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LNEYA thermal chillers are designed for demanding temperature control applications and helps you with your business with professional technology.
The Leader in Semiconductor Chiller Solutions
lowest
Highest
Temperature control accuracy
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| FLTZ | 202/202W~215/215W | ||
| Temperature range | -25℃～90℃ | ||
| Temperature control accuracy | ±0.05℃（Steady state outlet temperature） | ||
| Flow control | 10~75L/min | ||
| Cooling capacity @-15℃ | 2kW~15kW | ||
| Internal circulating fluid volume | 4L~20L | ||
| Expansion tank volume | 10L~35L | ||
| Refrigerant | R404A | ||
| Refrigerating medium | Silicone oil, fluorinated liquid, glycol solution etc | ||
| Cooling water flow @20℃ | 1.2m³/H~10.2m³/H | ||
| Dimension cm | 950*380*1055~1080*600*1500 | ||
• The chiller can help the process control the temperature of the cleaning tank to avoid thermal stress causing wafer warping and prevent the pump unit from overheating.
• Specific constant temperature environment must be maintained after photoresist coating.
• During dry etching, the cavity RF power supply must be kept cool within a specific temperature range to prevent overheating and process drift.
thermal chiller is widely used in semiconductor application scenarios that require two-way temperature control due to its wide temperature range.
Wafer cleaning requires the use of chemical liquids such as SC1 (ammonia + hydrogen peroxide) and SC2 (hydrochloric acid + hydrogen peroxide) to clean the wafer, and the reaction temperature must be stably controlled at 25℃-80℃,The chiller can help the process control the temperature of the cleaning tank to avoid thermal stress causing wafer warping and prevent the pump unit from overheating.
DUV/EUV lithography machines are extremely sensitive to temperature fluctuations, so a specific constant temperature environment must be maintained after photoresist coating. Semiconductor chillers can provide a constant temperature environment for lithography machines.
During dry etching, the cavity RF power supply must be kept cool within a specific temperature range to prevent overheating and process drift.
In addition, semiconductor back-end processes such as metal interconnection, packaging, and testing have strict requirements on temperature uniformity and require the help of thermal chillers.
Temp range -25~90℃
Temp accuracy ±0.05℃
Temp range -45~90℃
Temp accuracy ±0.05℃
Temp range -80~90℃
Temp accuracy ±0.05℃
Temp range -100~90℃
Temp accuracy ±0.05℃
Served more than 30,000 customers.
Exported to more than 20 countries.
Has obtained CE certification, SGS certification, ISO certification.
Provide comprehensive technical training.
With 24/7 solutions.
Founded in 2010, with 15 years of industry experience.
20% of employees are technicians.
Visual inspection.
Performance test.
Electrical safety test.
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LNEYA Industrial Chillers Manufacturer Supplier -
