FLT 5℃~-40℃

Mainly used for precise temperature control in semiconductor production and testing processes, heating within 40 ° C using a compressor hot gas heating method

Cooling Chiller

Temperture accuracy±0.1℃
Flow control25~75/min 6bar max
RefrigentR404A
Power range380V 3.5kW~16kW

cooling chiller semiconductor chiller

INQUIRY

Product data download

manual.pdf

Temperature control in semiconductor production and testing processes

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Ensure stable and reliable overall semiconductor process flow from front-end to back-end

Application Process

1.Silicon wafer manufacturing 2.Deposition 3.Photolithography 4.ion implantation

5.Wafer cleaning 6.Electroplating 7.Packaging testing

Configuration Details

Model	FLT-002 FLT-002W	FLT-003 FLT-003W	FLT-004 FLT-004W	FLT-006 FLT-006W	FLT-008 FLT-008W	FLT-010 FLT-010W	FLT-015 FLT-015W
Tempearature Control	5℃～40℃
Temperature accuracy	±0.1℃
Flow control	10～25L/min 5bar max		15～45L/min 6bar max			25～75L/min 6bar max
Refrigeration capacity@10℃	6kw	8kw	10kw	15 kw	20kw	25kw	40kw
Internal circulation liquid volume	4L	5L	6L	8L	10L	12L	20L
Expansion tank capacity	10L	10L	15L	15L	20L	25L	35L
Refrigerant	R410A
Secondary Refrigerant	Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, DI, etc. (DI temperature needs to be controlled above 10 ℃)
Entry and exit interfaces	G1/2	G1/2	G3/4	G3/4	G3/4	G1	G1
Cooling water outlet	G1/2	G1/2	G3/4	G1	G1	G1	G1 1/8
Cooling water flow rate@20℃	1.5m³/h	2m³/h	2.5m³/h	4m³/h	4.5m³/h	5.6m³/h	9m³/h
power supply 380V	3.5kW	4kW	5.5kW	7kW	9.5kW	12kW	16kW
Temperature extension	By adding an electric heater, expand the temperature range from -25 ℃ to 80 ℃

Product Description

The semiconductor temperature control device Chiller is mainly used for precise temperature control in semiconductor production and testing processes. Its products include fluid fluorinated liquid temperature control (minimum -100 degrees), rapid temperature change of gas cooling and heating, rapid temperature change chuck, low-temperature gas refrigeration machine (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies various algorithms (PID, feedforward PID, and model free self built tree algorithm) in the system to achieve fast response and high control accuracy.

The important information such as the exhaust and suction temperature (pressure), condensation temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), electrical power, current and voltage of each component, and water tank level of the chiller are all comprehensively managed, monitored and recorded through sensors connected to the control system.

Heating method within 40 ℃ adopts compressor hot gas heating.

The chiller circulation system adopts a fully enclosed design, and the circulation pump adopts a magnetic drive pump.

Chiller 100% helium testing, 100% safety regulations testing to ensure system safety and reliability.

The chiller runs the copying machine continuously for 24 hours at 100%.

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.