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Water-cooled chiller & Air-cooled chiller
LENYA High–Precision Chiller ensure the controllable accuracy of ± 0.05℃
higher temperature control accuracy, wider temperature control range, and faster cooling speed.
FLTZ -25℃~90℃ is a compact integrated low-temperature process chiller with a fully closed system. Low temperature prevents moisture absorption from the air, while high temperature does not volatilize the heat transfer medium or produce oil mist. The system can automatically replenish the heat transfer medium into the circulation loop.
As a trusted industrial chiller supplier, LNEYA provides chillers with high temperature control accuracy. FLTZ -25℃~90℃ offers a wide temperature range and precision control up to ±0.05℃. It delivers rapid cooling and meets the requirements of various processes, ensuring stable performance and reliable operation.
“W”represents optional water cooling, default air cooling.
| FLTZ SERIES | 002 002W | 003 003W | 004 004W | 006 006W | 008 008W | 010 010W | 015 015W |
| Temperature range | 5℃～90℃ | ||||||
| Temperature control accuracy | ±0.05℃（Steady state outlet temperature） | ||||||
| Cooling capacity @10℃ | 6kW | 8kW | 10kW | 15kW | 20kW | 25kW | 40kW |
| Refrigerant | R410A | ||||||
| Cooling water flow @20℃ | 1.5m³/h | 2m³/h | 2.5m³/h | 4m³/h | 4.5m³/h | 5.6m³/h | 9m³/h |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| Expansion tank volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| Refrigerant | R410A | ||||||
| Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling water connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG1 | ZG1 | ZG1 | ZG1 1/8 |
| Refrigerating medium | Silicone oil, fluorinated liquid, polyol aqueous solution, DI, etc. (DI temp needs to be controlled above 10 ℃) | ||||||
| Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm | ||||||
Using three-point sampling (temperature of the measured object, inlet and outlet temperature of the temperature control system), the model-free self-building algorithm and the general anti-lag cascade algorithm are combined, and the controller predicts the control action without large lag.
The temperature control range of FLTZ -25℃~90℃ process chiller is from -25℃ to 90℃, which meets the temperature control requirements in most process processes. There is no need to replace other chillers during the process, which improves production efficiency.
The communication protocols of the process chiller include RS485 interface Modbus RTU protocol and Ethernet interface TCP/IP protocol, which can communicate with your equipment or build a system.
The chiller is equipped with a variable frequency pump. You can set the output pressure and flow of the circulating fluid on the operation panel. Under various piping conditions, the variable frequency pump can automatically control the set output pressure and flow without bypass pipe adjustment, thereby reducing the power consumed by the pump and achieving energy saving.
FLTZ -25℃~90℃ process chiller adopts LNEYA customized color touch screen, which can display various real-time information on the screen, such as the temperature and pressure of the inlet and outlet fluids, the current and voltage of each component, the liquid level of the water tank, etc.
When the temperature is within 40℃, FLTZ -25℃~90℃ process chiller can use the hot air generated by the compressor for heating without using a heater, which can achieve energy saving while recovering the heat generated by the compressor.
The entire system of the FLTZ -25℃~90℃ industrial process chiller is a fully closed circulation system, equipped with various well-known brands of magnetic drive pumps, which can effectively avoid leakage risks.
Each process chiller undergoes 100% helium inspection and safety inspection, and is tested by 24 hours of continuous operation to ensure that the equipment you receive is safe and reliable.
FLTZ -25℃~90℃ process chillers are commonly used in the semiconductor industry to assist front-end and back-end processes.
• Wafer cooling and heating
During the photolithography and etching process, it is necessary to ensure that the wafer remains within a specific temperature range. FLTZ -25℃~90℃ process chillers can provide a stable low or high temperature environment to ensure the stability of the material and avoid the impact of temperature changes on the process.
• Accurate temperature control in the photolithography process
During the photolithography process, the temperature control of the exposure system is very important for the curing of the photo resist and the quality of pattern transfer. FLTZ -25℃~90℃ semiconductor chillers can ensure that the exposure system remains at a stable temperature.
• Temperature control during packaging
During the packaging process, the expansion and contraction of the material will be affected by temperature changes. FLTZ -25℃~90℃ industrial process chillers can accurately adjust the temperature to avoid stress, cracks and other problems caused by temperature differences during the packaging process, and ensure packaging quality.
• Environmental adaptability test
Some semiconductor components will work at extreme temperatures. FLTZ -25℃~90℃ chiller can provide a wide temperature control range (-25℃ to 90℃) to test the performance of components under different temperature conditions and ensure the environmental adaptability of the product.
30,000 +customers.
20+ countries.
CE ,SGS, ISO certification.
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