Semiconductor FAB Process Temperature Control

Semiconductor manufacturing is an extremely environmentally demanding process, and many process steps are very sensitive to temperature.
For example, in the photolithography process, the optical system of the photolithography machine needs to work in a stable temperature environment, because a slight change in temperature may cause deviations in the optical path, which in turn affects the accuracy of the photolithography. In processes such as chemical vapor deposition (CVD) and physical vapor deposition (PVD), the reaction temperature directly affects the quality and performance of the film. Accurate temperature control can ensure that the deposited film has uniform thickness and accurate composition, thereby improving the performance and yield of the chip.