
FLTZ Variable Frequency Chillers Multi-channel Series
APPLICATIONS
Semiconductor air cooling & water cooling Chiller is mainly used for precise temperature control in semiconductor production and testing. Products include fluid fluorinated liquid temperature control (minimum -100 degrees), gas hot and cold rapid temperature change, rapid temperature change chuck, low temperature gas refrigerator (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies a variety of algorithms (PID, feedforward PID, model-free self-building algorithm) in the system to achieve fast system response and high control accuracy.
Product Features
Product Parameters
FLTZ -20℃~+90℃
Model | FLTZ-203W-2T | |
Pipeline | channel 1 | channel 2 |
Temperature range | -20℃~+90℃ | -20℃~+90℃ |
Cooling capacity | 4kW@-10℃ | 4kW@-10℃ |
Heating capacity | 2kW | 2kW |
Heat conducting medium flow rate | 20L/min@0.5MPa | 20L/min@0.5MPa |
Heat conducting medium connection size | ZG3/4 | ZG3/4 |
Ambient temperature | 10~35℃ | 10~35℃ |
Ambient humidity | 30~70% | 30~70% |
Cooling water flow rate | 15~20℃ | 15~20℃ |
Cooling water temperature | 20L/min | 20L/min |
Circuit breaker | 30A | |
Weight | 400kg | |
Dimension cm | 500*900*1600 |
FLTZ -45℃~+40℃
Model | FLTZ-406W/ETCU-015W | |
Pipeline | channel 1 | channel 2 |
Temperature range | -45℃~+40℃ | +10℃~+80℃ |
Cooling capacity | 11kW@-20℃ 5kW@-40℃ |
13kW@+10℃ |
Heating capacity | 2kW | 6kW |
Heat conducting medium flow rate | 17L/min@0.7MPa | 17L/min@0.7MPa |
Heat conducting medium connection size | ZG3/4 | ZG3/4 |
Ambient temperature | 10~35℃ | 10~35℃ |
Ambient humidity | 30~70% | 30~70% |
Cooling water flow rate | 15~20℃ | 15~20℃ |
Cooling water temperature | 40L/min | 20L/min |
Circuit breaker | 80A | |
Weight | 550kg | |
Dimension cm | 600*1000*1850 |
FLTZ -10℃~+80℃
Model | FLTZ-203W/ETCU-008W | ||
Pipeline | channel 1 | channel 2 | channel 3 |
Temperature range | -10℃~+60℃ | +30℃~+80℃ | -10℃~+80℃ |
Cooling capacity | 4kW@-10℃/21kW@+20℃ | 6 kW@+30℃ | 3kW@-10℃ |
Heating capacity | 4kW | 4.5+6kW | 3kW |
Heat conducting medium flow rate | 17L/min@0.7MPa | 17L/min@0.7MPa | 17L/min@0.7MPa |
Heat conducting medium connection size | ZG3/4 | ZG3/4 | ZG3/4 |
Ambient temperature | 10~35 ℃ | 10~35 ℃ | 10~35 ℃ |
Ambient humidity | 30~70% | 30~70% | 30~70% |
Cooling water flow rate | 15~20℃ | 15~20℃ | 15~20℃ |
Cooling water temperature | 30L/min@15~20℃ | 15L/min@15~20℃ | 15L/min@15~20℃ |
Circuit breaker | 100A | ||
Weight | 600kg | ||
Dimension cm | 600*1000*1700 |
FLTZ -20℃~+50℃
Model | FLT-215W/ETCU-015W/ETCU-008W | ||
Pipeline | channel 1 | channel 2 | channel 3 |
Temperature range | -20℃~+50℃ | +30℃~+100℃ | +30℃~+40℃ |
Cooling capacity | 15kW@-10℃ | 13kW@PCW+15℃ | 8kW@PCW+10℃ |
Heating capacity | 2kW | 6kW | Pump Heat Loss |
Heat conducting medium flow rate | 30L/min@0.85MPa | 30L/min@0.85MPa | 20L/min@0.8MPa |
Heat conducting medium connection size | ZG3/4 | ZG3/4 | ZG3/4 |
Ambient temperature | 10~35 ℃ | 10~35 ℃ | 10~35 ℃ |
Ambient humidity | 30~70% | 30~70% | 30~70% |
Cooling water flow rate | 15~20℃ | 15~20℃ | 15~20℃ |
Cooling water temperature | 30L/min@15~20℃ | 15L/min@15~20℃ | 15L/min@15~20℃ |
Circuit breaker | 75A | ||
Weight | 600kg | ||
Dimension cm | 600*1000*1700 |
FLTZ -45℃~90℃
Model | FLTZ-203W/2T dual system | FLTZ-305W/2T dual system | FLTZ-406W/2T dual system | |||
Temperature range | -20℃~90℃ | -30℃~90℃ | -45℃~90℃ | |||
Heat conducting medium flow rate | 15~45l/min 6bar max | |||||
Heating capacity | 2.5kW | 2.5kW | 2.5kW | 2.5kW | 3.5kW | 3.5kW |
Cooling capacity | 3kW at-15℃ | 3kW at-15℃ | 5kW at-15℃ | 5kW at-15℃ | 2.5kW at -35℃ | 2.5kW at -35℃ |
Internal circulation fluid volume | 5L | 5L | 8L | 8L | 8L | 8L |
Expansion tank volume | 15L | 25L | 25L | |||
Heat-conducting medium | Fluorinated liquid, antifreeze, thermal conductive silicone oil, etc | |||||
Refrigerant | R404A/ R448 | |||||
Heat-conducting medium interface | ZG3/4 | |||||
Cooling water interface | ZG3/4 | |||||
Cooling water interface | 50L/min at20℃ | 600L/min at20℃ | 50L/min at20℃ | |||
Power | Three phase 220V/Three phase 400V/Three phase 460V |
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