LNEYA Industrial Chillers Manufacturer Supplier -
AI Series Circulating Air Refrigeration Unit
APPLICATIONS
Applied to high and low temperature testing of semiconductor equipment. Electronic equipment high and low temperature constant temperature test cold and heat source; independent refrigeration cycle fan unit; can work continuously for a long time, automatic defrosting, and the defrosting process does not affect the storage temperature.
Product Parameters
AI -105℃～+125℃
| Model | AI-6535 AI-6535W |
AI-8035W | AI-1055W | |
| Temperature range | -65℃～+125℃ | -80℃～+125℃ | -105℃～+125℃ | |
| Control mode | PID Adaptive controller | |||
| Communication protocol | MODBUS RTU Protocol, RS 485 Interface | |||
| Temperature feedback | PT100 | |||
| Operation panel | 7-inch touch screen, show temp. curve/ EXCEL date output | |||
| Temperature accuracy | ±0.05℃（Steady state outlet temperature） | |||
| Heating power | 3.5KW | 3.5kW | 3.5kW | |
| Cooling capacity |
125℃ | 3.5KW | 3.5kW | 3.5kW |
| 50℃ | 3.5kW | 3.5kW | 3.5kW | |
| 20℃ | 3.5kW | 3.5kw | 3.5kw | |
| 0℃ | 3.5kW | 3.5kw | 3.5kw | |
| -20℃ | 3kW | 3.5kW | 3.5kW | |
| -40℃ | 2.1KW | 2.5kW | 3.5kW | |
| -60℃ | 1KW | 2.1kw | 3kw | |
| -75℃ | 1kw | 2kw | ||
| -95 | 1KW | |||
| Circulating air flow | 550m³/h | |||
| Inlet and outletair intertace | DN125 | |||
| Compressor | Emerson Copeland scroll flexible compressor | |||
| Safety protection | Self-diagnosis function; Phase sequence protection. freezer overload protection; high pressure switch. overload relay. thermal protection device. |
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| Defrosting device | There are installed defrosting device and condensate drain inside | |||
| Continuous running | Running continuously | |||
| Timing operation | Can set timed start and stop time | |||
| Refrigerant | R404A R23 | R404A R508B | R404A R23 R14 | |
| Water-cooled | 1200L/H 1.5bar~4bar | 1600L/H 1.5bar~4bar | 2600L/H 1.5bar~4bar | |
| Dimension cm | 55*100*175 | 55*100*175 | 70*100*175 | |
| Weight | 280kg | 300kg | 360kg | |
| Shell material | Cold rolled sheet spray coating REL 7035 | |||
1. Widely used in high and low temperature testing of semiconductor equipment.Cold and heat source of electronic equipment at high temperature and low temperature;
2. Independent refrigeration circulating air units;
3. Can work continuously for a long time, automatic defrosting, defrosting process does not affect the storage temperature;
4. Modular design, easy replacement of spare machine (if there are 10 machines, as long as a standby unit can);
5. Solve frequent open and close doors, evaporating system frosting problems;Evaporation system defrosting process does not affect.
6. Construct a set of high and low temperature and constant greenhouse (according to the drawings provided, the box can be joined together like building blocks to connect the electricity and water and set the temperature to work)
Product Advantages
- Efficient production stability and repeatability results;
- Using plate heat exchangers and pipeline heaters to improve cooling and heating rates;
- Very wide temperature range, no need to replace liquid medium;
- Fully enclosed system, extending the lifespan of thermal conductive liquids;
- Adopting magnetic drive pump, there is no problem of shaft seal leakage;
- High temperature cooling technology, directly start the compressor to cool down at 300 ℃.
Variable frequency pump can adjust circulating hydraulic pressure and flow
client output signal
Communication function
APPLICATIONS
Temperature control unit of semiconductor FAB process
Semiconductor manufacturing is a process with extremely high environmental requirements, and many process steps are very sensitive to temperature.
Precise temperature control can ensure uniform thickness and accurate composition of deposited films, thereby improving chip performance and yield.
for Semiconductor packaging & testing process
Semiconductor packaging and testing process is a key link in the semiconductor production process, including wafer testing, chip packaging and post-packaging testing. This process requires not only a high degree of accuracy and reliability, but also strict temperature control to ensure product quality and performance.
Such as chillers that control the processing temperature on the Fab equipments.
Cooling of CMOS/CCD sensors in semiconductor metrology systems.
Recirculating Chiller for semiconductor metering AOI system.
Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.
Used for plasma bevel etch and deposition; Thermal Atomic Layer Etching of Metal Tungsten.
LNEYA provides customized Chiller services
custom chiller sizes
Whether it is portable, compact, large and small chillers, we can custom design them according to your requirements. No matter how many tons of chiller you need, we can create the best solution.
custom chiller types
We provide chillers of various refrigeration types, including but not limited to air-cooled, water-cooled and evaporative-condensing chillers. Regardless of the type of refrigeration compressor, we can design it according to your requirements.
custom temperature ranges
We can create a custom solution for temperatures from -150℃ to +350℃. Custom temperature ranges for specific industries.
custom chiller voltage
Customize chiller voltage and phase according to your needs. Optional 110V/60HZ, 220V/60HZ, 380V/50HZ, 220V/50HZ, 400V/50HZ, 460V/60HZ, 440V~480V/60HZ, etc.
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Why choose lneya as your temperature control supplier?
Years of experience
Satisfied Customers
m² Production Area
Patented Technologies
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