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Circulation Chillers

Direct cooling Chiller temperature control unit

ZLTZ series is suitable for industries such as semiconductors, data centers, and new energy that require efficient, compact, reliable, and precise heat dissipation, especially in areas with high power density, limited space, and temperature sensitivity.

ZLTZ SERIES

-80°C

lowest

20°C

Highest

Rated test conditions for all equipment: Dry bulb temperature: 20°C; Wet bulb temperature: 16°C. Inlet water temperature: 20°C; Outlet water temperature: 25°C.

Model ZLTZ-3
ZLTZ-3W
ZLTZ-6
ZLTZ-6W
ZLTZ-10
ZLTZ-10W
ZLTZ-15W
Temp Range  -10℃ ~25℃
Cooling Capacity 0℃ 8.1kW 16.25kW 28.5kW 40.2kW
-10℃ 5.48kW 11kW 19.35kW 26.6kW
Interface size Outlet φ12 φ12 φ28 φ28
Inlet φ20 φ20 φ35 φ35
Water-cooled 25℃ 2m3/h 4m3/h 6.2m3/h 10m3/h
Cooling water interface G3/4 G3/4 G1 G1 1/4

Model ZLTZ4-3
ZLTZ4-3W
ZLTZ4-6
ZLTZ4-6W
ZLTZ4-10
ZLTZ4-10W
ZLTZ4-15W
Temp Range  -40℃ ~20℃
Cooling Capacity -10℃ 5.2kW 11.15kW 18.4kW 26.3kW
-20℃ 3.47kW 7.41kW 12.3kW 18.35kW
-30℃ 2.24kW 4.81kW 7.92kW 11.8kW
-40℃ 1.36kW 2.95kW 4.7kW 5.83kW
Interface size Outlet φ12 φ12 φ16 φ22
Inlet φ22 φ22 φ35 φ35
Water-cooled 25℃ 2m3/h 4.2m3/h 5.3m3/h 6.2m3/h
Cooling water interface G3/4 G3/4 G3/4 G1
Model ZLTZ8-3
ZLTZ8-3W
ZLTZ8-6
ZLTZ8-6W
ZLTZ8-10
ZLTZ8-10W
ZLTZ8-15W
Temp Range  -80℃~ -30℃
Cooling Capacity -30℃        
-40℃ 6.9kW 14.8kW 24.4kW 36.7kW
-60℃ 3.3kW 7.1kW 12kW 17.4kW
-75℃ 1.65kW 3.55kW 6kW 8.7kW
Interface size Outlet φ12 φ12 φ16 φ22
Inlet φ22 φ22 φ35 φ35
Water-cooled 25℃ 2.7m3/h 5.3m3/h 6.68m3/h 9.3m3/h
Cooling water interface G3/4 G3/4 G1 G1 1/4

The new Circulation Chiller has no secondary heat exchange. Compared with traditional liquid cooling equipment, it reduces the heat transfer loss caused by secondary heat exchange and improves energy efficiency by more than 30%. The new direct cooler can provide a pure liquid heat exchange medium. Compared with the traditional Circulation Chiller gas-liquid two-phase mixed heat exchange medium, the new Circulation Chiller makes full use of the latent heat of the refrigerant, greatly improves the heat exchange density, and reduces the required heat exchange area, which can meet the high power density requirements of semiconductor and other industries.

ZLTZ series circulation chiller has the ability to supply liquid in multiple ways, and can accurately control the cooling capacity of each branch to meet the temperature control requirements of each branch. The new direct cooling machine adopts PT100 high-precision temperature sensor and PID intelligent control system, with extremely small temperature error range and accurate and reliable temperature control.

Feature 1

One ZLTZ circulation chiller with multiple ESC Chucks to control different temperatures


Feature 2

Applicable to high heat absorption and high uniformity temperature control applications. Under the same flow conditions, the heat transfer efficiency of heat transfer and temperature control is more than 5 times that of heat transfer oil.


Feature 3

When the Chuck is set to 200℃ constant temperature, the refrigeration system supplies cold air and the equipment can operate normally for a long time. When the cold plate is replaced, the refrigerant can be automatically recovered.



Ideal for high heat-load temperature control applications, this system delivers over 5 times the heat transfer efficiency of thermal oil heat exchange under the same flow conditions. With minimal inlet-outlet temperature differential and highly uniformemperature distribution, it is particularly suited for large-scaleheat exchange and precision temperature control.

Designed for high heat absorption and ultra-uniform temperature control applications, with automatic refrigerant recovery during coldplate replacement.

One ZLTZ temperature control unit drives multiple ESC chucks at independent temperatures.

When maintaining the chuck at constant 200°C, the refrigeration system provides continuous cooling capacity to ensure prolonged stable operation of the equipment.

thermal probe

Temperature Accuracy ±0.2℃

ultra low temperature chillers

temperature accuracy ±1℃

thermal chuck

temperature accuracy ±0.5℃

You can trust our factory

We are a very powerful chiller supplier with our own factory and more than 20 years of experience in the field of temperature control

Global service

Served more than 30,000 customers.
Exported to more than 20 countries.

Certification patents

Has obtained CE certification, SGS certification, ISO certification.

After-sales service

Provide comprehensive technical training.
With 24/7 solutions.

Professional team

Founded in 2010, with 15 years of industry experience.
20% of employees are technicians.

Quality control

Visual inspection.
Performance test.
Electrical safety test.

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