Semiconductor Test Chillers – Industrial Chillers Manufacturer Supplier – LNEYA https://www.lneya.com Air Cooling Chiller and Water Cooling Chiller Type Thu, 11 Apr 2024 07:45:26 +0000 en-US hourly 1 https://wordpress.org/?v=6.4.3 https://www.lneya.com/wp-content/uploads/2023/05/Lneya-logo-e1683777581854-150x137.png Semiconductor Test Chillers – Industrial Chillers Manufacturer Supplier – LNEYA https://www.lneya.com 32 32 MD -75℃～225℃ https://www.lneya.com/special-chiller/component-test-temp-control-systems/thermal-chuck-md.html https://www.lneya.com/special-chiller/component-test-temp-control-systems/thermal-chuck-md.html#respond Wed, 20 Mar 2024 06:05:00 +0000 https://www.lneya.com/?p=7627
MD -75℃～225℃

Thermal Chuck or Thermal Plate/Thermal Control Unit

MD -75℃～225℃
Semiconductor Test Chillers
  • Temperture accuracy±0.1℃
  • Heating Power-60°C to +25°C: 2 min 0°C to +25°C: 2 min +25°C to +220°C: 6 min
  • Cooling Power220°C to +25°C: 2 min +25°C to -60°C: 6 min
  • Source Power2.8KW
  • Flat ShapeRound/Square
chiller+chuck
INQUIRY

Configuration Details

Model

MD-708

MD-712

MDL-708

Temp. Range

-75℃～225℃

-75℃～225℃

-75℃～225℃

Temperature control accuracy

±0.1℃

±0.1℃

±0.1℃

temperature uniformity

±1℃

±1℃

±1℃

Flatness

±50um

±50um

±50um

Tablet Size

200mm diameter disc

300mm diameter disc

150mm*200mm

Host and card cable

2.5m (other lengths can be customized)

Flat surface treatment

Electroplated nickel (optional gold plating)

Heat Up

-60°C to +25°C: 2 min

0°C to +25°C: 2 min

+25°C to +220°C: 6 min

Cool Down

220°C to +25°C: 2 min

+25°C to -60°C: 6 min

Control System

PLC controller, heating feed-forward PID fuzzy algorithm, cooling electronic expansion valve PID adjustment control cooling capacity

Display and Record

7-inch color touch screen, record temperature curve

Communication

Ethernet interface TCP/IP protocol

Refrigeration Compressors

Taikang

Power Supply

220V 50/60HZ 2.8KW

220V 50/60HZ 4.5KW

220V 50/60HZ 2.8KW

Host size mm

550×650×370

550×650×370

550×650×370

Product Description

MD’s greatest innovation in thermal testing is the series of thermally controlled chucks, which are mainly used for performance testing, modeling, process development, design defect or IC failure analysis of semiconductor wafers. It can realize rapid temperature change and precisely control the temperature. The system itself has its own refrigerator, which avoids the consumption of liquid nitrogen, carbon dioxide, etc., and each system includes a chuck and a cold and hot control unit.

The inside of the plate adopts the direct evaporation method of refrigerant, which greatly improves the heat exchange efficiency and the heat exchange power per unit area of the plate compared with the liquid cooling method.


Features:
Rapid cooling/heating rates up to 25°C/min
Built-in refrigerator to avoid the consumption of liquid nitrogen, carbon dioxide, etc. Programmable automation, temperature stability +/-0.1
Controller provides touch screen and remote interface to precisely control and monitor equipment temperature
Display test status – real-time data

Thermal Chuck MD series provides an open flat surface working platform, rapid temperature rise and fall, and constant temperature control, which can be used for testing RF devices and high-density power devices (IGBTSAND MOSFETS), and can also be used for rapid cooling of laboratory flat panels (plasma, biological products, batteries), etc.

Provide 7 * 24 free consultation and comprehensive solutions

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We will reply to you within 24 hours

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Email: sales@cnzlj.com

WhatsApp: 086 13912479193

]]> https://www.lneya.com/special-chiller/component-test-temp-control-systems/thermal-chuck-md.html/feed 0 YQH 0℃~-75℃ https://www.lneya.com/special-chiller/component-test-temp-control-systems/vocs-yqh-0-75.html https://www.lneya.com/special-chiller/component-test-temp-control-systems/vocs-yqh-0-75.html#respond Tue, 27 Feb 2024 07:46:10 +0000 https://www.lneya.com/?p=7077
YQH 0℃~-75℃

YQH 0℃~-75℃

Waste gas condensation capture and recovery；Semiconductor exhaust gas purification
Semiconductor Test Chillers
  • Cold-zone Pressure8 Bar
  • Cooling Water @25℃1300L/H~3000L/H 1BAR~4BAR
  • Power3kW~8kW
gas recoveryLocal ScrubberVOCs
INQUIRY

Product data download

VOCS gas condensation capture and recovery

Suitable for the recovery of various volatile VOCs gases; Fast cooling, high efficiency, meeting different condensing temperature requirements, low temperature can reach -75 ° C

Where do harmful gases come from?

It mainly comes from the cleaning, glue leveling, glue removal, etching and development processes of chip or circuit board production.

high exhaust volume and Low emission concentration

The core process of integrated circuit manufacturing produces a large amount of acid-base, arsane, phosphine, organic and other process waste gases. A local scrubber is required for waste gas condensation capture and recovery.

Organic waste gas mainly comes from cleaning, CVD, photolithography, wet etching, degumming and diffusion processes. The types of organic waste gas mainly include isopropyl alcohol, acetone, propylene glycol monomethyl ether acetate, ethyl lactate, butyl acetate, heavy aromatics, etc.

parameter

Model

YQH-3520EXd

YQH-3520Wexd

YQH-7520EXd

YQH-7520WEXd

YQH-3530EXd

YQH-3530WEXd

YQH-7530EXd

YQH-7530WEXd

Gas flow

20m3/h

20m3/h

30m3/h

30m3/h

Lowest temperature

-35℃

-75℃

-35℃

-75℃

First level temperature

0℃

0℃

0℃

0℃

Cold box pressure

8bar

8bar

8bar

8bar

Heat exchange area

3m2*2

3m2*2

5m2*2

5m2*2

Heat exchanger material

SUS304

SUS304

SUS304

SUS304

Pressure monitoring

Anti-ice blocking pressure monitoring and protection for the inlet and outlet of the primary and secondary evaporation traps

Defrost control

Defrost control can be performed based on pressure monitoring

Air inlet diameter

DN40 PN16

DN40 PN16

DN50 PN16

DN50 PN16

Recovery liquid storage tank

10L Optional installation of recovery transfer pump

15L Optional installation of recovery transfer pump

Drain port diameter

G1/2

G1/2

G1/2

G1/2

Control System

Siemens PLC

Display and record

7-inch color touch screen

Compressor

Emerson Copeland Scroll flexible compressor (explosion-proof is epoxy resin encapsulated)

Power supply 380V 50HZ  MAX

3.5KW  

5KW

4KW

6KW

Size

800*1200*1850

800*1200*1850

1000*1500*1850

1000*1500*1850

Cooling water (water cooling)20℃

1800L/H  1BAR~4BAR  G3/4

3000L/H  1BAR~4BAR  G3/4

working principle

Introduce the volatile VOCS gas into the equipment cold box (the device is set to a condensation temperature of 3°C-40°C-75°C-115°C). Other temperature zones can be customized to follow the needs for step-by-step condensation and liquefaction. Some continuous production processes have a dual-channel switching process in the low-temperature section (after one side is blocked by ice, it is directly switched to the other channel for heat exchange and condensation in the cold box, and at the same time, the ice blockage is tested for defrost treatment).

Customized 25 BAR

Heat exchange system pressure resistance

-40~-75℃

Meet different temperatures

Send us a message about the Vocs Product
Send us a message about the Vocs Product
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]]> https://www.lneya.com/special-chiller/component-test-temp-control-systems/vocs-yqh-0-75.html/feed 0 FLT-100℃~80℃ low temperature cascade https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-low-temperature-cascade-chiller.html https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-low-temperature-cascade-chiller.html#respond Fri, 23 Feb 2024 06:25:34 +0000 https://www.lneya.com/?p=6966
FLT-100℃~80℃ low temperature cascade

FLT -100℃~80℃

The main application is to accurately control the temperature in the semiconductor production process and testing process. The heating method is within 40°C and uses compressor hot gas to heat the concentrate.
Cooling Chiller
  • Temperture accuracy±0.1℃
  • Flow control12~45/min
  • TypeLow Temperature Cascade
  • Power range380V
cooling chillersemiconductor chiller
INQUIRY

Product data download

Configuration Details

Model

FLT-803W

FLT-805W

FLT-806W

FLT-808W

FLT-810W

Temp Range

-80℃～+80℃

Temperature control accuracy

±0.1℃  

Flow Control

7～25L/min

12～45L/min

 

The flow control is adjusted by a frequency converter, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 6bar.

Cooling capacity@-70℃

0.6KW

1KW

1.5KW

2KW

3KW

Heating power

2KW

2KW

2KW

3.5KW

3.5KW

Internal Circulation fluid volume

4L

5L

6L

8L

10L

Expansion tank volume

10L

10L

15L

15L

20L

Thermal medium

Fluorinated liquid

Ingress and egress interface

ZG1/2

ZG1/2

ZG3/4

ZG3/4

ZG3/4

Cooling water interface

ZG3/4

ZG3/4

ZG3/4

G1

G1

Cooling Water @20℃

1.8m3/h

2.5m3/h

3m3/h

5m3/h

6m3/h

Power Supply

380V 50HZ

Breaker

25A

25A

32A

40A

50A

Model

FLT-1002W

FLT-1004W

Temp Range

-100℃～+80℃

-100℃～+80℃

Temp Accuracy

±0.1℃  

±0.1℃  

Flow Control 

7～25L/min

12～45L/min

 

The flow control is adjusted by a frequency converter, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 6bar.

Cooling Capacity@-90℃

1.5KW

3KW

Heating Power

3.5KW

5.5KW

Internal circulation fluid volume

5L

8L

Expansion tank volume

10L

15L

Thermal medium

Fluorinated liquid

Ingress and egress interface

G3/4

G3/4

Cooling water interface

G3/4

G1

Cooling water @20℃

50L/min 2bar~7bar

100L/min 2bar~7bar

Power

380V 50HZ

380V 50HZ

Breaker

32A

63A

Weight

700*800*1850

800*1200*1850

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Applications

Click online message to inquire about product details
Send us a message about the FLT Chiller
Send us a message about the FLT Chiller
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]]> https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-low-temperature-cascade-chiller.html/feed 0 FLTZ -30℃~40℃ Double frequency conversion series https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/fltz-chiller-double-frequency-conversion.html https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/fltz-chiller-double-frequency-conversion.html#respond Fri, 23 Feb 2024 05:33:09 +0000 https://www.lneya.com/?p=6963
FLTZ -30℃~40℃ Double frequency conversion series

FLT Z -30℃~-40℃

Double frequency conversion series; Circulation pumps and compressors adopt frequency conversion regulation
Cooling Chiller
  • Temperture accuracy±0.1℃
  • Flow control15~45/min 6bar max
  • Pump Pressure6Bar max
  • Power range380V 3.5kW Heating
cooling chillersemiconductor chiller
INQUIRY

Product data download

Configuration Details

Model

FLTZ-305W

FLTZ-305W/2T          Double System

Temp Range

-30℃~40℃

-30℃~40℃

-30℃~40℃

Temp control accuracy

±0.1℃  

±0.1℃  

±0.1℃  

Flow Control 

15～45L/min ±0.3

15～45L/min ±0.3

15～45L/min ±0.3

Pump Pressure

6bar max

6bar max

6bar max

Heating

2.5kw

2.5kw

2.5kw

Cooling capacity@15℃

11kw

11kw

11kw

Cooling capacity@-15℃

5kw   约4500rpm

5kw   约4500rpm

5kw   约4500rpm

Internal circulation fluid volume

8L

8L

8L

Expansion tank volume

15L

25L

Thermal medium

Fluorinated fluid, antifreeze, thermal silicone oil, etc.

Thermal medium interface

ZG3/4

ZG3/4

ZG3/4

Cooling water interface

ZG3/4

ZG3/4

Cooling Water

30L/min @20℃

60L/min @20℃

Power

220V 50/60HZ

220V 50/60HZ

Breaker

40A

80A

Weight

450*700*1600

650*850*1600

 

Optional 3.5kw electric heating, the temperature can be extended to 90℃, the power supply needs to be changed to 380V

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Applications

Click online message to inquire about product details
Send us a message about the FLTZ series chiller
Send us a message about the FLTZ series chiller
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]]> https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/fltz-chiller-double-frequency-conversion.html/feed 0 FLT -45℃~40℃ https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-45-chiller.html https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-45-chiller.html#respond Fri, 23 Feb 2024 05:07:30 +0000 https://www.lneya.com/?p=6954
FLT -45℃~40℃

FLT -45℃~40℃

Fluid fluorinated liquid for cooling and heating chiller
Cooling Chiller
  • Temperture accuracy±0.1℃
  • Flow control25~75/min 6bar max
  • RefrigentR404A
  • Power range380V 3kW~15kW
cooling chillersemiconductor chiller
INQUIRY

Product data download

Configuration Details

Model

FLT-402

FLT-402W

FLT-403

FLT-403W

FLT-404

FLT-404W

FLT-406

FLT-406W

FLT-408

FLT-408W

FLT-410

FLT-410W

FLT-415

FLT-415W

Temp Control

 -45℃～40℃

Temp control accuracy

±0.1℃  

Flow Control  

10～25L/min  5bar max

15～45L/min 6bar max

25～75L/min 6bar max

Heating

Compressor heating is used to prevent condenser frosting technology

Refrigeration Capacity

@-35℃

1kw

1.4kw

1.8kw

2.5kw

3.3kw

5kw

8kw

Internal circulation fluid volume

4L

5L

6L

8L

10L

12L

20L

Expansion tank volume

10L

10L

15L

15L

20L

25L

35L

Refrigerant

R404A

Secondary Refrigerant

Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, etc.

Ingress and egress interface

G1/2

G1/2

G3/4

G3/4

G3/4

G1

G3/4

Cooling water connection

G1/2

G3/4

G3/4

G1

G1

G1

G1 1/8

Cooling water flow @20℃

1.5m³/H

2.4m³/H

3.5m³/H

5m³/H

5.5m³/H

6m³/H

8m³/H

Power 380V

3KW

4KW

6KW

7.5KW

9KW

12KW

15KW

Temperature Expansion

By adding an electric heater, it can be extended to -25℃~80℃

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Applications

Click online message to inquire about product details
Send us a message about the FLT series chiller
Send us a message about the FLT series chiller
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]]> https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-45-chiller.html/feed 0 FLT -25℃~40℃ https://www.lneya.com/special-chiller/component-test-temp-control-systems/flt-25-chiller.html https://www.lneya.com/special-chiller/component-test-temp-control-systems/flt-25-chiller.html#respond Fri, 23 Feb 2024 03:56:00 +0000 https://www.lneya.com/?p=6951
FLT -25℃~40℃

FLT -25℃~-40℃

Mainly used for precise temperature control in semiconductor production and testing processes, heating within 40 ° C using a compressor hot gas heating method
Semiconductor Test Chillers
  • Temperture accuracy±0.1℃
  • Flow control25~75/min 6bar max
  • RefrigentR404A
  • Power range380V 3kW~17kW
cooling chillersemiconductor chiller
INQUIRY

Product data download

Temperature control in semiconductor production and testing processes

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Ensure stable and reliable overall semiconductor process flow from front-end to back-end

Configuration Details

Model

FLT-202

FLT-202W

FLT-203

FLT-203W

FLT-204

FLT-204W

FLT-206

FLT-206W

FLT-208

FLT-208W

FLT-210

FLT-210W

FLT-215

FLT-215W

Temp Range

-25℃～40℃

Temp Control Accuracy

±0.1℃  

Flow Control  

10～25L/min ±0.3

15～45L/min ±0.3

25～75L/min ±0.3

The flow control is adjusted by a frequency converter, and the maximum pressure of the circulation pump is 5bar.

Refrigeration

@-15℃

2kw

3kw

3.8kw

6kw

7.6kw

10kw

15kw

Internal Circulation Fluid Volume

4L

5L

6L

8L

10L

12L

20L

Expansion tank volume

10L

10L

15L

15L

20L

25L

35L

refrigerant

R404A

Secondary Refrigerant

Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, etc.

Ingress and egress interface

G1/2

G1/2

G3/4

G3/4

G3/4

G1

G1

Cooling water connection

G1/2

G1/2

G3/4

G3/4

G1

G1

G1 1/8

Cooling water flow@20℃

1.2m³/H

1.6m³/H

2.6m³/H

3.6m³/H

5.5m³/H

7m³/H

10.2m³/H

Power 380V

3KW

4KW

6KW

8KW

9KW

13KW

17KW

Temp Expansion

By adding an electric heater, it can be extended to -25℃~80℃

 

Product Description

The semiconductor temperature control device Chiller is mainly used for precise temperature control in semiconductor production and testing processes. Its products include fluid fluorinated liquid temperature control (minimum -100 degrees), rapid temperature change of gas cooling and heating, rapid temperature change chuck, low-temperature gas refrigeration machine (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies various algorithms (PID, feedforward PID, and model free self built tree algorithm) in the system to achieve fast response and high control accuracy.

The important information such as the exhaust and suction temperature (pressure), condensation temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), electrical power, current and voltage of each component, and water tank level of the chiller are all comprehensively managed, monitored and recorded through sensors connected to the control system.

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Applications

Click online message to inquire about product details
Send us a message about the FLT series chiller
Send us a message about the FLT series chiller
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]]> https://www.lneya.com/special-chiller/component-test-temp-control-systems/flt-25-chiller.html/feed 0 Heat Exchange Chiller ETCU https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/heat-exchange-chiller-etcu.html https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/heat-exchange-chiller-etcu.html#respond Fri, 23 Feb 2024 03:28:34 +0000 https://www.lneya.com/?p=6948
Heat Exchange Chiller ETCU

FLT 5℃~-40℃

Semiconductor temperature control
Cooling Chiller
cooling chillersemiconductor chiller

The main application is to accurately control the temperature in the semiconductor production process and testing process.

The heating method is within 40°C and uses compressor hot gas to heat the concentrate.

The circulation system adopts a fully sealed design, and the circulation pump adopts a magnetic drive pump.

Ammonia testing and safety testing to ensure system safety, reliability and prosperity;

After 24 hours of continuous running of the copy machine

INQUIRY

Product data download

Temperature control in semiconductor production and testing processes

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Ensure stable and reliable overall semiconductor process flow from front-end to back-end

Configuration Details

Model

ETCU-005W

ETCU-008W

ETCU-015W

ETCU-030W

Temp Range

Cooling Water Temp +5℃~90℃   ±0.3℃

Cooling Water Temp

7℃~30℃ Use Siemens/Honeywell regulating valve to control cooling water flow

Cooling Capacity

5kw

8kw

15kw

30kw

Test conditions: At maximum circulation volume, the temperature difference between the temperature control temperature and the cooling water temperature is 15°C

Circulation pump flow

7~20L/min 5bar

7~20L/min 5bar

15~40L/min 5bar

20~60L/min 5bar

Tank volume

6L

8L

10L

15L

Size

480*750*390

480*750*390

480*750*390

480*750*500

Power

220V 50HZ/60hz    0.6kw

220V 50HZ/60hz1.3kw

220V 50HZ/60hz 1.6kw

Product Description

The semiconductor temperature control device Chiller is mainly used for precise temperature control in semiconductor production and testing processes. Its products include fluid fluorinated liquid temperature control (minimum -100 degrees), rapid temperature change of gas cooling and heating, rapid temperature change chuck, low-temperature gas refrigeration machine (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies various algorithms (PID, feedforward PID, and model free self built tree algorithm) in the system to achieve fast response and high control accuracy.

The important information such as the exhaust and suction temperature (pressure), condensation temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), electrical power, current and voltage of each component, and water tank level of the chiller are all comprehensively managed, monitored and recorded through sensors connected to the control system.

Application scenarios of temperature control in semiconductor process

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Applications

Send us a message about the FLT series chiller
Send us a message about the FLT series chiller
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]]> https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/heat-exchange-chiller-etcu.html/feed 0 FLT 5℃~-40℃ https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-chillers.html https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-chillers.html#respond Thu, 22 Feb 2024 06:38:27 +0000 https://www.lneya.com/?p=6825
FLT 5℃~-40℃

FLT 5℃~-40℃

Mainly used for precise temperature control in semiconductor production and testing processes, heating within 40 ° C using a compressor hot gas heating method
Cooling Chiller
  • Temperture accuracy±0.1℃
  • Flow control25~75/min 6bar max
  • RefrigentR404A
  • Power range380V 3.5kW~16kW
cooling chillersemiconductor chiller
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Temperature control in semiconductor production and testing processes

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Ensure stable and reliable overall semiconductor process flow from front-end to back-end

Application Process

1.Silicon wafer manufacturing 2.Deposition 3.Photolithography 4.ion implantation

5.Wafer cleaning 6.Electroplating 7.Packaging testing

Configuration Details

Model

FLT-002

FLT-002W

FLT-003

FLT-003W

FLT-004

FLT-004W

FLT-006

FLT-006W

FLT-008

FLT-008W

FLT-010

FLT-010W

FLT-015

FLT-015W

Tempearature Control

 5℃～40℃

Temperature accuracy

±0.1℃  

Flow control  

10～25L/min  5bar max

15～45L/min  6bar max

25～75L/min  6bar max

Refrigeration capacity@10℃

 6kw

 8kw

 10kw

15 kw

 20kw

 25kw

 40kw

Internal circulation liquid volume

4L

5L

6L

8L

10L

12L

20L

Expansion tank capacity

10L

10L

15L

15L

20L

25L

35L

Refrigerant

R410A

Secondary Refrigerant

Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, DI, etc. (DI temperature needs to be controlled above 10 ℃)

Entry and exit interfaces

G1/2

G1/2

G3/4

G3/4

G3/4

G1

G1

Cooling water outlet

G1/2

G1/2

G3/4

G1

G1

G1

G1 1/8

Cooling water flow rate@20℃

1.5m³/h

2m³/h

2.5m³/h

4m³/h

4.5m³/h

5.6m³/h

9m³/h

power supply 380V

3.5kW

4kW

5.5kW

7kW

9.5kW

12kW

16kW

Temperature extension

By adding an electric heater, expand the temperature range from -25 ℃ to 80 ℃

Product Description

The semiconductor temperature control device Chiller is mainly used for precise temperature control in semiconductor production and testing processes. Its products include fluid fluorinated liquid temperature control (minimum -100 degrees), rapid temperature change of gas cooling and heating, rapid temperature change chuck, low-temperature gas refrigeration machine (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies various algorithms (PID, feedforward PID, and model free self built tree algorithm) in the system to achieve fast response and high control accuracy.

The important information such as the exhaust and suction temperature (pressure), condensation temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), electrical power, current and voltage of each component, and water tank level of the chiller are all comprehensively managed, monitored and recorded through sensors connected to the control system.

Heating method within 40 ℃ adopts compressor hot gas heating.

The chiller circulation system adopts a fully enclosed design, and the circulation pump adopts a magnetic drive pump.

Chiller 100% helium testing, 100% safety regulations testing to ensure system safety and reliability.

The chiller runs the copying machine continuously for 24 hours at 100%.

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Heating function

Due to the use of heat generated during heating, circulating heating can be achieved without the need for a heater.

Communication function

Standard equipment includes serial communication (RS232C, RS485) and contact input/output. Can communicate with customer devices or build systems.

client output signal

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]]> https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-chillers.html/feed 0 ZLJ -40℃~-15℃ https://www.lneya.com/industrial-chiller/direct-cooling-zlj-40-15.html https://www.lneya.com/industrial-chiller/direct-cooling-zlj-40-15.html#respond Thu, 06 Jul 2023 03:10:47 +0000 https://www.lneya.com/?p=6798
ZLJ -40℃~-15℃

ZLJ -40℃~-15℃

Air cooled chiller for semiconductor production process
Chillers Direct Cooling Cryogenic Chiller Semiconductor Test Chillers
  • Compressor1.5hp~7hp
  • RefrigentR404A R507C R448
  • Power range380V 50HZ can choose 220V
  • Temperture accuracy±0.5℃
air cooled chillersemiconductor chiller
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Product data download

Temperature control in semiconductor production and testing processes

CHILLER direct cooling type

Multiple control requirements can be achieved by merging multiple devices into a larger cabinet

Used for small heat exchange area and large heat exchange capacity

Configuration Details

Model ZLJ-41.0 ZLJ-41.5 ZLJ-42 ZLJ-43 ZLJ-44 ZLJ-46 ZLJ-48
ZLJ-41.0W ZLJ-41.5W ZLJ-42W ZLJ-43W ZLJ-44W ZLJ-46W ZLJ-48W
Temperature range  -40℃～-10℃
Temperature control accuracy ±0.5℃ control evaporation temperature
Throttling method Electronic expansion valve
Controller Siemens PLC
Show record 7-inch touch screen, record temperature, system pressure and other information
Main components Danfoss filter drier, Castor solenoid valve, Johnson Controls pressure sensor, EBM fan (air-cooled), Danfoss/Emerson oil separator,
Compressor Secop, Taikang, Emerson, Carlisle
Refrigerant R404A Optional R507C R448
High temperature cooling With 150 degrees high temperature direct cooling technology, to meet the goal of rapid cooling ability during high temperature operation
Compressor 7/8HP 1.5HP 2HP 3HP 4HP 6HP 8HP
Power supply V 220V 50HZ 380V 50HZ Can be customized 220V

Product Description

Equipped with direct cooling technology at a high temperature of 150℃, meeting the target of rapid cooling ability during high-temperature operation

The product directly outputs and evaporates the refrigerant in the refrigeration system into the target control element (heat exchanger) for heat exchange, thereby cooling the target control object. Compared with the fluid (gas) transported into the heat exchanger, the heat exchange capacity is generally more than 5 times higher, which is especially suitable for applications where the heat exchange area of the heat exchanger is small but the heat exchange capacity is large.

The direct-cooling refrigerator can also be used as gas capture, the refrigerant is directly passed into the trap to evaporate, and the gas in the space is quickly captured through the condensation effect on the surface of the trap.

appearance

1.Refrigerant interface 2. Portable handle

3. Touch screen 4. Portable handle

5. Touch screen card slot 6. Air outlet

Security protection

Using Schneider and other brands of residual current circuit breakers, phase sequence phase breakers, liquid level protectors, high and low voltage protectors, and high temperature protectors

Data communication interface

Standard configuration includes one PT100, USB interface, and RS485 communication interface. Various other analog interfaces and contact signals can be selected, as well as Ethernet interface

Application Process

Widely applicable to etching, chemical vapor deposition, and physical vapor deposition processes in semiconductor wafer factories

Wafer etching

Chemical vapor deposition

Physical vapor deposition

ETCH

CVD

PVD

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]]> https://www.lneya.com/industrial-chiller/direct-cooling-zlj-40-15.html/feed 0 LTS -20℃~80℃ https://www.lneya.com/special-chiller/lts-20-80.html https://www.lneya.com/special-chiller/lts-20-80.html#respond Wed, 17 May 2023 07:57:33 +0000 https://www.lneya.com/special-chiller/lts-20-80.html
LTS -20℃~80℃

LTS -20℃~80℃ Fluoride cooling and heating system

Temperature control during semiconductor manufacturing
  • Flow control12L/min~45L/min
  • Internal circulating liquid4L~10L
  • Expansion tank10L~20L
  • Place of OriginChina
dynamic temperature control systemFluorinated liquid temperature controlLTS seriessemiconductor test chiller
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Product data download

Parameters Detailed

ModelLTS-202LTS-203LTS-204LTS-206LTS-208
LTS-202WLTS-203WLTS-204WLTS-206WLTS-208W
Temperature range -20℃～35℃
Temperature control accuracy±0.1℃  at  -20℃～0℃
Flow control 7～25L/min12～45L/min
The flow control adopts frequency converter adjustment, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 5bar.
Internal circulating fluid volume4L5L6L8L10L
Expansion tank volume10L10L15L15L20L
System pressure displayThe pressure of the refrigeration system is realized by a pointer pressure gauge (high pressure, low pressure)
The pressure acquisition outlet position of the circulatory system is detected by a pressure sensor and displayed on the touch screen
ControllerSPLC, fuzzy PID control algorithm, with cascade control algorithm
Temperature controlHeat transfer medium outlet temperature control mode
External temperature sensor: (PT100 or 4～20mA or communication setting) control mode (cascade control)
Letter of agreementEthernet interface TCP/IP protocol
RS485 interface modbus RTU protocol
Internal temperature feedback of equipmentEquipment heat transfer medium outlet temperature, medium inlet temperature, refrigeration system condensation temperature, ambient temperature, compressor suction temperature, cooling water temperature (available for water-cooled equipment)
Closed circulation systemThe whole system is a fully enclosed system, low temperature does not absorb moisture in the air, does not volatilize the heat transfer medium, and the low temperature automatically supplements the heat transfer medium into the circulation system
CompressorEmerson Copeland/Danfoss Scroll Flexible Compressor
Circulating pumpMagnetic circulation pump
EvaporatorPlate heat exchanger
CondenserMicro channel condenser (air-cooled)
Plate heat exchanger (water-cooled), special attention: clean factory water is required
Refrigeration accessoriesDanfoss/Emerson accessories (filter drier, oil separator, high and low pressure protector, expansion valve)
Operation panelLNEYA customized 7-inch color touch screen, temperature curve display\EXCEL data export
SecurityWith self-diagnosis function; phase sequence open-phase protector, refrigerating machine overload protection; high-pressure pressure switch, overload relay, thermal protection device and other security functions.
In and out interface sizeZG1/2ZG1/2ZG3/4ZG3/4ZG3/4

Product Description

It is widely used in the semiconductor manufacturing process to control the temperature of the reaction chamber, the temperature of the heat sink, and the temperature control of the non-flammable fluid of the heat transfer medium.

1. The pressure holding test of the medium circulation system is 7 bar.
2. Use high-quality magnetic pump without mechanical shaft seal.
3. Optimize temperature sampling and response speed, specially design control algorithm, can respond quickly to stable temperature control.
4. Enhance the design of the circulating pump capacity to meet the high-lift requirements of the system.
5. Continuous high-temperature cooling technology meets the requirements for stable operation when heat is loaded on the heat sink plate and requires cooling and heating constant temperature control.
6. In view of the volatile characteristics of fluorinated liquid, the joint design and system sealing design are strengthened to ensure the service life of the medium.




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