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FLTZ Variable Frequency Series for Semiconductor Industry

FLTZ Variable Frequency Series for Semiconductor Industry

APPLICATIONS

Semiconductor temperature control unit Chiller is mainly used for precise temperature control in the semiconductor production process and testing process. The company applies multiple algorithms (PID, feedforward PID, model-free self-building algorithm) in the system to achieve fast system response and high control accuracy.

Product Features

 

 

The chiller's exhaust and suction temperature (pressure), condensing temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), power consumption, current of each component, voltage, water tank level and other important information are all connected to the control system through sensors for comprehensive management, monitoring and recording.

 

FLTZ 5℃~90℃

 

Model 002
002W
003
003W
004
004W
006
006W
008
008W
010
010W
015
015W
Temperature range 5℃~90℃
Cooling capacity @10℃ 6kW 8kW 10kW 15kW 20kW 25kW 40kW
Internal circulating fluid volume 4L 5L 6L 8L 10L 12L 20L
Expansion tank volume 10L 10L 15L 15L 20L 25L 35L
Refrigerant R410A
Refrigerating medium Silicone oil, fluorinated liquid, polyol aqueous solution, DI, etc. (DI temp needs to be controlled above 10 ℃)
Connection size ZG1/2 ZG1/2 ZG3/4 ZG3/4 ZG3/4 ZG1 ZG1
Cooling water connection size ZG1/2 ZG1/2 ZG3/4 ZG1 ZG1 ZG1 ZG1 1/8
Cooling water flow @20℃ 1.5m³/h 2m³/h 2.5m³/h 4m³/h 4.5m³/h 5.6m³/h 9m³/h
Dimension cm 950*380*1055 950*380*1055 950*380*1055 980*430*1400 980*430*1400 1080*600*1500 1080*600*1500

 

FLTZ -25℃~90℃

 

Model 202
202W
203
203W
204
204W
206
206W
208
208W
210
210W
215
215W
Temperature range  -25℃~90℃
Flow control 10~25L/min 15~45L/min 25~75L/min
Cooling capacity @-15℃ 2kW 3kW 3.8kW 6kW 7.6kW 10kW 15kW
Internal circulating fluid volume 4L 5L 6L 8L 10L 12L 20L
Expansion tank volume 10L 10L 15L 15L 20L 25L 35L
Refrigerant R404A
Refrigerating medium Silicone oil, fluorinated liquid, glycol solution etc
Connection size ZG1/2 ZG1/2 ZG3/4 ZG3/4 ZG3/4 ZG1 ZG1
Cooling water connection size ZG1/2 ZG1/2 ZG3/4 ZG3/4 ZG1 ZG1 ZG1 1/8
Cooling water flow @20℃ 1.2m³/H 1.6m³/H 2.6m³/H 3.6m³/H 5.5m³/H 7m³/H 10.2m³/H
Dimension cm 950*380*1055 950*380*1055 950*380*1055 980*430*1400 980*430*1400 1080*600*1500 1080*600*1500

 

FLTZ -45℃~90℃

 

Model 402
402W
403
403W
404
404W
406
406W
408
408W
410
410W
415
415W
Temperature range  -45℃~90℃
Flow control 10~25L/min  5bar max 15~45L/min 5bar max 25~75L/min 5bar max
Heating Using compressor heating, prevent condenser frosting technology
Cooling capacity @-35℃ 1kW 1.4kW 1.8kW 2.5kW 3.3kW 5kW 8kW
Internal circulating fluid volume 4L 5L 6L 8L 10L 12L 20L
Expansion tank volume 10L 10L 15L 15L 20L 25L 35L
Refrigerant R404A
Refrigerating medium Silicone oil, fluorinated liquid, glycol solution etc
Connection size ZG1/2 ZG1/2 ZG3/4 ZG3/4 ZG3/4 ZG1 ZG1
Cooling water connection size ZG1/2 ZG3/4 ZG3/4 ZG1 ZG1 ZG1 ZG1 1/8
Cooling water flow @20℃ 1.5m³/H 2.4m³/H 3.5m³/H 5m³/H 5.5m³/H 6m³/H 8m³/H
Dimension cm 950*380*1055 950*380*1055 950*380*1055 980*430*1400 980*430*1400 1080*500*1500 1080*500*1500

 

FLTZ  80℃~+90℃

 

Model 803W 805W 806W 808W 810W
Temperature range  -80℃~+90℃
Flow control 7~25L/min  5bar max 12~45L/min 6bar max
Cooling capacityat-70℃ 0.6kW 1kW 1.5kW 2kW 3kW
Heating capacity 2kW 2kW 2kW 3.5kW 3.5kW
Internal circulating fluid volume 4L 5L 6L 8L 10L
Expansion tank volume 10L 10L 15L 15L 20L
Heat-conduction medium Fluorinated liquid
Connection size ZG1/2 ZG1/2 ZG3/4 ZG3/4 ZG3/4
Cooling water connection size ZG3/4 ZG3/4 ZG3/4 ZG1 ZG1
Cooling water@20℃ 1.8m3/h 2.5m3/h 3m3/h 5m3/h 6m3/h
Circuit breaker 25A 25A 32A 40A 50A
Dimension cm 550*700*1750 650*850*1850 700*850*1850 700*850*1850 800*1200*1850

 

APPLICATIONS

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