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ETCU Heat Exchange Chiller without compressor

ETCU Heat Exchange Chiller without compressor

APPLICATIONS

Multi-channel independent temperature control can have independent temperature range, cooling and heating capacity, heat transfer medium flow, etc., using two independent systems, choose steam compression refrigeration according to the required temperature range, or use ETCU compressor-free heat exchange system, the system can use expansion tank, condenser, cooling water system, etc., which can effectively reduce the size of equipment and reduce the operation steps.

 

Model ETCU-005W ETCU-015W ETCU-030W ETCU-050W ETCU-100W ETCU-200W ETCU-300W
Temperature range Cooling water temperature +5℃~90℃
Temperature control accuracy ±0.05℃(Steady state outlet temperature)
Cooling water temperature 7℃~30℃ Cooling water flow is controlled by Siemens/Honeywell regulating valves
Cooling capacity 5kW 15kW 30kW 50kW 100kW 200kW 300kW
Test conditions: When the maximum circulation amount, the temperature difference between
the temperature control temperature and the cooling water temperature is 15℃
Circulation pump 7~20L/min 5bar 15~40L/min 5bar 20~60L/min 5bar 40~110L/min 5bar 150~250L/min 5bar 250~500L/min 5bar 400~650L/min 5bar
Tank volume 5L 10L 20L 30L 60L 120L 240L
Dimension cm 480*750*390 480*750*390 480*750*500 Customization Customization Customization Customization

APPLICATIONS

Temperature control unit of semiconductor FAB process

Semiconductor manufacturing is a process with extremely high environmental requirements, and many process steps are very sensitive to temperature.
Precise temperature control can ensure uniform thickness and accurate composition of deposited films, thereby improving chip performance and yield.

for Semiconductor packaging & testing process

Semiconductor packaging and testing process is a key link in the semiconductor production process, including wafer testing, chip packaging and post-packaging testing. This process requires not only a high degree of accuracy and reliability, but also strict temperature control to ensure product quality and performance.

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