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Hot and cold dynamic constant temperature control equipment cryopump installation points

The performance of each component in the cold and heat source dynamic constant temperature control equipment is different. We must make full use of each accessory to make the equipment run better. The cryopump is one of the main accessories, and it is also installed. Need to install as required.

In the cold and heat source dynamic constant temperature control equipment, the cryogenic pump needs to pay attention to the installation facilities and requirements during installation. The foreline pump-cryogenic pump requires a pre-stage pump pre-vacuum chamber to pump the starting pressure of the cryopump. Adsorption well—Install the water-cooled baffle. If the oil vapor returns to the cryopump, the adsorption array can be contaminated, and the adsorption array must be replaced.

The high vacuum valve is installed between the cryopump and the vacuum chamber, which can shorten the starting time, and can also detect the leak in the vacuum chamber without deflation in the vacuum chamber. Pre-pumping valve At the pre-pumping port of the cryopump, a valve must be installed. The valve is open during pre-draining and is closed during operation of the cryop pump. Another one is used to vacuum the same mechanical pump. The room is pre-extracted.

Then install the cryopump, high vacuum flange connection, the cryopump can be fixed in any place required by the vacuum chamber by means of its high vacuum flange. Please check whether the “O” ring is intact before installation, so that there is no indentation and miscellaneous on the surface. Things are guidelines. The connection between the suction port and the safety valve, the cryopump can not be exhausted during the operation, so before starting, it is necessary to use a pump such as a mechanical pump to pre-pump the cryopump through the suction interface. Be sure to connect the pumping port of the cryopump to the pre-stage pump of the corresponding size.

Connect the cold and heat source dynamic constant temperature control equipment to the cryopump and compressor, and remove the cryopump and compressor, as well as the protective cap on all self-sealing joints on the metal hose. Note: Never use a cleaner to wipe the self-sealing joint in the following steps. Before connecting, you must ensure that there are no dust, oil, particles, etc. on the joint. If necessary, use a brush to clean the thread. Use a soft cloth without cotton to wipe any dirt on the sealing surface. Connect the metal hose, connect the hose according to the direction of the airflow, start from the compressor to the cryopump, then from the cryopump to the compressor, use two wrenches to tighten each self-sealing joint to protect the hose from twisting and leaking. Tighten each joint moderately and check the pressure gauge of the compressor after connecting.

The cryopump of the cold and heat source dynamic constant temperature control device is recommended to be installed according to the above instructions during installation. Do not install it by yourself, avoiding improper installation and causing malfunction.
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