FLT -100℃~80℃
semiconductor production process water chiller- Temperture accuracy±0.1℃
- Flow control12~45/min
- TypeLow Temperature Cascade
- Power range380V
Product data download
![](https://www.lneya.com/wp-content/uploads/2024/02/880_01.jpg)
![](https://www.lneya.com/wp-content/uploads/2024/02/880_02.jpg)
![](https://www.lneya.com/wp-content/uploads/2024/02/880_06-e1708664812668.jpg)
Configuration Details
Model |
FLT-803W |
FLT-805W |
FLT-806W |
FLT-808W |
FLT-810W |
Temp Range |
-80℃~+80℃ |
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Temperature control accuracy |
±0.1℃ |
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Flow Control |
7~25L/min |
12~45L/min |
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The flow control is adjusted by a frequency converter, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 6bar. |
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Cooling capacity@-70℃ |
0.6KW |
1KW |
1.5KW |
2KW |
3KW |
Heating power |
2KW |
2KW |
2KW |
3.5KW |
3.5KW |
Internal Circulation fluid volume |
4L |
5L |
6L |
8L |
10L |
Expansion tank volume |
10L |
10L |
15L |
15L |
20L |
Thermal medium |
Fluorinated liquid |
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Ingress and egress interface |
ZG1/2 |
ZG1/2 |
ZG3/4 |
ZG3/4 |
ZG3/4 |
Cooling water interface |
ZG3/4 |
ZG3/4 |
ZG3/4 |
G1 |
G1 |
Cooling Water @20℃ |
1.8m3/h |
2.5m3/h |
3m3/h |
5m3/h |
6m3/h |
Power Supply |
380V 50HZ |
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Breaker |
25A |
25A |
32A |
40A |
50A |
Model |
FLT-1002W |
FLT-1004W |
Temp Range |
-100℃~+80℃ |
-100℃~+80℃ |
Temp Accuracy |
±0.1℃ |
±0.1℃ |
Flow Control |
7~25L/min |
12~45L/min |
The flow control is adjusted by a frequency converter, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 6bar. |
||
Cooling Capacity@-90℃ |
1.5KW |
3KW |
Heating Power |
3.5KW |
5.5KW |
Internal circulation fluid volume |
5L |
8L |
Expansion tank volume |
10L |
15L |
Thermal medium |
Fluorinated liquid |
|
Ingress and egress interface |
ZG3/4 |
ZG3/4 |
Cooling water interface |
G3/4 |
G1 |
Cooling water @20℃ |
50L/min 2bar~7bar |
100L/min 2bar~7bar |
Power |
380V 50HZ |
380V 50HZ |
Breaker |
32A |
63A |
Weight |
700*800*1850 |
800*1200*1850 |
![](https://www.lneya.com/wp-content/uploads/2024/02/880_03-e1708664700700.jpg)
![](https://www.lneya.com/wp-content/uploads/2024/02/880_04.jpg)
![](https://www.lneya.com/wp-content/uploads/2024/02/880_05.jpg)
chillers that control the processing temperature on the Fab equipments
Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.
Applications
![](https://www.lneya.com/wp-content/uploads/2024/02/semiconductor-process.jpg)
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