Single channel chillers

FLTZ -45℃~90℃

FLTZ single channel chiller easily achieves independent and precise temperature control for multiple fluid channels, with a temperature control accuracy of up to ±0.1℃, widely applied in the semiconductor industry.

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fltz series

-45°C

lowest

90°C

Highest

±0.1℃

Temperature control accuracy

Contact LNEYA sales engineer for catalog or price.

FLTZ 5℃~90℃
FLTZ -25℃~90℃
FLTZ -45℃~90℃
FLTZ -80℃~90℃
FLTZ -100℃~90℃
FLTZ 15℃~25℃

Model	FLTZ-002 FLTZ-002W	FLTZ-003 FLTZ-003W	FLTZ-004 FLTZ-004W	FLTZ-006 FLTZ-006W	FLTZ-008 FLTZ-008W	FLTZ-010 FLTZ-010W	FLTZ-015 FLTZ-015W
Temperature range	5℃～90℃
Temperature control accuracy	±0.1℃（Customizable temperature control accuracy of ±0.01°C.）
Cooling capacity @10℃	6kW	8kW	10kW	15kW	20kW	25kW	40kW
Internal circulating fluid volume	4L	5L	6L	8L	10L	12L	20L
Expansion tank volume	10L	10L	15L	15L	20L	25L	35L
Refrigerant	R410A/R448A
Refrigerating medium	Silicone oil, fluorinated liquid, polyol aqueous solution, DI, etc. (DI temp needs to be controlled above 10 ℃)
Cooling water flow @20℃	1.5m³/h	2m³/h	2.5m³/h	4m³/h	4.5m³/h	5.6m³/h	9m³/h
Dimension cm	9538106	9538106	950380106	9843140	9843140	10860150	10860150

Model	FLTZ-202 FLTZ-202W	FLTZ-203 FLTZ-203W	FLTZ-204 FLTZ-204W	FLTZ-206 FLTZ-206W	FLTZ-208 FLTZ-208W	FLTZ-210 FLTZ-210W	FLTZ-215 FLTZ-215W
Temperature range	-25℃～90℃
Temperature control accuracy	±0.1℃（Customizable temperature control accuracy of ±0.01°C.）
Flow MAX	10～25L/min		15～45L/min			25～75L/min
Cooling capacity @-15℃	2kW	3kW	3.8kW	6kW	7.6kW	10kW	15kW
Internal circulating fluid volume	4L	5L	6L	8L	10L	12L	20L
Expansion tank volume	10L	10L	15L	15L	20L	25L	35L
Refrigerant	R404A/R448A
Refrigerating medium	Silicone oil, fluorinated fluid, glycol-water solution, etc.
Cooling water flow @20℃	1.2m³/H	1.6m³/H	2.6m³/H	3.6m³/H	5.5m³/H	7m³/H	10.2m³/H
Dimension cm	9538106	9538106	9538106	9843140	9843140	10860150	10860150

Model	FLTZ-402 FLTZ-402W	FLTZ-403 FLTZ-403W	FLTZ-404 FLTZ-404W	FLTZ-406 FLTZ-406W	FLTZ-408 FLTZ-408W	FLTZ-410 FLTZ-410W	FLTZ-415 FLTZ-415W
Temperature range	-45℃～90℃
Temperature control accuracy	±0.1℃（Customizable temperature control accuracy of ±0.01°C.）
Flow MAX	10～25L/min 5bar max		15～45L/min 5bar max			25～75L/min 5bar max
Heating	Uses compressor heat to prevent condenser frost.
Cooling capacity @-35℃	1kW	1.4kW	1.8kW	2.5kW	3.3kW	5kW	8kW
Internal circulating fluid volume	4L	5L	6L	8L	10L	12L	20L
Expansion tank volume	10L	10L	15L	15L	20L	25L	35L
Refrigerant	R404A/R448A
Refrigerating medium	Silicone oil, fluorinated fluid, glycol-water solution, etc.
Cooling water flow @20℃	1.5m³/H	2.4m³/H	3.5m³/H	5m³/H	5.5m³/H	6m³/H	8m³/H
Dimension cm	9538106	9538106	9538106	9843140	9843140	10850150	10850150

Model	FLTZ-803W	FLTZ-805W	FLTZ-806W	FLTZ-808W	FLTZ-810W
Temperature range	-80℃～+90℃
Temperature control accuracy	±0.1℃（Customizable temperature control accuracy of ±0.01°C.）
Flow MAX	7～25L/min 5bar		12～45L/min 6bar
Cooling capacity @-70℃	0.6kW	1kW	1.5kW	2kW	3kW
Heating capacity	2kW	2kW	2kW	3.5kW	3.5kW
Internal circulating fluid volume	4L	5L	6L	8L	10L
Expansion tank volume	10L	10L	15L	15L	20L
Refrigerant	Fluorinated fluids
Cooling water flow @20℃	1.8m3/h	2.5m3/h	3m3/h	5m3/h	6m3/h
Circuit Breakers	25A	25A	32A	40A	50A

Model	FLTZ-1002W	FLTZ-1004W
Temperature range	-100℃～+90℃
Temperature control accuracy	±0.1℃（Customizable temperature control accuracy of ±0.01°C.）
Flow control	7～25L/min	12～45L/min
Cooling capacityat-90℃	1.5kW	3kW
Heating capacity	3.5kW	5.5kW
Internal circulating fluid volume	5L	8L
Expansion tank volume	10L	15L
Heat-conduction medium	Fluorinated liquid
Cooling water@20℃	50L/min 2bar~7bar	100L/min 2bar~7bar

Model	FLTZ-001S	FLTZ-002S FLTZ-002WS	FLTZ-003S FLTZ-003WS	FLTZ-004S FLTZ-004WS	FLTZ-006S FLTZ-006WS	FLTZ-008WS	FLTZ-010WS
Temp Range	15℃～25℃
Temp Control Accuracy	±0.005℃ Temperature control accuracy at the equipment outlet
Flow Rate	7L/min 3bar	15L/min at 4bar		30L/min at 4bar		75L/min at 4bar
Heating Power	Technology of using compressor heating to prevent condenser frosting
Cooling Capacity @20℃	3kw	7kw	10.5kw	14 kw	21kw	28kw	35kw
Liquid Storage Capacity	8L	15L	20L	30L	50L	60L	80L
Refrigerant	R1234fa （ODP=0 GWP=4）/R448A
Secondary Refrigerant(Coolant)	Purified Water

Single-channel chillers are primarily used for precise temperature control in semiconductor production and testing. The company utilizes multiple algorithms (PID, feedforward PID, and model-free self-building tree algorithms) to achieve fast response and high control accuracy.
Under load, the system offers high temperature control accuracy, allowing for flexible switching between -100°C and +90°C with excellent temperature compliance. Advanced low-temperature refrigeration technology supports ultra-low temperature control from -100°C to -80°C.

FLTZ 5℃~90℃
Process Chillers

Cooling capacity 6kW~40kW
Cooling water flow 1.5m³/h~9m³/h
Temp accuracy ±0.05℃

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FLTZ -25℃～90℃
Thermal Chillers

Cooling capacity 2kW~15kW
Cooling water flow 1.2m³/h~10.2m³/h
Temp accuracy ±0.05℃

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FLTZ -45℃～90℃
Low Temperature Chillers

Cooling capacity 1kW~8kW
Cooling water flow 1.5m³/h~8m³/h
Temp accuracy ±0.05℃

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FLTZ -80℃～+90℃
Recirculating Water Chillers

Cooling capacity 0.6kW~3kW
Cooling water flow 1.8m³/h~6m³/h
Temp accuracy ±0.05℃

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FLTZ -100℃～+90℃
Recirculation Chiller

Cooling capacity 1.5kW~3kW
Cooling water flow 50L/min~100L/min 2bar~7bar
Temp accuracy ±0.05℃

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Single Channel Chiller Applications

For Aging test equipment

The matching thermal drying system provides cooling and heating temperature, improves the test efficiency and quality of wafer chips, and has small temperature accuracy error.

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For Chip testing Equipment

The thermal chiller is matched with the test machine, with a temperature control accuracy of ±0.05℃, which improves the chip testing efficiency of the institute.

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For Semiconductor fab

The process chiller is used in semiconductor fabs, with high-precision cooling and heating temperature control, which improves the manufacturing rate of wafers and reduces the scrap rate.

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Why Choose LNEYA® ?

The semiconductor industry has very strict requirements on temperature control accuracy. Many process steps are extremely sensitive to temperature changes. The performance and quality of the products rely on high-precision semiconductor chillers. LNEYA provides professional thermal management solutions for the semiconductor industry.

2.5W+

400+

300 M+

5000+

130+

60+

80+

Very wide temperature range, no need to replace liquid medium.

Efficient production stability and repeatability results.

High temperature cooling technology, directly start the compressor to cool down at 300 ℃.

Fully enclosed system, extending the lifespan of thermal conductive liquids.

Using plate heat exchangers and pipeline heaters to improve cooling and heating rates.

Contact LNEYA® chiller sales

Representative to obtain a standard product catalog and sample book for semiconductor chillers, or customize your chiller.

Send Your Inquiry Now

FAQ

Can’t find a suitable single channel chiller? Contact us now to get chiller details and prices

Don’t worry, we have a complete process, and professional technicians will provide you with selection suggestions by asking you relevant questions to help you determine the most suitable chiller configuration for you.

Of course! Our factory is located in Wuxi, China. We currently have a 25,000㎡
factory and another 66,000㎡ new factory is under construction. You are always welcome to visit.

We have passed domestic ISO certification, CE certification, SGS certification, and all the certificates required by the market. We have our own technical patents.

Fill out the form on the right or send us an email. We usually respond within an hour. By adding WhatsApp friends 86-13912479193, we can respond at any time.

Of course, add us on WhatsApp or send us an email and I will send you a product brochure Or send us an email directly to sales@cnzlj.com

Contact LNEYA®

Submit your request to us and we will contact you within 24 hours

Add our account manager via the QR code below

WeChat/Phone

18914253067

+86 18914253067

Email Address

market@lneya.com

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Semiconductor Packaging & Testing

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Microchannel | Tubular Reactor

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Single channel chillers

FLTZ -45℃~90℃

FLTZ single channel chiller easily achieves independent and precise temperature control for multiple fluid channels, with a temperature control accuracy of up to ±0.1℃, widely applied in the semiconductor industry.

-45°C

90°C

±0.1℃

FLTZ 5℃~90℃Process Chillers

FLTZ -25℃～90℃Thermal Chillers

FLTZ -45℃～90℃Low Temperature Chillers

FLTZ -80℃～+90℃Recirculating Water Chillers

FLTZ -100℃～+90℃Recirculation Chiller

For Aging test equipment

For Chip testing Equipment

For Semiconductor fab

Very wide temperature range, no need to replace liquid medium.

Efficient production stability and repeatability results.

High temperature cooling technology, directly start the compressor to cool down at 300 ℃.

Fully enclosed system, extending the lifespan of thermal conductive liquids.

Using plate heat exchangers and pipeline heaters to improve cooling and heating rates.

Representative to obtain a standard product catalog and sample book for semiconductor chillers, or customize your chiller.

I don’t know what type of semiconductor chiller is suitable for my application. What should I do?

Can I visit your chiller factory?

Are your temperature control products certified?

How can I contact you quickly to get a quote?

Do you have a product catalogue? Can you send it to me?

Add our account manager via the QR code below

FLTZ 5℃~90℃
Process Chillers

FLTZ -25℃～90℃
Thermal Chillers

FLTZ -45℃～90℃
Low Temperature Chillers

FLTZ -80℃～+90℃
Recirculating Water Chillers

FLTZ -100℃～+90℃
Recirculation Chiller