Negative/Low Pressure Semiconductor Chiller

ZLFQ-80 25℃/35℃

TEMPERATURE ACCURACY ±0.1℃

Cooling and temperature control in negative pressure environment, suitable for cooling various types of boards.

Send us about your inquiry

Overall Dimensions

1300mm(L)*700mm(W)
*1850mm(H)

Power supply

AC220V/50HZ，
8A(max)

Communication Protocol

RS485 Serial Port MODBUS RTU Protocol / Ethernet Interface TCP/IP Protocol

Principle:

Drive the heat transfer medium (water/oil) circulation through the negative pressure generator to avoid leakage risk, suitable for cooling various types of boards.

ZLFQ SERIES

25℃/30°C

Supply and Return Liquid Temperature

80KW

Rated Heat Exchange Capacity

±0.1°C

Temperature control accuracy

Model	ZLFQ-80
Rated Heat Exchange Capacity		80KW
Primary Side (Medium Side)	Working Medium	Pure water, fluorinated liquid, ethylene glycol aqueous solution, etc.
	Rated Flow Rate	300L/MIN
	Liquid Storage Volume	120L
	Supply and Return Liquid Temperature	25/35℃
	Temperature Control Accuracy	±0.1℃
	Vacuum Pump Air Extraction Capacity	130m3/h
	Negative Pressure Head	70KPA
	Internal Circulation Pump Configuration	1+1 Redundancy
	Interface Size	ZG1-1/4
Secondary Side (Cooling Side)	Cooling Medium	PCW
	Cooling Flow Rate	4m3/h
	Filtration Accuracy	50um
	Interface Size	ZG1
Control System		PLC Controller, Feedforward Control + Lag-Compensated PID Algorithm
Liquid Supply Leakage Rate		Negative Pressure Circulating Leak-free System
Safety Protection		Equipped with self-diagnosis function, equipment overload protection, low liquid level protection, etc.
Other Functions		Functions including automatic leak detection, automatic liquid discharge, automatic liquid replenishment, etc.

CORE TECHNOLOGY & ADVANTAES

Precise temperature control through fluid circulation under negative pressure environment

Leak-proof design

When the system is running, the pipeline is in a negative pressure state, and even if the pipeline is broken, it will not leak high-temperature medium, which is highly safe.

High efficiency and energy saving

Fully enclosed circulation, closed circulation, reduce heat energy loss.

Precise temperature control

PID algorithm or PLC control is adopted to achieve temperature fluctuation ≤±0.3℃, which is suitable for precision manufacturing scenarios.

Multi-scenario adaptation

Supports pure water, fluorinated liquid, diethanolamine aqueous solution and other different media, the temperature control range is from room temperature to 80℃

ALL Semiconductor chillers model

FLTZ 5℃~90℃
Process Chillers

Cooling capacity 6kW~40kW
Cooling water flow 1.5m³/h~9m³/h
Temp accuracy ±0.05℃

Learn more

FLTZ -25℃～90℃
Thermal Chillers

Cooling capacity 2kW~15kW
Cooling water flow 1.2m³/h~10.2m³/h
Temp accuracy ±0.05℃

Learn more

FLTZ -45℃～90℃
Low Temperature Chillers

Cooling capacity 1kW~8kW
Cooling water flow 1.5m³/h~8m³/h
Temp accuracy ±0.05℃

Learn more

FLTZ -80℃～+90℃
Recirculating Water Chillers

Cooling capacity 0.6kW~3kW
Cooling water flow 1.8m³/h~6m³/h
Temp accuracy ±0.05℃

Learn more

FLTZ -100℃～+90℃
Recirculation Chiller

Cooling capacity 1.5kW~3kW
Cooling water flow 50L/min~100L/min 2bar~7bar
Temp accuracy ±0.05℃

Leran more

why choose LNEYA?

Semiconductor Chillers Manufacturer in China

❯More than 15 years of design and production experience
❯One-stop service
❯Short delivery time
❯Strong after-sales service and technical support
❯Highly accurate and repeatable temperature control
❯Made in Wuxi, China
❯130+ patents

Get in touch with our Industrial chiller experts