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What are the installation requirements for lithography chillers?

Industry News News 1630

In order to ensure the reliable and normal operation of the chiller of the lithography machine and prevent the failure of the chiller caused by improper water distribution pipeline construction, the following matters should be paid attention to when installing this unit.

Working Principle:
The heat flow cover isolates the test piece from the surrounding environment, and circulates the jet of gas. By accurately controlling the cold and hot air in a very short period of time, it provides accurate and fast ambient temperature for the test item.

Precautions for the power supply of the lithography machine chiller:
1. The power supply of the chiller for the lithography machine adopts three-phase four-wire, and the power line is connected to the live line, the neutral line and the ground line.
2. The perforation on the electric control box of the main power cord is connected to the post inside the box to ensure that the connection is tight.
3. Unit power distribution requirements: main power supply voltage: within the rated voltage range
4. When the main power supply voltage exceeds the fluctuation and exceeds the specified range, the chiller is not allowed to start, otherwise it will be regarded as improper operation, and the damage caused by this is not within the maintenance scope of our company.
5. The water flow switch, water pump, cooling tower motor and other interlock circuits of the water system can be correctly connected to the unit control circuit when necessary.
6. The chiller for lithography machine has no current overload protection, high and low pressure protection at the discharge end of the compressor, motor line overheat protection, anti-icing protection, interlocking protection of cooling water and other measures. Do not modify it without authorization, if necessary. Please contact the manufacturer for changes.

Precautions for installation of lithography machine chiller:
1. Lifting and installing the chiller for the lithography machine, take care not to damage the chiller, and arrange the space around the chiller for the lithography machine rationally to facilitate the maintenance of the chiller for the lithography machine.
2. In accordance with the requirements for piping system design, construction and installation, rationally design and install the freezing water and cooling water system to give full play to the performance of the chiller for the lithography machine.
3. The unit should be placed horizontally and installed in a ventilated location.
4. Select the matching cooling tower according to the cooling capacity of the unit.
5. For the piping of the unit, please refer to the piping method recommended by our company for installation and construction.
6. When the surrounding environment of the water source and the cooling water tower is bad, the chilled water and cooling water circuit must be equipped with Y-type filters and regularly cleaned. The higher part of the closed chilled water system must be installed with an automatic exhaust valve, and the lower part of the system must be installed with a drainage connector. For system drainage.
7. After the chilled water piping system has passed the leak test, it is covered with an insulating layer to avoid loss of cold capacity and dripping of the pipes.

The above is the relevant content compiled by the LNEYA article editor assistant. If you have any questions, please contact us

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