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FLTZ -80℃~90℃
FLTZ-80℃~90℃ series recirculating water chillers have unparalleled advantages in low-temperature refrigeration applications. The temperature range of this water-cooled chiller is -80℃~90℃, the temperature control accuracy is as high as ±0.05℃, and the control results can be repeated.
The recirculating water chiller system is a fully closed circulation system. It does not absorb moisture in the air at low temperatures, and does not volatilize heat transfer media or produce oil mist at high temperatures.
LNEYA has been focusing on low-temperature chillers for 15 years. Refrigeration below -60℃ is our advantageous temperature range. If you need, we can do -150℃ to meet your various application needs.
As a product of the low-temperature cascade refrigeration series, the FLTZ -80℃~90℃ recirculating water chiller has a wide temperature range, easily achieving cooling from -80℃ to 90℃.
In many process flows, precise temperature control is the key to success or failure, especially in the semiconductor industry. The FLTZ -80℃~90℃ recirculating water chiller, with its extremely high temperature control accuracy (±0.05℃), frees you from worrying about uncontrollable situations caused by temperature changes.
The efficiency of cooling also affects the quality of the process. The FLTZ -80℃~90℃ recirculating water chillers combine the model-free self-building tree algorithm with the cascade algorithm, so that the temperature of the remote target can be accurately controlled to achieve the effect of rapid cooling.
We all know that general chillers use silicone oil, ethylene glycol aqueous solution, ethanol, DI, etc. as heat transfer medium, while FLTZ -80℃~90℃ recirculating water chillers use fluorinated liquid.
This is because fluorinated liquid evaporates faster and is non-flammable, has better cooling effect and higher safety, and is often used for semiconductor process cooling.
While many chillers still use thermal expansion valves, FLTZ -80℃~90℃ recirculating water chillers are already using electronic expansion valves. It is more accurate and can be adjusted in time according to the temperature.
FLTZ -80℃~90℃ recirculating water chillers are often used in the front-end and back-end processes of semiconductors due to their excellent cooling capacity.
Lon implantation is an important process in semiconductor manufacturing for adjusting the electrical properties of materials. This process requires strict temperature control to ensure the depth and distribution accuracy of ion implantation.
FLTZ -80℃~90℃ recirculating water chillers can provide a stable temperature environment to improve implantation accuracy.
Wafers need to be kept in a specific temperature range during the lithography and etching processes. FLTZ -80℃~90℃ recirculating water chillers can provide a stable low or high temperature environment to avoid temperature fluctuations affecting process effects.
Semiconductor components will experience extreme temperature differences in actual use, so their reliability needs to be tested through thermal cycle tests. FLTZ -80℃~90℃ recirculating water chillers can provide a temperature range of -80℃ to 90℃, simulating temperature fluctuations in actual working environments and testing the temperature resistance and stability of semiconductor components.
| Model | FLTZ-803W | FLTZ-805W | FLTZ-806W | FLTZ-808W | FLTZ-810W |
| Temperature range | -80℃～+90℃ | ||||
| Temperature control accuracy | ±0.05℃（Steady state outlet temperature） | ||||
| Flow control | 7～25L/min 5bar max | 12～45L/min 6bar max | |||
| Cooling capacityat-70℃ | 0.6kW | 1kW | 1.5kW | 2kW | 3kW |
| Heating capacity | 2kW | 2kW | 2kW | 3.5kW | 3.5kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L |
| Expansion tank volume | 10L | 10L | 15L | 15L | 20L |
| Heat-conduction medium | Fluorinated liquid | ||||
| Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 |
| Cooling water connection size | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling water@20℃ | 1.8m3/h | 2.5m3/h | 3m3/h | 5m3/h | 6m3/h |
| Circuit breaker | 25A | 25A | 32A | 40A | 50A |
| Dimension cm | 550*700*1750 | 650*850*1850 | 700*850*1850 | 700*850*1850 | 800*1200*1850 |
| Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm | ||||
The air-cooled chiller cools the refrigerant through air. It does not need to be equipped with a water tower, but has a relatively high temperature requirement for the environment. When the ambient temperature is too high, the cooling efficiency is low. Especially in the hot summer, it is relatively difficult to cool to below -60℃.
The water-cooled chiller does not have this trouble. It is equipped with a water tower and a water pump. The circulating cooling water makes it more efficient and occupies a smaller area.
Since the cooling temperature of the FLTZ -80℃~90℃ recirculating water chillers are as low as -80℃, in order to ensure that you can use it in a hot environment, we use a water-cooled condenser. If you still have questions about this, our chiller experts are happy to answer you free of charge.
Served more than 30,000 customers.
Exported to more than 20 countries.
Has obtained CE certification, SGS certification, ISO certification.
Provide comprehensive technical training.
With 24/7 solutions.
Founded in 2010, with 15 years of industry experience.
20% of employees are technicians.
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