Semiconductor Chiller for Precise Temperature Control

Semiconductor Chillers Overview

The semiconductor industry demands extremely accurate temperature control. Many fabrication and testing steps are highly sensitive to even small temperature changes. Product performance and yield depend on stable, high-precision cooling systems.
 
LNEYA is a leading manufacturer of advanced chillers for semiconductor applications. Since 2010, we have supplied reliable temperature control equipment for wafer processing, packaging, and testing lines. Our product range includes both standard and customized chillers designed for precise, repeatable performance.
 
For specialized processes, we can tailor a cooling solution to your requirements in temperature range, capacity, and control interface.
 
Contact our engineering team to request a product catalog or get a quote for your semiconductor cooling system.

LNEYA® Semiconductor Chillers Characteristics

• High efficiency, stable production and repeatable results.
• Use plate heat exchanger and pipe heater to improve cooling and heating speed.
• Extremely wide temperature range（-150℃ to +350℃）, no need to change liquid medium.
• Fully closed system to extend the service life of thermal fluid.
• Use magnetic drive pump, no shaft seal leakage problem.
• High temperature cooling technology, 300℃ direct start compressor cooling.

Semiconductor Chiller Applications

Semiconductor manufacturing demands stable and precise cooling systems. A reliable semiconductor chiller helps control temperature during wafer processing, etching, and testing. At LNEYA, we design semiconductor chillers with high temperature accuracy, wide range operation, and reliable long-term stability.
 
Semiconductor manufacturing requires extremely stable environmental conditions. Even a small temperature drift can affect product yield and device reliability. A semiconductor chiller provides precise temperature control during critical process steps such as wafer packaging, testing, and fabrication.
 
These chillers are widely used for process cooling in semiconductor fabs and metrology systems. They help stabilize CMOS and CCD sensors, maintain temperature in AOI inspection systems, and provide independent cooling for chamber walls during plasma etching or thin-film deposition.
 
In applications such as thermal atomic layer etching of metal tungsten, consistent cooling ensures repeatable results and longer equipment life.