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or vacuum chuck
LNEYA provides 8-inch and 12-inch vacuum chucks and non-standard customized square cold plates, supporting a temperature range of -70℃~+200℃, and can also customize various other temperature ranges, built-in multiple temperature sensors, multi-zone temperature control, precise FID adjustment and temperature control; supports direct cooling, liquid cooling, and air cooling.
Various temperature ranges can be customized
lowest
Highest
Temperature control accuracy
| Temperature range | -70℃~200℃ (Can be customized in various temperature ranges) |
| Temperature uniformity | 土0.5℃ |
| Heating rate | -55℃~+25℃：12min -40℃~+25℃：10 min +25℃~+150℃：20 min +25℃~+200℃：28 min +25℃~+300℃：40 min |
| Cooling rate | +150℃~+25℃：25 min +200℃~+25℃：30 min +300℃~+25℃：40 min +25℃~0℃：15 min +25℃~-40℃：35 min +25℃~-55℃：65 min |
| Cooling method | Direct cooling system/liquid cooling system/air cooling system |
| Wafer adsorption type | Vacuum adsorption |
| Chuck size | φ330*58mm |
| Power supply 220V 50HZ | 200~230V AC50/60HZ 16A max |
KSD -75℃~200℃
Heating cooling rate Up to 50 ℃/min
Temperature Accuracy ±0.2℃
ZLJ & SLJ -150℃～-110℃
Cooling capacity 0.4kW~11kW
temperature accuracy ±1℃
MD -75℃～225℃
Heating & Cooling -60°C to +25°C: 2 min &+25°C to -60°C: 6 min
temperature accuracy ±0.5℃
Served more than 30,000 customers.
Exported to more than 20 countries.
Has obtained CE certification, SGS certification, ISO certification.
Provide comprehensive technical training.
With 24/7 solutions.
Founded in 2010, with 15 years of industry experience.
20% of employees are technicians.
Visual inspection.
Performance test.
Electrical safety test.
Get in touch with our Themal Chuck experts
Contact LNEYA
Submit your request to us and we will contact you within 24 hours
LNEYA Industrial Chillers Manufacturer Supplier
