
MD Series Thermal Chuck
APPLICATIONS
Can achieve rapid temperature changes and accurately control temperature. The system itself comes with a refrigerator, avoiding the consumption of liquid nitrogen, carbon dioxide, etc. Each system includes a chuck and a hot and cold control unit.
Product Features
Product Parameters
MD -75℃~225℃
Model | MD-708 | MD-712 | MDL-708 |
Temp range | -75℃~225℃ | -75℃~225℃ | -75℃~225℃ |
Temp control accuracy | ±0.5℃(Steady state outlet temperature) | ||
Plate temp uniformity | ±1℃ | ±1℃ | ±1℃ |
Flatness of the plate | ±15um | ±15um | ±15um |
Plate size | 200mm diameter disc | 300mm diameter disc | 150mm*200mm |
Host and card connection cable | 2.5m(Other lengths can be customized) | ||
Flat surface treatment | Nickel plating (Optional gold plating) | ||
Heating | -60°C to +25°C: 2 min 0°C to +25°C: 2 min +25°C to +220°C: 6 min |
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Cooling | 220°C to +25°C: 2 min +25°C to -60°C: 6 min |
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Control system | PLC controller, heating feedforward PID fuzzy algorithm, cooling electronic expansion valve PID regulation control cooling capacity |
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Display and record | 7 inch color touch screen, record curve temperature and alarm | ||
Communication | Ethernet interface,TCP/IP protocol | ||
Compressor | Tecumseh | ||
Equipment dimensionmm | 550*650*370 | 550*650*370 | 550*650*370 |
MD series provides an open surface flat work platform with rapid temperature rise and fall and constant temperature control. It is used for RF device and high-density power device testing. It can also be used for rapid cooling of laboratory flat panels (plasma, biological products, batteries), etc. The refrigerant is directly evaporated inside the flat panel, which greatly improves the heat exchange efficiency compared to the liquid cooling method and increases the heat exchange power of the flat panel per unit area.
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