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HLTZ Series Hydrogen Cooling Chiller

HLTZ Series Hydrogen Cooling Chiller

APPLICATIONS

Adopt positive pressure explosion-proof system, the positive pressure system has a built-in thermostat to ensure that the system environment is maintained at normal temperature. Hydrogen passes through the internal high-pressure heat exchanger, and the refrigeration system directly exchanges heat with hydrogen through the refrigerant to achieve efficient heat exchange and temperature control; compared with traditional antifreeze or other fluids and hydrogen heat exchange, this equipment uses the medium as the refrigeration system refrigerant (phase change heat), which is more energy efficient.

 

Model HLTZ4-10WPEX HLTZ4-40WPEX HLTZ4-75WPEX
Temperature range -40 ℃~-30℃ -40℃~-30℃ -40℃~-30℃
Temperature control accuracy ±0.3℃ ±0.3℃ ±0.3℃
Temperature feedback Pt100 Pt100 Pt100
Cooling capacity 50HZ -40℃ 4.5kW 16kW 40kW
Compressor Variable frequency compressor
Throttling method Electronic expansion valve
Input, display 7-inch Siemens touch screen\PLC controller
Communication Modbus RTU protocol RS485 interface, Ethernet TCP/IP protocol
Refrigerant R404A/R448A
Inlet and outlet liquid size DN15  PN16 DN20 PN16 DN25 PN16
Water-cooled condenser Requires water supply from chiller or closed cooling tower
Power supply 380V 50HZ optional three-phase/460V 60HZ
Pipe material Copper, SUS304
Casing material Cold rolled plate spraying (REL7035)

 

APPLICATIONS

Temperature control unit of semiconductor FAB process

Semiconductor manufacturing is a process with extremely high environmental requirements, and many process steps are very sensitive to temperature.
Precise temperature control can ensure uniform thickness and accurate composition of deposited films, thereby improving chip performance and yield.

for Semiconductor packaging & testing process

Semiconductor packaging and testing process is a key link in the semiconductor production process, including wafer testing, chip packaging and post-packaging testing. This process requires not only a high degree of accuracy and reliability, but also strict temperature control to ensure product quality and performance.

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