LNEYA Industrial Chillers Manufacturer Supplier -
FLTZ Variable Frequency Series Multi-channel Chillers
APPLICATIONS
Semiconductor air cooling & water cooling Chiller is mainly used for precise temperature control in semiconductor production and testing. Products include fluid fluorinated liquid temperature control (minimum -100 degrees), gas hot and cold rapid temperature change, rapid temperature change chuck, low temperature gas refrigerator (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies a variety of algorithms (PID, feedforward PID, model-free self-building algorithm) in the system to achieve fast system response and high control accuracy.
Product Parameters
FLTZ -20℃～+90℃
| Model | FLTZ-203W-2T | |
| Pipeline | channel 1 | channel 2 |
| Temperature range | -20℃～+90℃ | -20℃～+90℃ |
| Cooling capacity | 4kW@-10℃ | 4kW@-10℃ |
| Heating capacity | 2kW | 2kW |
| Heat conducting medium flow rate | 20L/min@0.5MPa | 20L/min@0.5MPa |
| Heat conducting medium connection size | ZG3/4 | ZG3/4 |
| Ambient temperature | 10～35℃ | 10～35℃ |
| Ambient humidity | 30～70% | 30～70% |
| Cooling water flow rate | 15～20℃ | 15～20℃ |
| Cooling water temperature | 20L/min | 20L/min |
| Circuit breaker | 30A | |
| Weight | 400kg | |
| Dimension cm | 500*900*1600 | |
FLTZ -45℃～+40℃
| Model | FLTZ-406W/ETCU-015W | |
| Pipeline | channel 1 | channel 2 |
| Temperature range | -45℃～+40℃ | +10℃～+80℃ |
| Cooling capacity | 11kW@-20℃ 5kW@-40℃ |
13kW@+10℃ |
| Heating capacity | 2kW | 6kW |
| Heat conducting medium flow rate | 17L/min@0.7MPa | 17L/min@0.7MPa |
| Heat conducting medium connection size | ZG3/4 | ZG3/4 |
| Ambient temperature | 10～35℃ | 10～35℃ |
| Ambient humidity | 30～70% | 30～70% |
| Cooling water flow rate | 15～20℃ | 15～20℃ |
| Cooling water temperature | 40L/min | 20L/min |
| Circuit breaker | 80A | |
| Weight | 550kg | |
| Dimension cm | 600*1000*1850 | |
FLTZ -10℃～+80℃
| Model | FLTZ-203W/ETCU-008W | ||
| Pipeline | channel 1 | channel 2 | channel 3 |
| Temperature range | -10℃～+60℃ | +30℃～+80℃ | -10℃～+80℃ |
| Cooling capacity | 4kW@-10℃/21kW@+20℃ | 6 kW@+30℃ | 3kW@-10℃ |
| Heating capacity | 4kW | 4.5+6kW | 3kW |
| Heat conducting medium flow rate | 17L/min@0.7MPa | 17L/min@0.7MPa | 17L/min@0.7MPa |
| Heat conducting medium connection size | ZG3/4 | ZG3/4 | ZG3/4 |
| Ambient temperature | 10～35 ℃ | 10～35 ℃ | 10～35 ℃ |
| Ambient humidity | 30～70% | 30～70% | 30～70% |
| Cooling water flow rate | 15～20℃ | 15～20℃ | 15～20℃ |
| Cooling water temperature | 30L/min@15~20℃ | 15L/min@15~20℃ | 15L/min@15~20℃ |
| Circuit breaker | 100A | ||
| Weight | 600kg | ||
| Dimension cm | 600*1000*1700 | ||
FLTZ -20℃～+50℃
| Model | FLT-215W/ETCU-015W/ETCU-008W | ||
| Pipeline | channel 1 | channel 2 | channel 3 |
| Temperature range | -20℃～+50℃ | +30℃～+100℃ | +30℃～+40℃ |
| Cooling capacity | 15kW@-10℃ | 13kW@PCW+15℃ | 8kW@PCW+10℃ |
| Heating capacity | 2kW | 6kW | Pump Heat Loss |
| Heat conducting medium flow rate | 30L/min@0.85MPa | 30L/min@0.85MPa | 20L/min@0.8MPa |
| Heat conducting medium connection size | ZG3/4 | ZG3/4 | ZG3/4 |
| Ambient temperature | 10～35 ℃ | 10～35 ℃ | 10～35 ℃ |
| Ambient humidity | 30～70% | 30～70% | 30～70% |
| Cooling water flow rate | 15～20℃ | 15～20℃ | 15～20℃ |
| Cooling water temperature | 30L/min@15~20℃ | 15L/min@15~20℃ | 15L/min@15~20℃ |
| Circuit breaker | 75A | ||
| Weight | 600kg | ||
| Dimension cm | 600*1000*1700 | ||
FLTZ -45℃~90℃
| Model | FLTZ-203W/2T dual system | FLTZ-305W/2T dual system | FLTZ-406W/2T dual system | |||
| Temperature range | -20℃~90℃ | -30℃~90℃ | -45℃~90℃ | |||
| Heat conducting medium flow rate | 15~45l/min 6bar max | |||||
| Heating capacity | 2.5kW | 2.5kW | 2.5kW | 2.5kW | 3.5kW | 3.5kW |
| Cooling capacity | 3kW at-15℃ | 3kW at-15℃ | 5kW at-15℃ | 5kW at-15℃ | 2.5kW at -35℃ | 2.5kW at -35℃ |
| Internal circulation fluid volume | 5L | 5L | 8L | 8L | 8L | 8L |
| Expansion tank volume | 15L | 25L | 25L | |||
| Heat-conducting medium | Fluorinated liquid, antifreeze, thermal conductive silicone oil, etc | |||||
| Refrigerant | R404A/ R448 | |||||
| Heat-conducting medium interface | ZG3/4 | |||||
| Cooling water interface | ZG3/4 | |||||
| Cooling water interface | 50L/min at20℃ | 600L/min at20℃ | 50L/min at20℃ | |||
| Power | Three phase 220V/Three phase 400V/Three phase 460V | |||||
Product Advantages
- Efficient production stability and repeatability results;
- Using plate heat exchangers and pipeline heaters to improve cooling and heating rates;
- Very wide temperature range, no need to replace liquid medium;
- Fully enclosed system, extending the lifespan of thermal conductive liquids;
- Adopting magnetic drive pump, there is no problem of shaft seal leakage;
- High temperature cooling technology, directly start the compressor to cool down at 300 ℃.
Variable frequency pump can adjust circulating hydraulic pressure and flow
client output signal
Communication function
APPLICATIONS
Temperature control unit of semiconductor FAB process
Semiconductor manufacturing is a process with extremely high environmental requirements, and many process steps are very sensitive to temperature.
Precise temperature control can ensure uniform thickness and accurate composition of deposited films, thereby improving chip performance and yield.
for Semiconductor packaging & testing process
Semiconductor packaging and testing process is a key link in the semiconductor production process, including wafer testing, chip packaging and post-packaging testing. This process requires not only a high degree of accuracy and reliability, but also strict temperature control to ensure product quality and performance.
Such as chillers that control the processing temperature on the Fab equipments.
Cooling of CMOS/CCD sensors in semiconductor metrology systems.
Recirculating Chiller for semiconductor metering AOI system.
Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.
Used for plasma bevel etch and deposition; Thermal Atomic Layer Etching of Metal Tungsten.
LNEYA provides customized Chiller services
custom chiller sizes
Whether it is portable, compact, large and small chillers, we can custom design them according to your requirements. No matter how many tons of chiller you need, we can create the best solution.
custom chiller types
We provide chillers of various refrigeration types, including but not limited to air-cooled, water-cooled and evaporative-condensing chillers. Regardless of the type of refrigeration compressor, we can design it according to your requirements.
custom temperature ranges
We can create a custom solution for temperatures from -150℃ to +350℃. Custom temperature ranges for specific industries.
custom chiller voltage
Customize chiller voltage and phase according to your needs. Optional 110V/60HZ, 220V/60HZ, 380V/50HZ, 220V/50HZ, 400V/50HZ, 460V/60HZ, 440V~480V/60HZ, etc.
Visit LNEYA factory
Why choose lneya as your temperature control supplier?
Years of experience
Satisfied Customers
m² Production Area
Patented Technologies
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