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Compact，High-accuracy, Environment-friendly
Temp range -100℃~90℃ Temp accuracy ±0.05℃
LNEYA represents the internationally advanced liquid temperature control technology, actively explores and studies the temperature test simulation of the component test system, has a wide temperature direction and high temperature rise and fall, temperature range: -100°C~+90°C, temperature control accuracy up to: ±0.05℃.
high-precision Process chillers
Integrates refrigeration heating and temperature control functions. It is mainly used for temperature control in semiconductor FAB processes and packaging and testing processes.
Saving more than 20% energy compared to the old products; it adopts a fully enclosed pipeline design to reduce the demand for heat transfer medium, and at the same time, the heat discharged by the compressor is used for heating within 40℃, so the circulation heating can be achieved without a heater.
Cooling capacity 6kW~40kW
Cooling water flow 1.5m³/h~9m³/h
Temp accuracy ±0.05℃
Cooling capacity 2kW~15kW
Cooling water flow 1.2m³/h~10.2m³/h
Temp accuracy ±0.05℃
Cooling capacity 1kW~8kW
Cooling water flow 1.5m³/h~8m³/h
Temp accuracy ±0.05℃
Cooling capacity 0.6kW~3kW
Cooling water flow 1.8m³/h~6m³/h
Temp accuracy ±0.05℃
Cooling capacity 1.5kW~3kW
Cooling water flow 50L/min~100L/min 2bar~7bar
Temp accuracy ±0.05℃
Semiconductor Chiller‘s Applications
Semiconductor manufacturing is a process with extremely high environmental requirements, and strict temperature control determines the performance of the product. Semiconductor chillers are commonly used in semiconductor industry packaging and testing processes, semiconductor FAB process temperature control, cooling of CMOS/CCD sensors in semiconductor metrology systems, circulating cooling of semiconductor metrology AOI systems, providing independent temperature control for cavity side walls, plasma bevel etching and deposition, thermal atomic layer etching of metal tungsten, etc.
The matching thermal drying system provides cooling and heating temperature, improves the test efficiency and quality of wafer chips, and has small temperature accuracy error.
The thermal chiller is matched with the test machine, with a temperature control accuracy of ±0.05℃, which improves the chip testing efficiency of the institute.
The process chiller is used in semiconductor fabs, with high-precision cooling and heating temperature control, which improves the manufacturing rate of wafers and reduces the scrap rate.
Due to the use of heat generated during heating, circulating heating can be achieved without the need for a heater.
Standard equipment includes serial communication (RS232C, RS485) and contact input/output. Can communicate with customer devices or build systems.
Why Choose LNEYA ?
Very wide temperature range, no need to replace liquid medium;
Efficient production stability and repeatability results;
High temperature cooling technology, directly start the compressor to cool down at 300 ℃.
Fully enclosed system, extending the lifespan of thermal conductive liquids;
Using plate heat exchangers and pipeline heaters to improve cooling and heating rates;
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Contact LNEYA
Submit your request to us and we will contact you within 24 hours
WeChat/Phone
86 18914253067
86 13912479193
Email Address
sales@cnzlj.com
LNEYA Industrial Chillers Manufacturer Supplier -
