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FLTZ 5℃~90℃
LNEYA thermal chillers are designed for demanding temperature control applications and helps you with your business with professional technology.
The FLTZ 5℃~90℃ series offers industrial and process thermal chillers with precise temperature control. These chillers maintain temperatures within ±0.05℃, ensuring stable performance for sensitive industrial processes.
Each unit features a color touch screen that shows key information in real time. You can monitor temperature at control points, inlet and outlet pressures, condensing and cooling water temperatures, liquid and gas parameters, power usage, and water tank levels. This helps you track performance and respond quickly to changes.
FLTZ 5℃~90℃ thermal chillers support system integration and remote control. You can connect the chiller to your equipment to monitor operations and adjust settings from a distance. The compact design saves floor space and provides flexible installation options for different industrial setups.
| Model | FLTZ-002 FLTZ-002W | FLTZ-003 FLTZ-003W | FLTZ-004 FLTZ-004W | FLTZ-006 FLTZ-006W | FLTZ-008 FLTZ-008W | FLTZ-010 FLTZ-010W | FLTZ-015 FLTZ-015W |
| Temperature range | 5℃～90℃ | ||||||
| Temperature control accuracy | ±0.05℃（Steady state outlet temperature） | ||||||
| Cooling capacity @10℃ | 6kW | 8kW | 10kW | 15kW | 20kW | 25kW | 40kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| Expansion tank volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| Refrigerant | R410A | ||||||
| Refrigerating medium | Silicone oil, fluorinated liquid, polyol aqueous solution, DI, etc. (DI temp needs to be controlled above 10 ℃) | ||||||
| Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling water connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG1 | ZG1 | ZG1 | ZG1 1/8 |
| Cooling water flow @20℃ | 1.5m³/h | 2m³/h | 2.5m³/h | 4m³/h | 4.5m³/h | 5.6m³/h | 9m³/h |
| Dimension cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*600*1500 | 1080*600*1500 |
| Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm | ||||||
It can meet the most stringent process requirements in semiconductor manufacturing. For example, in the photolithography process, any slight temperature fluctuation will cause thermal deformation of the optical system, and temperature stability directly determines the success or failure of exposure accuracy.
It has gradually replaced ozone depleting substances such as R22, meeting the transition period requirements of the Montreal Protocol.
A single device replaces the traditional split heating/cooling system, reducing the footprint of the equipment, and can achieve rapid temperature changes without changing the medium, improving production efficiency.
High repeatability of control results is the core performance indicator of semiconductor process chillers. This feature directly determines the yield and process stability of chip manufacturing.
Accurate temperature control is achieved by recovering waste heat in the refrigeration cycle, reflecting the advanced design concept of energy efficiency optimization and system integration.
Adopt variable frequency compressors, fans and pumps to automatically control output flow and pressure and reduce power consumption.
FLTZ 5℃~90℃ thermal chiller is widely used in semiconductor application scenarios that require two-way temperature control due to its wide temperature range.
Wafer cleaning
Wafer cleaning requires the use of chemical liquids such as SC1 (ammonia + hydrogen peroxide) and SC2 (hydrochloric acid + hydrogen peroxide) to clean the wafer, and the reaction temperature must be stably controlled at 25℃-80℃. The chiller can help the process control the temperature of the cleaning tank to avoid thermal stress causing wafer warping and prevent the pump unit from overheating.
Photolithography
DUV/EUV lithography machines are extremely sensitive to temperature fluctuations, so a specific constant temperature environment must be maintained after photoresist coating. Semiconductor chillers can provide a constant temperature environment for lithography machines.
Etching
During dry etching, the cavity RF power supply must be kept cool within a specific temperature range to prevent overheating and process drift.
Served more than 30,000 customers.
Exported to more than 20 countries.
Has obtained CE certification, SGS certification, ISO certification.
Provide comprehensive technical training.
With 24/7 solutions.
Founded in 2010, with 15 years of industry experience.
20% of employees are technicians.
Visual inspection.
Performance test.
Electrical safety test.
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LNEYA Industrial Chillers Manufacturer Supplier
