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Temp range -45℃~90℃, Precise ±0.1℃, Independent Control
FLTZ multi channel chiller can realize multi-channel independent temperature control. We can set the same or different temperature range, heat transfer medium flow rate, etc. for each channel according to your needs.
The channels do not affect each other. Even if one channel fails, it will not affect the operation of other channels.
Our FLTZ multi channel chiller lineup includes standard dual-channel and three-channel models. For specialized applications, we offer custom solutions tailored to your specific needs, including channel count, control parameters, and equipment size.
FLTZ variable frequency multi channel chillers have multi-channel independent temperature control function. Different channels can be designed with different temperature ranges, hot and cold heating capacities, and heat transfer medium flow rates. According to the required temperature range, steam compression refrigeration or ETCU compressor-free heat exchange system can be selected.
FLTZ variable frequency multi channel chillers can control multiple fluid channel systems with one host. You can remotely monitor multiple channels through a system. This centralized control not only improves operating efficiency, but also optimizes fault diagnosis and operation procedures.
Different channels can use expansion tanks, condensers, cooling water systems, etc., which can effectively reduce the number of wiring and equipment size, making your multi channel chillers more compact and occupying a smaller area.
FLTZ variable frequency multi channel chillers have a temperature control accuracy of up to ±0.1℃. It adopts a model-free self-building tree algorithm and a hysteresis predictor, and controls variable frequency fans, electronic expansion valves, and variable frequency compressors at the same time, which can ensure the stability of temperature control when the heat load fluctuates.
The FLTZ variable frequency multi channel chillers are equipped with variable frequency compressor, fan and pump, which can control the motor speed of compressor, fan and pump respectively according to the load of your equipment.
When the temperature is less than 40℃, the multi channel chillers can circulate the hot exhaust gas through the expansion valve, and the circulating fluid can be heated without a heater.
The chillers adopt a magnetic drive pump without mechanical seal, and there is no shaft seal leakage problem, so there is no need to regularly check the pump leakage or replace the mechanical seal, which greatly reduces the operating cost of the pump.
The communication protocols of the multi-channel process chiller include RS485 interface Modbus RTU protocol and Ethernet interface TCP/IP protocol.
This multi-channel recirculation chiller uses a customized color touch screen, which can not only display the operating status of the equipment in real time, but also monitor abnormal conditions in the operation of the equipment in real time. The operation interface is simple and easy to understand, and the settings can be completed through simple gestures and sliding operations.
LNEYA has a comprehensive network market in the world, and its chillers are exported to more than 30 countries and regions around the world. It has agents in many countries such as the United States, Canada, Australia, Russia, South Korea, etc. Therefore, we are able to provide you with our chillers and high-quality services worldwide.
FLTZ multi-channel chillers are widely used in the semiconductor industry due to their advantages such as precise temperature control, independent circuit management, and rapid cooling. The application scenarios of semiconductor chillers include wafer manufacturing, packaging testing, photolithography, etching, CVD/PVD deposition, cleaning processes, etc.
The exposure system, optical lenses, laser light sources, and mask plates of the photolithography machine require precise temperature control to ensure pattern accuracy.
During plasma etching (RIE, ICP, etc.), the chamber and electrodes need to be strictly temperature controlled to ensure etching uniformity. The chiller can provide a stable temperature environment for etching equipment and reduce process deviations.
CVD (such as LPCVD, PECVD) and PVD (such as sputtering coating) are used for thin film deposition, and the temperature control of the chamber and substrate affects the quality of the film.
The high-energy particle beam generated during ion implantation can cause local high temperatures. The process chiller can quickly remove heat to prevent thermal damage to the wafer.
During the annealing process, the chiller needs to dynamically adjust the cooling rate to optimize the activation efficiency of the doped atoms.
Used to help maintain deionized water within a specific temperature range to remove photoresist residues, metal contamination and particulate matter.
In the packaging process of BGA, CSP, FCBGA, etc., the temperature control of welding and packaging materials affects reliability.
| Model | FLTZ-203W-2T | |
| Pipeline | channel 1 | channel 2 |
| Temperature range | -20℃～+90℃ | -20℃～+90℃ |
| Cooling capacity | ±0.1℃（Customizable temperature control accuracy of ±0.01°C.） | |
| Heating capacity | 4kW@-10℃ | 4kW@-10℃ |
| Heat conducting medium flow rate | 2kW | 2kW |
| Heat conducting medium connection size | 20L/min 0.5MPa | 20L/min 0.5MPa |
| Heat transfer interface | ZG3/4 | ZG3/4 |
| Ambient temperature | 10～35℃ | 10～35℃ |
| Ambient humidity | 30～70% | 30～70% |
| Cooling water temperature | 15～20℃ | 15～20℃ |
| Cooling water flow rate | 20L/min | 20L/min |
| Weight | 400kg | |
| Dimension cm | 50*90*160 | |
| Model | FLTZ-406W/ETCU-015W | |
| Pipeline | channel 1 | channel 2 |
| Temperature range | -45℃～+40℃ | +10℃～+80℃ |
| Cooling capacity | ±0.1℃（Customizable temperature control accuracy of ±0.01°C.） | |
| Heating capacity | 11kW@-20℃ 5kW@-40℃ | 13kW@+10℃ |
| Heat conducting medium flow rate | 2kW | 6kW |
| Heat conducting medium connection size | 17L/min 0.7MPa | 17L/min 0.7MPa |
| Heat transfer interface | ZG3/4 | ZG3/4 |
| Ambient temperature | 10～35℃ | 10～35℃ |
| Ambient humidity | 30～70% | 30～70% |
| Cooling water temperature | 15～20℃ | 15～20℃ |
| Cooling water flow rate | 40L/min | 20L/min |
| Weight | 550kg | |
| Dimension cm | 60*100*185 | |
| Model | FLTZ-203W/2T dual system | FLTZ-305W/2T dual system | FLTZ-406W/2T dual system | |||
| Temperature range | -20℃~90℃ | -30℃~90℃ | -45℃~90℃ | |||
| Temperature control accuracy | ±0.1℃（Customizable temperature control accuracy of ±0.01°C.） | |||||
| Heat conducting medium flow rate | 15~45l/min 6bar max | |||||
| Heating capacity | 2.5kW | 2.5kW | 2.5kW | 2.5kW | 3.5kW | 3.5kW |
| Cooling capacity | 3kW @-15℃ | 3kW @-15℃ | 5kW @-15℃ | 5kW @-15℃ | 2.5kW @ -35℃ | 2.5kW @ -35℃ |
| Internal circulation fluid volume | 5L | 5L | 8L | 8L | 8L | 8L |
| Cooling water interface | 50L/min at20℃ | 600L/min at20℃ | 50L/min at20℃ | |||
| Model | FLTZ-203W/ETCU-008W | ||
| Pipeline | channel 1 | channel 2 | channel 3 |
| Temperature range | -10℃～+60℃ | +30℃～+80℃ | -10℃～+80℃ |
| Temperature stability | ±0.1℃（Customizable temperature control accuracy of ±0.01°C.） | ||
| Cooling capacity | 4kW@-10℃/21kW@+20℃ | 6 kW@+30℃ | 3kW@-10℃ |
| Heating capacity | 4kW | 4.5+6kW | 3kW |
| Heat conducting medium flow rate | 17L/min 0.7MPa | 17L/min 0.7MPa | 17L/min 0.7MPa |
| Heat conducting medium connection size | ZG3/4 | ZG3/4 | ZG3/4 |
| Ambient temperature | 10～35 ℃ | 10～35 ℃ | 10～35 ℃ |
| Ambient humidity | 30～70% | 30～70% | 30～70% |
| Cooling water flow rate | 15～20℃ | 15～20℃ | 15～20℃ |
| Cooling water temperature | 30L/min@15~20℃ | 15L/min@15~20℃ | 15L/min@15~20℃ |
| Circuit breaker | 100A | ||
| Weight | 600kg | ||
| Dimension cm | 60*100*170 | ||
| Model | FLT-215W/ETCU-015W/ETCU-008W | ||
| Pipeline | channel 1 | channel 2 | channel 3 |
| Temperature range | -20℃～+50℃ | +30℃～+100℃ | +30℃～+40℃ |
| Temperature stability | ±0.1℃（Customizable temperature control accuracy of ±0.01°C.） | ||
| Cooling capacity | 15kW@-10℃ | 13kW@PCW+15℃ | 8kW@PCW+10℃ |
| Heating capacity | 2kW | 6kW | Pump Heat Loss |
| Heat conducting medium flow rate | 30L/min 0.85MPa | 30L/min 0.85MPa | 20L/min 0.8MPa |
| Heat conducting medium connection size | ZG3/4 | ZG3/4 | ZG3/4 |
| Ambient temperature | 10～35 ℃ | 10～35 ℃ | 10～35 ℃ |
| Ambient humidity | 30～70% | 30～70% | 30～70% |
| Cooling water flow rate | 15～20℃ | 15～20℃ | 15～20℃ |
| Cooling water temperature | 30L/min@15~20℃ | 15L/min@15~20℃ | 15L/min@15~20℃ |
| Circuit breaker | 75A | ||
| Weight | 600kg | ||
| Dimension cm | 60*100*170 | ||
If you need independent temperature control for multiple different equipment or processes, and don’t want to buy multiple independent chillers, then FLTZ multi-channel chillers are a very ideal choice.
LNEYA was founded in Wuxi, China in 2010. The company currently has a plant area of 25,000㎡
, an annual output of 5,000 units, and an output value of over 300 million for two consecutive years.
Since its establishment, LNEYA has focused on providing high and low temperature , ultra-low temperature , and precise temperature control services for semiconductors, pharmaceutical chemicals, new energy, aerospace and other industries.
We have served more than 30,000 customers worldwide and have more than 130 patents.
Our chillers have been selected by more than 100 university laboratory projects around the world and exported to more than 20 countries. We have agents in various European countries and regions.
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