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MD Series Thermal Chuck

MD Series Thermal Chuck

APPLICATIONS

Can achieve rapid temperature changes and accurately control temperature. The system itself comes with a refrigerator, avoiding the consumption of liquid nitrogen, carbon dioxide, etc. Each system includes a chuck and a hot and cold control unit.

MD -75℃~225℃

 

Model MD-708 MD-712 MDL-708
Temp range -75℃~225℃ -75℃~225℃ -75℃~225℃
Temp control accuracy ±0.5℃(Steady state outlet temperature)
Plate temp uniformity ±1℃ ±1℃ ±1℃
Flatness of the plate ±15um ±15um ±15um
Plate size 200mm diameter disc 300mm diameter disc 150mm*200mm
Host and card connection cable 2.5m(Other lengths can be customized)
Flat surface treatment Nickel plating (Optional gold plating)
Heating -60°C to +25°C: 2 min
0°C to +25°C: 2 min
+25°C to +220°C: 6 min
Cooling 220°C to +25°C: 2 min
+25°C to -60°C: 6 min
Control system PLC controller, heating feedforward PID fuzzy algorithm, cooling electronic expansion valve PID
regulation control cooling capacity
Display and record 7 inch color touch screen, record curve temperature and alarm
Communication Ethernet interface,TCP/IP protocol
Compressor Tecumseh
Equipment dimensionmm 550*650*370 550*650*370 550*650*370

 

MD series provides an open surface flat work platform with rapid temperature rise and fall and constant temperature control. It is used for RF device and high-density power device testing. It can also be used for rapid cooling of laboratory flat panels (plasma, biological products, batteries), etc. The refrigerant is directly evaporated inside the flat panel, which greatly improves the heat exchange efficiency compared to the liquid cooling method and increases the heat exchange power of the flat panel per unit area.

 

 

APPLICATIONS

Temperature control solution for Semiconductor packaging and testing process

Semiconductor packaging and testing process is a key link in the semiconductor production process, including wafer testing, chip packaging and post-packaging testing. This process requires not only high precision and reliability, but also strict temperature control to ensure product quality and performance.

Aerospace materials | Test equipment temperature control solution

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