
FLTZ Variable Frequency Series for Semiconductor Industry
APPLICATIONS
Semiconductor temperature control unit Chiller is mainly used for precise temperature control in the semiconductor production process and testing process. The company applies multiple algorithms (PID, feedforward PID, model-free self-building algorithm) in the system to achieve fast system response and high control accuracy.
Product Features
Product Parameters
The chiller's exhaust and suction temperature (pressure), condensing temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), power consumption, current of each component, voltage, water tank level and other important information are all connected to the control system through sensors for comprehensive management, monitoring and recording.
FLTZ 5℃~90℃
Model | 002 002W |
003 003W |
004 004W |
006 006W |
008 008W |
010 010W |
015 015W |
Temperature range | 5℃~90℃ | ||||||
Cooling capacity @10℃ | 6kW | 8kW | 10kW | 15kW | 20kW | 25kW | 40kW |
Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
Expansion tank volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
Refrigerant | R410A | ||||||
Refrigerating medium | Silicone oil, fluorinated liquid, polyol aqueous solution, DI, etc. (DI temp needs to be controlled above 10 ℃) | ||||||
Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
Cooling water connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG1 | ZG1 | ZG1 | ZG1 1/8 |
Cooling water flow @20℃ | 1.5m³/h | 2m³/h | 2.5m³/h | 4m³/h | 4.5m³/h | 5.6m³/h | 9m³/h |
Dimension cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*600*1500 | 1080*600*1500 |
FLTZ -25℃~90℃
Model | 202 202W |
203 203W |
204 204W |
206 206W |
208 208W |
210 210W |
215 215W |
Temperature range | -25℃~90℃ | ||||||
Flow control | 10~25L/min | 15~45L/min | 25~75L/min | ||||
Cooling capacity @-15℃ | 2kW | 3kW | 3.8kW | 6kW | 7.6kW | 10kW | 15kW |
Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
Expansion tank volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
Refrigerant | R404A | ||||||
Refrigerating medium | Silicone oil, fluorinated liquid, glycol solution etc | ||||||
Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
Cooling water connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG1 | ZG1 | ZG1 1/8 |
Cooling water flow @20℃ | 1.2m³/H | 1.6m³/H | 2.6m³/H | 3.6m³/H | 5.5m³/H | 7m³/H | 10.2m³/H |
Dimension cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*600*1500 | 1080*600*1500 |
FLTZ -45℃~90℃
Model | 402 402W |
403 403W |
404 404W |
406 406W |
408 408W |
410 410W |
415 415W |
Temperature range | -45℃~90℃ | ||||||
Flow control | 10~25L/min 5bar max | 15~45L/min 5bar max | 25~75L/min 5bar max | ||||
Heating | Using compressor heating, prevent condenser frosting technology | ||||||
Cooling capacity @-35℃ | 1kW | 1.4kW | 1.8kW | 2.5kW | 3.3kW | 5kW | 8kW |
Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
Expansion tank volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
Refrigerant | R404A | ||||||
Refrigerating medium | Silicone oil, fluorinated liquid, glycol solution etc | ||||||
Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
Cooling water connection size | ZG1/2 | ZG3/4 | ZG3/4 | ZG1 | ZG1 | ZG1 | ZG1 1/8 |
Cooling water flow @20℃ | 1.5m³/H | 2.4m³/H | 3.5m³/H | 5m³/H | 5.5m³/H | 6m³/H | 8m³/H |
Dimension cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*500*1500 | 1080*500*1500 |
FLTZ 80℃~+90℃
Model | 803W | 805W | 806W | 808W | 810W |
Temperature range | -80℃~+90℃ | ||||
Flow control | 7~25L/min 5bar max | 12~45L/min 6bar max | |||
Cooling capacityat-70℃ | 0.6kW | 1kW | 1.5kW | 2kW | 3kW |
Heating capacity | 2kW | 2kW | 2kW | 3.5kW | 3.5kW |
Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L |
Expansion tank volume | 10L | 10L | 15L | 15L | 20L |
Heat-conduction medium | Fluorinated liquid | ||||
Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 |
Cooling water connection size | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
Cooling water@20℃ | 1.8m3/h | 2.5m3/h | 3m3/h | 5m3/h | 6m3/h |
Circuit breaker | 25A | 25A | 32A | 40A | 50A |
Dimension cm | 550*700*1750 | 650*850*1850 | 700*850*1850 | 700*850*1850 | 800*1200*1850 |
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