Dynamic Temperature Control Systems &#8211; Industrial Chillers Manufacturer Supplier &#8211; LNEYA

Semiconductor Test Chillers

Configuration Details

Model	MD-708	MD-712	MDL-708
Temp. Range	-75℃～225℃	-75℃～225℃	-75℃～225℃
Temperature control accuracy	±0.1℃	±0.1℃	±0.1℃
temperature uniformity	±1℃	±1℃	±1℃
Flatness	±50um	±50um	±50um
Tablet Size	200mm diameter disc	300mm diameter disc	150mm*200mm
Host and card cable	2.5m (other lengths can be customized)
Flat surface treatment	Electroplated nickel (optional gold plating)
Heat Up	-60°C to +25°C: 2 min 0°C to +25°C: 2 min +25°C to +220°C: 6 min
Cool Down	220°C to +25°C: 2 min +25°C to -60°C: 6 min
Control System	PLC controller, heating feed-forward PID fuzzy algorithm, cooling electronic expansion valve PID adjustment control cooling capacity
Display and Record	7-inch color touch screen, record temperature curve
Communication	Ethernet interface TCP/IP protocol
Refrigeration Compressors	Taikang
Power Supply	220V 50/60HZ 2.8KW	220V 50/60HZ 4.5KW	220V 50/60HZ 2.8KW
Host size mm	550×650×370	550×650×370	550×650×370

Product Description

MD’s greatest innovation in thermal testing is the series of thermally controlled chucks, which are mainly used for performance testing, modeling, process development, design defect or IC failure analysis of semiconductor wafers. It can realize rapid temperature change and precisely control the temperature. The system itself has its own refrigerator, which avoids the consumption of liquid nitrogen, carbon dioxide, etc., and each system includes a chuck and a cold and hot control unit.

The inside of the plate adopts the direct evaporation method of refrigerant, which greatly improves the heat exchange efficiency and the heat exchange power per unit area of the plate compared with the liquid cooling method.

Features:
Rapid cooling/heating rates up to 25°C/min
Built-in refrigerator to avoid the consumption of liquid nitrogen, carbon dioxide, etc. Programmable automation, temperature stability +/-0.1
Controller provides touch screen and remote interface to precisely control and monitor equipment temperature
Display test status – real-time data

Thermal Chuck MD series provides an open flat surface working platform, rapid temperature rise and fall, and constant temperature control, which can be used for testing RF devices and high-density power devices (IGBTSAND MOSFETS), and can also be used for rapid cooling of laboratory flat panels (plasma, biological products, batteries), etc.

Provide 7 * 24 free consultation and comprehensive solutions

Submit for consultation

We will reply to you within 24 hours

Email: sales@cnzlj.com

WhatsApp: 086 13912479193

YQH 0℃~-75℃

lneyaadmindy — Tue, 27 Feb 2024 07:46:10 +0000

YQH 0℃~-75℃

Waste gas condensation capture and recovery；Semiconductor exhaust gas purification

Cold-zone Pressure8 Bar
Cooling Water @25℃1300L/H~3000L/H 1BAR~4BAR
Power3kW~8kW

gas recovery Local Scrubber VOCs

Vechicle/Battery Thermal Management Systems

Product data download

manual.pdf

VOCS gas condensation capture and recovery

Suitable for the recovery of various volatile VOCs gases; Fast cooling, high efficiency, meeting different condensing temperature requirements, low temperature can reach -75 ° C

Where do harmful gases come from?

It mainly comes from the cleaning, glue leveling, glue removal, etching and development processes of chip or circuit board production.

high exhaust volume and Low emission concentration

The core process of integrated circuit manufacturing produces a large amount of acid-base, arsane, phosphine, organic and other process waste gases. A local scrubber is required for waste gas condensation capture and recovery.

Organic waste gas mainly comes from cleaning, CVD, photolithography, wet etching, degumming and diffusion processes. The types of organic waste gas mainly include isopropyl alcohol, acetone, propylene glycol monomethyl ether acetate, ethyl lactate, butyl acetate, heavy aromatics, etc.

parameter

Model	YQH-3520EXd YQH-3520Wexd	YQH-7520EXd YQH-7520WEXd	YQH-3530EXd YQH-3530WEXd	YQH-7530EXd YQH-7530WEXd
Gas flow	20m3/h	20m3/h	30m3/h	30m3/h
Lowest temperature	-35℃	-75℃	-35℃	-75℃
First level temperature	0℃	0℃	0℃	0℃
Cold box pressure	8bar	8bar	8bar	8bar
Heat exchange area	3m2*2	3m2*2	5m2*2	5m2*2
Heat exchanger material	SUS304	SUS304	SUS304	SUS304
Pressure monitoring	Anti-ice blocking pressure monitoring and protection for the inlet and outlet of the primary and secondary evaporation traps
Defrost control	Defrost control can be performed based on pressure monitoring
Air inlet diameter	DN40 PN16	DN40 PN16	DN50 PN16	DN50 PN16
Recovery liquid storage tank	10L Optional installation of recovery transfer pump		15L Optional installation of recovery transfer pump
Drain port diameter	G1/2	G1/2	G1/2	G1/2
Control System	Siemens PLC
Display and record	7-inch color touch screen
Compressor	Emerson Copeland Scroll flexible compressor (explosion-proof is epoxy resin encapsulated)
Power supply 380V 50HZ MAX	3.5KW	5KW	4KW	6KW
Size	80012001850	80012001850	100015001850	100015001850
Cooling water (water cooling)20℃	1800L/H 1BAR~4BAR G3/4		3000L/H 1BAR~4BAR G3/4

working principle

Introduce the volatile VOCS gas into the equipment cold box (the device is set to a condensation temperature of 3°C-40°C-75°C-115°C). Other temperature zones can be customized to follow the needs for step-by-step condensation and liquefaction. Some continuous production processes have a dual-channel switching process in the low-temperature section (after one side is blocked by ice, it is directly switched to the other channel for heat exchange and condensation in the cold box, and at the same time, the ice blockage is tested for defrost treatment).

Customized 25 BAR

Heat exchange system pressure resistance

-40~-75℃

Meet different temperatures

Send us a message about the Vocs Product

recommend products

INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …

MD -75℃～225℃
INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …
Temperture accuracy ±0.1℃ Flow control 12~45/min

YQH 0℃~-75℃
Temperture accuracy ±0.1℃ Flow control 12~45/min
Temperture accuracy ±0.1℃ Flow control 12~45/min

FLT-100℃~80℃ low temperature cascade
Temperture accuracy ±0.1℃ Flow control 12~45/min
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max Power range 380V 3.5kW

FLTZ -30℃~40℃ Double frequency conversion series
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max Power range 380V 3.5kW

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Battery Test Thermal Management Chamber

lneyaadmindy — Mon, 26 Feb 2024 06:08:34 +0000

KRYCH -40℃~100℃

Temp Flow Control+Test Chamber

battery pack test chamber

Environmental Chamber Provides -45°C~100°C

Large observation window allows real-time observation of test conditions in the box and timely adjustments.

Product data download

manual.pdf

Temperature control during testing of new energy vehicle components

Integrated system provides new energy power battery samples
High temperature, low temperature, flow and pressure control and other needs

Environmental chamber provides -45°C~100°C

Advantage

High heat exchange density

Small footprint

Ensure battery core temperature is low

Better uniformity

Effectively extend battery life

Improve reliability and security

Reduce maintenance costs

Parameter

Model		KRYCH-15W KRYCH-15
Temp Control		-40℃～135℃ Antifreeze	-45℃～100℃ Test chamber
Antifreeze flow control		2L/min～20L/min ±0.2L/min
Antifreeze pressure		Measure and display the inlet and outlet pressure and display the pressure on the touch screen
Test chamber volume cm		100100100 1m3
Heating Power		7.5kW Antifreeze	5kW Test chamber
Refrigeration capacity Antifreeze	135℃	7.5kW
	20℃	7.5kW
	0℃	7.5kW
	-20℃	4.5kW
	-30℃	2.5kW
	-35℃	1.8kW
Refrigeration capacity Test chamber	100℃	6kW
	-20℃	3.5kW
	-40℃	1.2kW
Antifreeze temp. control accuracy		±0.3℃
High & low tempe chamber Tempe control		±0.3℃
Circulating air inside the test chamber		3500m3/h
		When the door is opened, the internal circulation fan automatically turns off, and the door-opening status is displayed on the touch screen.
Controller		PLC controller, fuzzy PID control algorithm
Letter of agreement		Ethernet interface TCP/IP protocol
Device internal temperature feedback		Internal temperature of the equipment tank, condensation temperature of the refrigeration system, compressor suction temperature, cooling water temperature (for water cooling equipment)
Heating		Refers to the maximum heating output power of the system (according to each model) The heater has triple protection and an independent temperature limiter to ensure the safety of the heating system The heating power of 15kW uses a voltage regulator, and the heating power output control adopts 4~20mA linear control.
Cooling capacity		It refers to the ability to take away heat at different temperatures (under ideal conditions). Actual working conditions need to consider environmental heat dissipation. Please amplify appropriately and take insulation measures.
High temperature cooling module		Can cool down module from high temperature 150℃
Circulation pump flow and pressure		Using LNEYA magnetic drive pump
Source 380V50HZ		23kW max
Overall dimensions cm		125235190 excluding protruding parts, air-cooled and water-cooled have the same dimensions
Compressor		Emerson Copeland Scroll Flexible Compressor
Evaporator		Plate heat exchanger
Refrigeration accessories		Emerson/Danfoss brand filter dryers, oil separators, etc.
Throttle method		Electronic expansion valve
Operation panel		7-inch color touch screen, temperature curve display\EXCEL data export
Security		It has self-diagnosis function; phase sequence phase failure protector, refrigerator overload protection; high-voltage pressure switch, overload relay, thermal protection device and other safety protection functions.
Refrigerant		R-404A/R507C
Antifreeze interface is reserved inside the chamber		ZG3/4 and switch valve
Water coooling W		Models with W are water-cooled
Water cooled condenser		Casing heat exchanger
Cooling water 32℃		6m³/H
Shell material		Cold rolled plate spraying (standard color 7035)

Specially developed for new energy vehicle battery packs

Suitable for hot and cold shock at various temperatures

It can provide antifreeze system for high-temperature and low-temperature tests for automobile battery packs, and can also be used as a refrigeration and heating system for hot and cold shock.

The double-layer high and low temperature chamber is used as a high and low temperature testing device for power battery samples. It is currently mainly used in the new energy battery industry. It can directly complete high and low temperature charge and discharge for battery cells, modules, and PACKs in the test chamber, or store high and low temperatures. Functions such as explosion-proof pressure relief and fire protection devices are added under the conditions when the battery fails to be tested.

Upper and lower double-layer box design

Antifreeze battery cooling system included

The two-box system operates completely independently

working principle

The variable frequency pump can adjust the circulating hydraulic pressure and flow rate to achieve high-precision control of the total range from 5% to 100%.

（The output pressure and flow rate of the circulating fluid can be set on the operation panel. Even under various customer piping conditions, without bypass piping adjustment, the set output pressure can be automatically controlled by the variable frequency pump. This can reduce the power consumption of the pump.）

The refrigeration unit mainly includes refrigeration compressor, condenser, oil separator, intermediate heat exchanger, internal circulation fan of the box, dry filter, condenser, evaporator, throttling mechanism, expansion tank, electrical control, etc.

The liquid refrigerant in the evaporator of the unit exchanges with the circulating air inside the box. The temperature rises and changes from liquid to gas. It is sucked into the suction port of the compressor. The high-temperature and high-pressure refrigerant gas compressed by the compressor first passes through The oil separator separates the refrigeration oil carried during the compression process, and then enters the condenser. After exchanging heat with ambient air or cooling water, it changes from high-temperature and high-pressure gas to high-pressure and normal-temperature liquid. The high-pressure and normal-temperature refrigerant liquid passes through the dry filter and then is throttled and decompressed by the expansion valve, that is, it changes from high-pressure liquid to low-pressure liquid. Low-pressure liquid (lower boiling point) enters the evaporator of the unit, and the cooling energy is brought to the inside of the box through circulating air to achieve refrigeration.

Equipment details

Cabinet design

Display operation

Stable operation

The sales interface of the whole machine has strong adaptability, one is better than N units

Send us a message about the Battery test chamber

recommend products

INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …

MD -75℃～225℃
INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …
Temperture accuracy ±0.1℃ Flow control 12~45/min

YQH 0℃~-75℃
Temperture accuracy ±0.1℃ Flow control 12~45/min
Temperture accuracy ±0.1℃ Flow control 12~45/min

FLT-100℃~80℃ low temperature cascade
Temperture accuracy ±0.1℃ Flow control 12~45/min
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max Power range 380V 3.5kW

FLTZ -30℃~40℃ Double frequency conversion series
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max Power range 380V 3.5kW

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FLT-100℃~80℃ low temperature cascade

lneyaadmindy — Fri, 23 Feb 2024 06:25:34 +0000

FLT -100℃~80℃

The main application is to accurately control the temperature in the semiconductor production process and testing process. The heating method is within 40°C and uses compressor hot gas to heat the concentrate.

Temperture accuracy±0.1℃
Flow control12~45/min
TypeLow Temperature Cascade
Power range380V

Product data download

manual.pdf

Configuration Details

Model	FLT-803W	FLT-805W	FLT-806W	FLT-808W	FLT-810W
Temp Range	-80℃～+80℃
Temperature control accuracy	±0.1℃
Flow Control	7～25L/min		12～45L/min
	The flow control is adjusted by a frequency converter, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 6bar.
Cooling capacity@-70℃	0.6KW	1KW	1.5KW	2KW	3KW
Heating power	2KW	2KW	2KW	3.5KW	3.5KW
Internal Circulation fluid volume	4L	5L	6L	8L	10L
Expansion tank volume	10L	10L	15L	15L	20L
Thermal medium	Fluorinated liquid
Ingress and egress interface	ZG1/2	ZG1/2	ZG3/4	ZG3/4	ZG3/4
Cooling water interface	ZG3/4	ZG3/4	ZG3/4	G1	G1
Cooling Water @20℃	1.8m3/h	2.5m3/h	3m3/h	5m3/h	6m3/h
Power Supply	380V 50HZ
Breaker	25A	25A	32A	40A	50A

Model	FLT-1002W	FLT-1004W
Temp Range	-100℃～+80℃	-100℃～+80℃
Temp Accuracy	±0.1℃	±0.1℃
Flow Control	7～25L/min	12～45L/min
	The flow control is adjusted by a frequency converter, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 6bar.
Cooling Capacity@-90℃	1.5KW	3KW
Heating Power	3.5KW	5.5KW
Internal circulation fluid volume	5L	8L
Expansion tank volume	10L	15L
Thermal medium	Fluorinated liquid
Ingress and egress interface	G3/4	G3/4
Cooling water interface	G3/4	G1
Cooling water @20℃	50L/min 2bar~7bar	100L/min 2bar~7bar
Power	380V 50HZ	380V 50HZ
Breaker	32A	63A
Weight	7008001850	80012001850

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Applications

Click online message to inquire about product details

Send us a message about the FLT Chiller

recommend products

INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …

MD -75℃～225℃
INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …
Temperture accuracy ±0.1℃ Flow control 12~45/min

YQH 0℃~-75℃
Temperture accuracy ±0.1℃ Flow control 12~45/min
Temperture accuracy ±0.1℃ Flow control 12~45/min

FLT-100℃~80℃ low temperature cascade
Temperture accuracy ±0.1℃ Flow control 12~45/min
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max Power range 380V 3.5kW

FLTZ -30℃~40℃ Double frequency conversion series
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max Power range 380V 3.5kW

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FLTZ -30℃~40℃ Double frequency conversion series

lneyaadmindy — Fri, 23 Feb 2024 05:33:09 +0000

FLT Z -30℃~-40℃

Double frequency conversion series; Circulation pumps and compressors adopt frequency conversion regulation

Temperture accuracy±0.1℃
Flow control15~45/min 6bar max
Pump Pressure6Bar max
Power range380V 3.5kW Heating

Product data download

manual.pdf

Configuration Details

Model	FLTZ-305W	FLTZ-305W/2T Double System
Temp Range	-30℃~40℃	-30℃~40℃	-30℃~40℃
Temp control accuracy	±0.1℃	±0.1℃	±0.1℃
Flow Control	15～45L/min ±0.3	15～45L/min ±0.3	15～45L/min ±0.3
Pump Pressure	6bar max	6bar max	6bar max
Heating	2.5kw	2.5kw	2.5kw
Cooling capacity@15℃	11kw	11kw	11kw
Cooling capacity@-15℃	5kw 约4500rpm	5kw 约4500rpm	5kw 约4500rpm
Internal circulation fluid volume	8L	8L	8L
Expansion tank volume	15L	25L
Thermal medium	Fluorinated fluid, antifreeze, thermal silicone oil, etc.
Thermal medium interface	ZG3/4	ZG3/4	ZG3/4
Cooling water interface	ZG3/4	ZG3/4
Cooling Water	30L/min @20℃	60L/min @20℃
Power	220V 50/60HZ	220V 50/60HZ
Breaker	40A	80A
Weight	4507001600	6508501600
	Optional 3.5kw electric heating, the temperature can be extended to 90℃, the power supply needs to be changed to 380V

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Applications

Click online message to inquire about product details

Send us a message about the FLTZ series chiller

recommend products

INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …

MD -75℃～225℃
INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …
Temperture accuracy ±0.1℃ Flow control 12~45/min

YQH 0℃~-75℃
Temperture accuracy ±0.1℃ Flow control 12~45/min
Temperture accuracy ±0.1℃ Flow control 12~45/min

FLT-100℃~80℃ low temperature cascade
Temperture accuracy ±0.1℃ Flow control 12~45/min
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max Power range 380V 3.5kW

FLTZ -30℃~40℃ Double frequency conversion series
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max Power range 380V 3.5kW

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FLT -45℃~40℃

lneyaadmindy — Fri, 23 Feb 2024 05:07:30 +0000

FLT -45℃~40℃

Fluid fluorinated liquid for cooling and heating chiller

Temperture accuracy±0.1℃
Flow control25~75/min 6bar max
RefrigentR404A
Power range380V 3kW~15kW

Semiconductor Test Chillers

Product data download

manual.pdf

Configuration Details

Model	FLT-402 FLT-402W	FLT-403 FLT-403W	FLT-404 FLT-404W	FLT-406 FLT-406W	FLT-408 FLT-408W	FLT-410 FLT-410W	FLT-415 FLT-415W
Temp Control	-45℃～40℃
Temp control accuracy	±0.1℃
Flow Control	10～25L/min 5bar max		15～45L/min 6bar max			25～75L/min 6bar max
Heating	Compressor heating is used to prevent condenser frosting technology
Refrigeration Capacity @-35℃	1kw	1.4kw	1.8kw	2.5kw	3.3kw	5kw	8kw
Internal circulation fluid volume	4L	5L	6L	8L	10L	12L	20L
Expansion tank volume	10L	10L	15L	15L	20L	25L	35L
Refrigerant	R404A
Secondary Refrigerant	Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, etc.
Ingress and egress interface	G1/2	G1/2	G3/4	G3/4	G3/4	G1	G3/4
Cooling water connection	G1/2	G3/4	G3/4	G1	G1	G1	G1 1/8
Cooling water flow @20℃	1.5m³/H	2.4m³/H	3.5m³/H	5m³/H	5.5m³/H	6m³/H	8m³/H
Power 380V	3KW	4KW	6KW	7.5KW	9KW	12KW	15KW
Temperature Expansion	By adding an electric heater, it can be extended to -25℃~80℃

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Applications

Click online message to inquire about product details

Send us a message about the FLT series chiller

recommend products

INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …

MD -75℃～225℃
INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …
Temperture accuracy ±0.1℃ Flow control 12~45/min

YQH 0℃~-75℃
Temperture accuracy ±0.1℃ Flow control 12~45/min
Temperture accuracy ±0.1℃ Flow control 12~45/min

FLT-100℃~80℃ low temperature cascade
Temperture accuracy ±0.1℃ Flow control 12~45/min
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max Power range 380V 3.5kW

FLTZ -30℃~40℃ Double frequency conversion series
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max Power range 380V 3.5kW

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FLT -25℃~40℃

lneyaadmindy — Fri, 23 Feb 2024 03:56:00 +0000

FLT -25℃~-40℃

Mainly used for precise temperature control in semiconductor production and testing processes, heating within 40 ° C using a compressor hot gas heating method

Temperture accuracy±0.1℃
Flow control25~75/min 6bar max
RefrigentR404A
Power range380V 3kW~17kW

Product data download

manual.pdf

Temperature control in semiconductor production and testing processes

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Ensure stable and reliable overall semiconductor process flow from front-end to back-end

Configuration Details

Model	FLT-202 FLT-202W	FLT-203 FLT-203W	FLT-204 FLT-204W	FLT-206 FLT-206W	FLT-208 FLT-208W	FLT-210 FLT-210W	FLT-215 FLT-215W
Temp Range	-25℃～40℃
Temp Control Accuracy	±0.1℃
Flow Control	10～25L/min ±0.3		15～45L/min ±0.3			25～75L/min ±0.3
Flow Control	The flow control is adjusted by a frequency converter, and the maximum pressure of the circulation pump is 5bar.
Refrigeration @-15℃	2kw	3kw	3.8kw	6kw	7.6kw	10kw	15kw
Internal Circulation Fluid Volume	4L	5L	6L	8L	10L	12L	20L
Expansion tank volume	10L	10L	15L	15L	20L	25L	35L
refrigerant	R404A
Secondary Refrigerant	Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, etc.
Ingress and egress interface	G1/2	G1/2	G3/4	G3/4	G3/4	G1	G1
Cooling water connection	G1/2	G1/2	G3/4	G3/4	G1	G1	G1 1/8
Cooling water flow@20℃	1.2m³/H	1.6m³/H	2.6m³/H	3.6m³/H	5.5m³/H	7m³/H	10.2m³/H
Power 380V	3KW	4KW	6KW	8KW	9KW	13KW	17KW
Temp Expansion	By adding an electric heater, it can be extended to -25℃~80℃

Product Description

The semiconductor temperature control device Chiller is mainly used for precise temperature control in semiconductor production and testing processes. Its products include fluid fluorinated liquid temperature control (minimum -100 degrees), rapid temperature change of gas cooling and heating, rapid temperature change chuck, low-temperature gas refrigeration machine (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies various algorithms (PID, feedforward PID, and model free self built tree algorithm) in the system to achieve fast response and high control accuracy.

The important information such as the exhaust and suction temperature (pressure), condensation temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), electrical power, current and voltage of each component, and water tank level of the chiller are all comprehensively managed, monitored and recorded through sensors connected to the control system.

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Applications

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Send us a message about the FLT series chiller

recommend products

INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …

MD -75℃～225℃
INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …
Temperture accuracy ±0.1℃ Flow control 12~45/min

YQH 0℃~-75℃
Temperture accuracy ±0.1℃ Flow control 12~45/min
Temperture accuracy ±0.1℃ Flow control 12~45/min

FLT-100℃~80℃ low temperature cascade
Temperture accuracy ±0.1℃ Flow control 12~45/min
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max Power range 380V 3.5kW

FLTZ -30℃~40℃ Double frequency conversion series
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max Power range 380V 3.5kW

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Heat Exchange Chiller ETCU

lneyaadmindy — Fri, 23 Feb 2024 03:28:34 +0000

FLT 5℃~-40℃

Semiconductor temperature control

The main application is to accurately control the temperature in the semiconductor production process and testing process.

The heating method is within 40°C and uses compressor hot gas to heat the concentrate.

The circulation system adopts a fully sealed design, and the circulation pump adopts a magnetic drive pump.

Ammonia testing and safety testing to ensure system safety, reliability and prosperity;

After 24 hours of continuous running of the copy machine

Product data download

manual.pdf

Temperature control in semiconductor production and testing processes

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Ensure stable and reliable overall semiconductor process flow from front-end to back-end

Configuration Details

Model	ETCU-005W	ETCU-008W	ETCU-015W	ETCU-030W
Temp Range	Cooling Water Temp +5℃~90℃ ±0.3℃
Cooling Water Temp	7℃~30℃ Use Siemens/Honeywell regulating valve to control cooling water flow
Cooling Capacity	5kw	8kw	15kw	30kw
	Test conditions: At maximum circulation volume, the temperature difference between the temperature control temperature and the cooling water temperature is 15°C
Circulation pump flow	7~20L/min 5bar	7~20L/min 5bar	15~40L/min 5bar	20~60L/min 5bar
Tank volume	6L	8L	10L	15L
Size	480750390	480750390	480750390	480750500
Power	220V 50HZ/60hz 0.6kw		220V 50HZ/60hz1.3kw	220V 50HZ/60hz 1.6kw

Product Description

Application scenarios of temperature control in semiconductor process

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Applications

Send us a message about the FLT series chiller

recommend products

INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …

MD -75℃～225℃
INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …
Temperture accuracy ±0.1℃ Flow control 12~45/min

YQH 0℃~-75℃
Temperture accuracy ±0.1℃ Flow control 12~45/min
Temperture accuracy ±0.1℃ Flow control 12~45/min

FLT-100℃~80℃ low temperature cascade
Temperture accuracy ±0.1℃ Flow control 12~45/min
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max Power range 380V 3.5kW

FLTZ -30℃~40℃ Double frequency conversion series
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max Power range 380V 3.5kW

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FLT 5℃~-40℃

lneyaadmindy — Thu, 22 Feb 2024 06:38:27 +0000

FLT 5℃~-40℃

Mainly used for precise temperature control in semiconductor production and testing processes, heating within 40 ° C using a compressor hot gas heating method

Temperture accuracy±0.1℃
Flow control25~75/min 6bar max
RefrigentR404A
Power range380V 3.5kW~16kW

Chillers Direct Cooling Cryogenic Chiller Semiconductor Test Chillers

Product data download

manual.pdf

Temperature control in semiconductor production and testing processes

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Ensure stable and reliable overall semiconductor process flow from front-end to back-end

Application Process

1.Silicon wafer manufacturing 2.Deposition 3.Photolithography 4.ion implantation

5.Wafer cleaning 6.Electroplating 7.Packaging testing

Configuration Details

Model	FLT-002 FLT-002W	FLT-003 FLT-003W	FLT-004 FLT-004W	FLT-006 FLT-006W	FLT-008 FLT-008W	FLT-010 FLT-010W	FLT-015 FLT-015W
Tempearature Control	5℃～40℃
Temperature accuracy	±0.1℃
Flow control	10～25L/min 5bar max		15～45L/min 6bar max			25～75L/min 6bar max
Refrigeration capacity@10℃	6kw	8kw	10kw	15 kw	20kw	25kw	40kw
Internal circulation liquid volume	4L	5L	6L	8L	10L	12L	20L
Expansion tank capacity	10L	10L	15L	15L	20L	25L	35L
Refrigerant	R410A
Secondary Refrigerant	Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, DI, etc. (DI temperature needs to be controlled above 10 ℃)
Entry and exit interfaces	G1/2	G1/2	G3/4	G3/4	G3/4	G1	G1
Cooling water outlet	G1/2	G1/2	G3/4	G1	G1	G1	G1 1/8
Cooling water flow rate@20℃	1.5m³/h	2m³/h	2.5m³/h	4m³/h	4.5m³/h	5.6m³/h	9m³/h
power supply 380V	3.5kW	4kW	5.5kW	7kW	9.5kW	12kW	16kW
Temperature extension	By adding an electric heater, expand the temperature range from -25 ℃ to 80 ℃

Product Description

Heating method within 40 ℃ adopts compressor hot gas heating.

The chiller circulation system adopts a fully enclosed design, and the circulation pump adopts a magnetic drive pump.

Chiller 100% helium testing, 100% safety regulations testing to ensure system safety and reliability.

The chiller runs the copying machine continuously for 24 hours at 100%.

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Heating function

Due to the use of heat generated during heating, circulating heating can be achieved without the need for a heater.

Communication function

Standard equipment includes serial communication (RS232C, RS485) and contact input/output. Can communicate with customer devices or build systems.

client output signal

REQUEST A QUOTE

Send us a message about the FLT series chiller

recommend products

INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …

MD -75℃～225℃
INQUIRY Configuration Details Model MD-708 MD-712 MDL-708 Temp. Range -75℃～225℃ -75℃～225℃ -75℃～225℃ Temperature control accuracy ±0.1℃ ±0.1℃ ±0.1℃ temperature uniformity ±1℃ ±1℃ ±1℃ …
Temperture accuracy ±0.1℃ Flow control 12~45/min

YQH 0℃~-75℃
Temperture accuracy ±0.1℃ Flow control 12~45/min
Temperture accuracy ±0.1℃ Flow control 12~45/min

FLT-100℃~80℃ low temperature cascade
Temperture accuracy ±0.1℃ Flow control 12~45/min
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max Power range 380V 3.5kW

FLTZ -30℃~40℃ Double frequency conversion series
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max Power range 380V 3.5kW

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ZLJ -40℃~-15℃

lneyaadmindy — Thu, 06 Jul 2023 03:10:47 +0000

ZLJ -40℃~-15℃

Air cooled chiller for semiconductor production process

Compressor1.5hp~7hp
RefrigentR404A R507C R448
Power range380V 50HZ can choose 220V
Temperture accuracy±0.5℃

air cooled chiller semiconductor chiller