LNEYA Industrial Chillers Manufacturer Supplier
FLTZ Variable Frequency Series Chiller for Semiconductor Industry
APPLICATIONS
Semiconductor temperature control unit Chiller is mainly used for precise temperature control in the semiconductor production process and testing process. The company applies multiple algorithms (PID, feedforward PID, model-free self-building algorithm) in the system to achieve fast system response and high control accuracy.
Product Parameters
FLTZ 5℃～90℃
| Model | 002 002W |
003 003W |
004 004W |
006 006W |
008 008W |
010 010W |
015 015W |
| Temperature range | 5℃～90℃ | ||||||
| Cooling capacity @10℃ | 6kW | 8kW | 10kW | 15kW | 20kW | 25kW | 40kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| Expansion tank volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| Refrigerant | R410A | ||||||
| Refrigerating medium | Silicone oil, fluorinated liquid, polyol aqueous solution, DI, etc. (DI temp needs to be controlled above 10 ℃) | ||||||
| Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling water connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG1 | ZG1 | ZG1 | ZG1 1/8 |
| Cooling water flow @20℃ | 1.5m³/h | 2m³/h | 2.5m³/h | 4m³/h | 4.5m³/h | 5.6m³/h | 9m³/h |
| Dimension cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*600*1500 | 1080*600*1500 |
FLTZ -25℃～90℃
| Model | FLTZ-202 FLTZ-202W |
FLTZ-203 FLTZ-203W |
FLTZ-204 FLTZ-204W |
FLTZ-206 FLTZ-206W |
FLTZ-208 FLTZ-208W |
FLTZ-210 FLTZ-210W |
FLTZ-215 FLTZ-215W |
| Temperature range | -25℃～90℃ | ||||||
| Temperature control accuracy | ±0.05℃（Steady state outlet temperature） | ||||||
| Flow control | 10～25L/min | 15～45L/min | 25～75L/min | ||||
| Cooling capacity @-15℃ | 2kW | 3kW | 3.8kW | 6kW | 7.6kW | 10kW | 15kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| Expansion tank volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| Refrigerant | R404A | ||||||
| Refrigerating medium | Silicone oil, fluorinated liquid, glycol solution etc | ||||||
| Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling water connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG1 | ZG1 | ZG1 1/8 |
| Cooling water flow @20℃ | 1.2m³/H | 1.6m³/H | 2.6m³/H | 3.6m³/H | 5.5m³/H | 7m³/H | 10.2m³/H |
| Dimension cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*600*1500 | 1080*600*1500 |
| Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
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FLTZ -45℃～90℃
| Model | FLTZ-402 FLTZ-402W |
FLTZ-403 FLTZ-403W |
FLTZ-404 FLTZ-404W |
FLTZ-406 FLTZ-406W |
FLTZ-408 FLTZ-408W |
FLTZ-410 FLTZ-410W |
FLTZ-415 FLTZ-415W |
| Temperature range | -45℃～90℃ | ||||||
| Temperature control accuracy | ±0.05℃（Steady state outlet temperature） | ||||||
| Flow control | 10～25L/min 5bar max | 15～45L/min 5bar max | 25～75L/min 5bar max | ||||
| Heating | Using compressor heating, prevent condenser frosting technology | ||||||
| Cooling capacity @-35℃ | 1kW | 1.4kW | 1.8kW | 2.5kW | 3.3kW | 5kW | 8kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L | 12L | 20L |
| Expansion tank volume | 10L | 10L | 15L | 15L | 20L | 25L | 35L |
| Refrigerant | R404A | ||||||
| Refrigerating medium | Silicone oil, fluorinated liquid, glycol solution etc | ||||||
| Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling water connection size | ZG1/2 | ZG3/4 | ZG3/4 | ZG1 | ZG1 | ZG1 | ZG1 1/8 |
| Cooling water flow @20℃ | 1.5m³/H | 2.4m³/H | 3.5m³/H | 5m³/H | 5.5m³/H | 6m³/H | 8m³/H |
| Dimension cm | 950*380*1055 | 950*380*1055 | 950*380*1055 | 980*430*1400 | 980*430*1400 | 1080*500*1500 | 1080*500*1500 |
| Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
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FLTZ -80℃～+90℃
| Model | FLTZ-803W | FLTZ-805W | FLTZ-806W | FLTZ-808W | FLTZ-810W |
| Temperature range | -80℃～+90℃ | ||||
| Temperature control accuracy | ±0.05℃（Steady state outlet temperature） | ||||
| Flow control | 7～25L/min 5bar max | 12～45L/min 6bar max | |||
| Cooling capacityat-70℃ | 0.6kW | 1kW | 1.5kW | 2kW | 3kW |
| Heating capacity | 2kW | 2kW | 2kW | 3.5kW | 3.5kW |
| Internal circulating fluid volume | 4L | 5L | 6L | 8L | 10L |
| Expansion tank volume | 10L | 10L | 15L | 15L | 20L |
| Heat-conduction medium | Fluorinated liquid | ||||
| Connection size | ZG1/2 | ZG1/2 | ZG3/4 | ZG3/4 | ZG3/4 |
| Cooling water connection size | ZG3/4 | ZG3/4 | ZG3/4 | ZG1 | ZG1 |
| Cooling water@20℃ | 1.8m3/h | 2.5m3/h | 3m3/h | 5m3/h | 6m3/h |
| Circuit breaker | 25A | 25A | 32A | 40A | 50A |
| Dimension cm | 550*700*1750 | 650*850*1850 | 700*850*1850 | 700*850*1850 | 800*1200*1850 |
| Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
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FLTZ -100℃～+90℃
| Model | FLTZ-1002W | FLTZ-1004W |
| Temperature range | -100℃～+90℃ | |
| Temperature control accuracy | ±0.05℃（Steady state outlet temperature） | |
| Flow control | 7～25L/min | 12～45L/min |
| Cooling capacityat-90℃ | 1.5kW | 3kW |
| Heating capacity | 3.5kW | 5.5kW |
| Internal circulating fluid volume | 5L | 8L |
| Expansion tank volume | 10L | 15L |
| Heat-conduction medium | Fluorinated liquid | |
| Connection size | ZG3/4 | ZG3/4 |
| Cooling water connection size | ZG3/4 | ZG1 |
| Cooling water@20℃ | 50L/min 2bar~7bar | 100L/min 2bar~7bar |
| Circuit breaker | 32A | 63A |
| Process temperature control | The remote target temperature can be controlled by combining the self created model free self built tree algorithm and cascade algorithm |
|
Product Advantages
- Efficient production stability and repeatability results;
- Using plate heat exchangers and pipeline heaters to improve cooling and heating rates;
- Very wide temperature range, no need to replace liquid medium;
- Fully enclosed system, extending the lifespan of thermal conductive liquids;
- Adopting magnetic drive pump, there is no problem of shaft seal leakage;
- High temperature cooling technology, directly start the compressor to cool down at 300 ℃.
Variable frequency pump can adjust circulating hydraulic pressure and flow
client output signal
Communication function
APPLICATIONS
Temperature control unit of semiconductor FAB process
Semiconductor manufacturing is a process with extremely high environmental requirements, and many process steps are very sensitive to temperature.
Precise temperature control can ensure uniform thickness and accurate composition of deposited films, thereby improving chip performance and yield.
for Semiconductor packaging & testing process
Semiconductor packaging and testing process is a key link in the semiconductor production process, including wafer testing, chip packaging and post-packaging testing. This process requires not only a high degree of accuracy and reliability, but also strict temperature control to ensure product quality and performance.
Such as chillers that control the processing temperature on the Fab equipments.
Cooling of CMOS/CCD sensors in semiconductor metrology systems.
Recirculating Chiller for semiconductor metering AOI system.
Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.
Used for plasma bevel etch and deposition; Thermal Atomic Layer Etching of Metal Tungsten.
LNEYA provides customized Chiller services
custom chiller sizes
Whether it is portable, compact, large and small chillers, we can custom design them according to your requirements. No matter how many tons of chiller you need, we can create the best solution.
custom chiller types
We provide chillers of various refrigeration types, including but not limited to air-cooled, water-cooled and evaporative-condensing chillers. Regardless of the type of refrigeration compressor, we can design it according to your requirements.
custom temperature ranges
We can create a custom solution for temperatures from -150℃ to +350℃. Custom temperature ranges for specific industries.
custom chiller voltage
Customize chiller voltage and phase according to your needs. Optional 110V/60HZ, 220V/60HZ, 380V/50HZ, 220V/50HZ, 400V/50HZ, 460V/60HZ, 440V~480V/60HZ, etc.
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Why choose lneya as your temperature control supplier?
Years of experience
Satisfied Customers
m² Production Area
Patented Technologies
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