Semiconductor Process Cooling Chiller

Conventional type FLT -45℃~80℃

Cooling Chiller

Temperture accuracy±0.1℃
Flow control25~75/min 6bar max
RefrigentR404A
Power range380V 3.5kW~16kW

cooling chiller semiconductor chiller

REQUEST

Product data download

manual.pdf

Temperature control in semiconductor production and testing processes

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Ensure stable and reliable overall semiconductor process flow from front-end to back-end

Product Description

The semiconductor temperature control device Chiller is mainly used for precise temperature control in semiconductor production and testing processes. Its products include fluid fluorinated liquid temperature control (minimum -100 degrees), rapid temperature change of gas cooling and heating, rapid temperature change chuck, low-temperature gas refrigeration machine (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies various algorithms (PID, feedforward PID, and model free self built tree algorithm) in the system to achieve fast response and high control accuracy.

The important information such as the exhaust and suction temperature (pressure), condensation temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), electrical power, current and voltage of each component, and water tank level of the chiller are all comprehensively managed, monitored and recorded through sensors connected to the control system.

Heating method within 40 ℃ adopts compressor hot gas heating.

The chiller circulation system adopts a fully enclosed design, and the circulation pump adopts a magnetic drive pump.

Chiller 100% helium testing, 100% safety regulations testing to ensure system safety and reliability.

The chiller runs the copying machine continuously for 24 hours at 100%.

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Configuration Details

Model	FLT-002 FLT-002W	FLT-003 FLT-003W	FLT-004 FLT-004W	FLT-006 FLT-006W	FLT-008 FLT-008W	FLT-010 FLT-010W	FLT-015 FLT-015W
Tempearature Control	5℃～40℃
Temperature accuracy	±0.05℃
Flow control	10～25L/min 5bar max		15～45L/min 6bar max			25～75L/min 6bar max
Refrigeration capacity@10℃	6kw	8kw	10kw	15 kw	20kw	25kw	40kw
Internal circulation liquid volume	4L	5L	6L	8L	10L	12L	20L
Expansion tank capacity	10L	10L	15L	15L	20L	25L	35L
Refrigerant	R410A
Secondary Refrigerant	Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, DI, etc. (DI temperature needs to be controlled above 10 ℃)
Entry and exit interfaces	ZG1/2	ZG1/2	ZG3/4	ZG3/4	ZG3/4	ZG1	ZG1
Cooling water outlet	ZG1/2	ZG1/2	ZG3/4	ZG1	ZG1	ZG1	ZG1 1/8
Cooling water flow rate@20℃	1.5m³/h	2m³/h	2.5m³/h	4m³/h	4.5m³/h	5.6m³/h	9m³/h
power supply 380V	3.5kW	4kW	5.5kW	7kW	9.5kW	12kW	16kW
Temperature extension	By adding an electric heater, expand the temperature range from -25 ℃ to 80 ℃

Model	FLT-202 FLT-202W	FLT-203 FLT-203W	FLT-204 FLT-204W	FLT-206 FLT-206W	FLT-208 FLT-208W	FLT-210 FLT-210W	FLT-215 FLT-215W
Temp Range	-25℃～40℃
Temp Control Accuracy	±0.05℃
Flow Control	10～25L/min ±0.3		15～45L/min ±0.3			25～75L/min ±0.3
Flow Control	The flow control is adjusted by a frequency converter, and the maximum pressure of the circulation pump is 5bar.
Refrigeration @-15℃	2kw	3kw	3.8kw	6kw	7.6kw	10kw	15kw
Internal Circulation Fluid Volume	4L	5L	6L	8L	10L	12L	20L
Expansion tank volume	10L	10L	15L	15L	20L	25L	35L
refrigerant	R404A
Secondary Refrigerant	Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, etc.
Ingress and egress interface	ZG1/2	ZG1/2	ZG3/4	ZG3/4	ZG3/4	ZG1	ZG1
Cooling water connection	ZG1/2	ZG1/2	ZG3/4	ZG3/4	ZG1	ZG1	ZG1 1/8
Cooling water flow@20℃	1.2m³/H	1.6m³/H	2.6m³/H	3.6m³/H	5.5m³/H	7m³/H	10.2m³/H
Power 380V	3KW	4KW	6KW	8KW	9KW	13KW	17KW
Temp Expansion	By adding an electric heater, it can be extended to -25℃~80℃

Model	FLT-402 FLT-402W	FLT-403 FLT-403W	FLT-404 FLT-404W	FLT-406 FLT-406W	FLT-408 FLT-408W	FLT-410 FLT-410W	FLT-415 FLT-415W
Temp Control	-45℃～40℃
Temp control accuracy	±0.05℃
Flow Control	10～25L/min 5bar max		15～45L/min 6bar max			25～75L/min 6bar max
Heating	Compressor heating is used to prevent condenser frosting technology
Refrigeration Capacity @-35℃	1kw	1.4kw	1.8kw	2.5kw	3.3kw	5kw	8kw
Internal circulation fluid volume	4L	5L	6L	8L	10L	12L	20L
Expansion tank volume	10L	10L	15L	15L	20L	25L	35L
Refrigerant	R404A
Secondary Refrigerant	Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, etc.
Ingress and egress interface	ZG1/2	ZG1/2	ZG3/4	ZG3/4	ZG3/4	ZG1	ZG3/4
Cooling water connection	ZG1/2	ZG3/4	ZG3/4	ZG1	ZG1	ZG1	ZG1 1/8
Cooling water flow @20℃	1.5m³/H	2.4m³/H	3.5m³/H	5m³/H	5.5m³/H	6m³/H	8m³/H
Power 380V	3KW	4KW	6KW	7.5KW	9KW	12KW	15KW
Temperature Expansion	By adding an electric heater, it can be extended to -25℃~80℃