15 years. Refrigeration below -60℃ is our advantageous temperature range. If you need, we can do -150℃
to meet your various application needs.


The key to ensuring high precision and high efficiency

Applications

FLTZ -80℃~90℃
recirculating water chillers are often used in the front-end and back-end processes of semiconductors due to their excellent cooling capacity.

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Lon implantation

Lon implantation is an important process in semiconductor manufacturing for adjusting the electrical properties of materials. This process requires strict temperature control to ensure the depth and distribution accuracy of ion implantation. FLTZ -80℃~90℃ recirculating water chillers can provide a stable temperature environment to improve implantation accuracy.

Wafer temperature control

Wafers need to be kept in a specific temperature range during the lithography and etching processes. FLTZ -80℃~90℃
recirculating water chillers can provide a stable low or high temperature environment to avoid temperature fluctuations affecting process effects.

Thermal cycle test

Semiconductor components will experience extreme temperature differences in actual use, so their reliability needs to be tested through thermal cycle tests.Recirculating water chillers can provide a temperature range of -80℃ to 90℃, simulating temperature fluctuations in actual working environments and testing the temperature resistance and stability of semiconductor components.

Other models for semiconductor industry

Thermal chillers

Temp range 5~90℃

Temp accuracy ±0.05℃

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Process chillers

Temp range -25~90℃

Temp accuracy ±0.05℃

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Low temperature chillers

Temp range -45~90℃

Temp accuracy ±0.05℃

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Recirculation chillers

Temp range -100~90℃

Temp accuracy ±0.05℃

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You can trust our Semiconductor chiller factory

General chillers use silicone oil, ethylene glycol aqueous solution, ethanol, DI, etc. as heat transfer media, while FLTZ -80℃~90℃ circulating water chillers use fluorinated liquid. This is because fluorinated liquid evaporates faster and is non-flammable, has better cooling effect and higher safety, and is often used for semiconductor process cooling.

Global service

Served more than 30,000 customers.
Exported to more than 20 countries.

Certification patents

Has obtained CE certification, SGS certification, ISO certification.

After-sales service

Provide comprehensive technical training.
With 24/7 solutions.

Professional team

Founded in 2010, with 15 years of industry experience.
20% of employees are technicians.

Quality control

Visual inspection.
Performance test.
Electrical safety test.

Get in touch with our Recirculating Water chiller experts

Due to the cooling temperature of the FLTZ -80 ℃~90 ℃ circulating water-cooled chiller being as low as -80 ℃, in order to ensure that you can use it even in hot environments, we have adopted a water-cooled condenser.

Generally, chillers use silicone oil, ethylene glycol aqueous solution, ethanol, DI, and other heat transfer media, while FLTZ -80 ℃~90 ℃ circulating water chillers use fluorinated liquid. This is because fluorinated liquid evaporates faster, is non flammable, has better cooling effect and higher safety, and is commonly used for semiconductor process cooling.

It has a wide temperature range and can easily achieve cooling from -80 ℃ to 90 ℃. Using this water-cooled chiller not only requires no equipment replacement, but also no medium replacement. By combining the model free self building algorithm with the cascade algorithm, it is possible to accurately control the temperature of remote targets and achieve rapid cooling. Send us an email directly to sales@cnzlj.com

Contact LNEYA

Submit your request to us and we will contact you within 24 hours

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