Cooling Chiller – Industrial Chillers Manufacturer Supplier – LNEYA https://www.lneya.com Air Cooling Chiller and Water Cooling Chiller Type Thu, 11 Apr 2024 07:45:26 +0000 en-US hourly 1 https://wordpress.org/?v=6.4.3 https://www.lneya.com/wp-content/uploads/2023/05/Lneya-logo-e1683777581854-150x137.png Cooling Chiller – Industrial Chillers Manufacturer Supplier – LNEYA https://www.lneya.com 32 32 FLT-100℃~80℃ low temperature cascade https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-low-temperature-cascade-chiller.html https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-low-temperature-cascade-chiller.html#respond Fri, 23 Feb 2024 06:25:34 +0000 https://www.lneya.com/?p=6966
FLT-100℃~80℃ low temperature cascade

FLT -100℃~80℃

The main application is to accurately control the temperature in the semiconductor production process and testing process. The heating method is within 40°C and uses compressor hot gas to heat the concentrate.
Cooling Chiller
  • Temperture accuracy±0.1℃
  • Flow control12~45/min
  • TypeLow Temperature Cascade
  • Power range380V
cooling chillersemiconductor chiller
INQUIRY

Product data download

Configuration Details

Model

FLT-803W

FLT-805W

FLT-806W

FLT-808W

FLT-810W

Temp Range

-80℃～+80℃

Temperature control accuracy

±0.1℃  

Flow Control

7～25L/min

12～45L/min

 

The flow control is adjusted by a frequency converter, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 6bar.

Cooling capacity@-70℃

0.6KW

1KW

1.5KW

2KW

3KW

Heating power

2KW

2KW

2KW

3.5KW

3.5KW

Internal Circulation fluid volume

4L

5L

6L

8L

10L

Expansion tank volume

10L

10L

15L

15L

20L

Thermal medium

Fluorinated liquid

Ingress and egress interface

ZG1/2

ZG1/2

ZG3/4

ZG3/4

ZG3/4

Cooling water interface

ZG3/4

ZG3/4

ZG3/4

G1

G1

Cooling Water @20℃

1.8m3/h

2.5m3/h

3m3/h

5m3/h

6m3/h

Power Supply

380V 50HZ

Breaker

25A

25A

32A

40A

50A

Model

FLT-1002W

FLT-1004W

Temp Range

-100℃～+80℃

-100℃～+80℃

Temp Accuracy

±0.1℃  

±0.1℃  

Flow Control 

7～25L/min

12～45L/min

 

The flow control is adjusted by a frequency converter, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 6bar.

Cooling Capacity@-90℃

1.5KW

3KW

Heating Power

3.5KW

5.5KW

Internal circulation fluid volume

5L

8L

Expansion tank volume

10L

15L

Thermal medium

Fluorinated liquid

Ingress and egress interface

G3/4

G3/4

Cooling water interface

G3/4

G1

Cooling water @20℃

50L/min 2bar~7bar

100L/min 2bar~7bar

Power

380V 50HZ

380V 50HZ

Breaker

32A

63A

Weight

700*800*1850

800*1200*1850

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Applications

Click online message to inquire about product details
Send us a message about the FLT Chiller
Send us a message about the FLT Chiller
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]]> https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-low-temperature-cascade-chiller.html/feed 0 FLTZ -30℃~40℃ Double frequency conversion series https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/fltz-chiller-double-frequency-conversion.html https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/fltz-chiller-double-frequency-conversion.html#respond Fri, 23 Feb 2024 05:33:09 +0000 https://www.lneya.com/?p=6963
FLTZ -30℃~40℃ Double frequency conversion series

FLT Z -30℃~-40℃

Double frequency conversion series; Circulation pumps and compressors adopt frequency conversion regulation
Cooling Chiller
  • Temperture accuracy±0.1℃
  • Flow control15~45/min 6bar max
  • Pump Pressure6Bar max
  • Power range380V 3.5kW Heating
cooling chillersemiconductor chiller
INQUIRY

Product data download

Configuration Details

Model

FLTZ-305W

FLTZ-305W/2T          Double System

Temp Range

-30℃~40℃

-30℃~40℃

-30℃~40℃

Temp control accuracy

±0.1℃  

±0.1℃  

±0.1℃  

Flow Control 

15～45L/min ±0.3

15～45L/min ±0.3

15～45L/min ±0.3

Pump Pressure

6bar max

6bar max

6bar max

Heating

2.5kw

2.5kw

2.5kw

Cooling capacity@15℃

11kw

11kw

11kw

Cooling capacity@-15℃

5kw   约4500rpm

5kw   约4500rpm

5kw   约4500rpm

Internal circulation fluid volume

8L

8L

8L

Expansion tank volume

15L

25L

Thermal medium

Fluorinated fluid, antifreeze, thermal silicone oil, etc.

Thermal medium interface

ZG3/4

ZG3/4

ZG3/4

Cooling water interface

ZG3/4

ZG3/4

Cooling Water

30L/min @20℃

60L/min @20℃

Power

220V 50/60HZ

220V 50/60HZ

Breaker

40A

80A

Weight

450*700*1600

650*850*1600

 

Optional 3.5kw electric heating, the temperature can be extended to 90℃, the power supply needs to be changed to 380V

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Applications

Click online message to inquire about product details
Send us a message about the FLTZ series chiller
Send us a message about the FLTZ series chiller
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]]> https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/fltz-chiller-double-frequency-conversion.html/feed 0 FLT -45℃~40℃ https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-45-chiller.html https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-45-chiller.html#respond Fri, 23 Feb 2024 05:07:30 +0000 https://www.lneya.com/?p=6954
FLT -45℃~40℃

FLT -45℃~40℃

Fluid fluorinated liquid for cooling and heating chiller
Cooling Chiller
  • Temperture accuracy±0.1℃
  • Flow control25~75/min 6bar max
  • RefrigentR404A
  • Power range380V 3kW~15kW
cooling chillersemiconductor chiller
INQUIRY

Product data download

Configuration Details

Model

FLT-402

FLT-402W

FLT-403

FLT-403W

FLT-404

FLT-404W

FLT-406

FLT-406W

FLT-408

FLT-408W

FLT-410

FLT-410W

FLT-415

FLT-415W

Temp Control

 -45℃～40℃

Temp control accuracy

±0.1℃  

Flow Control  

10～25L/min  5bar max

15～45L/min 6bar max

25～75L/min 6bar max

Heating

Compressor heating is used to prevent condenser frosting technology

Refrigeration Capacity

@-35℃

1kw

1.4kw

1.8kw

2.5kw

3.3kw

5kw

8kw

Internal circulation fluid volume

4L

5L

6L

8L

10L

12L

20L

Expansion tank volume

10L

10L

15L

15L

20L

25L

35L

Refrigerant

R404A

Secondary Refrigerant

Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, etc.

Ingress and egress interface

G1/2

G1/2

G3/4

G3/4

G3/4

G1

G3/4

Cooling water connection

G1/2

G3/4

G3/4

G1

G1

G1

G1 1/8

Cooling water flow @20℃

1.5m³/H

2.4m³/H

3.5m³/H

5m³/H

5.5m³/H

6m³/H

8m³/H

Power 380V

3KW

4KW

6KW

7.5KW

9KW

12KW

15KW

Temperature Expansion

By adding an electric heater, it can be extended to -25℃~80℃

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Applications

Click online message to inquire about product details
Send us a message about the FLT series chiller
Send us a message about the FLT series chiller
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]]> https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-45-chiller.html/feed 0 Heat Exchange Chiller ETCU https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/heat-exchange-chiller-etcu.html https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/heat-exchange-chiller-etcu.html#respond Fri, 23 Feb 2024 03:28:34 +0000 https://www.lneya.com/?p=6948
Heat Exchange Chiller ETCU

FLT 5℃~-40℃

Semiconductor temperature control
Cooling Chiller
cooling chillersemiconductor chiller

The main application is to accurately control the temperature in the semiconductor production process and testing process.

The heating method is within 40°C and uses compressor hot gas to heat the concentrate.

The circulation system adopts a fully sealed design, and the circulation pump adopts a magnetic drive pump.

Ammonia testing and safety testing to ensure system safety, reliability and prosperity;

After 24 hours of continuous running of the copy machine

INQUIRY

Product data download

Temperature control in semiconductor production and testing processes

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Ensure stable and reliable overall semiconductor process flow from front-end to back-end

Configuration Details

Model

ETCU-005W

ETCU-008W

ETCU-015W

ETCU-030W

Temp Range

Cooling Water Temp +5℃~90℃   ±0.3℃

Cooling Water Temp

7℃~30℃ Use Siemens/Honeywell regulating valve to control cooling water flow

Cooling Capacity

5kw

8kw

15kw

30kw

Test conditions: At maximum circulation volume, the temperature difference between the temperature control temperature and the cooling water temperature is 15°C

Circulation pump flow

7~20L/min 5bar

7~20L/min 5bar

15~40L/min 5bar

20~60L/min 5bar

Tank volume

6L

8L

10L

15L

Size

480*750*390

480*750*390

480*750*390

480*750*500

Power

220V 50HZ/60hz    0.6kw

220V 50HZ/60hz1.3kw

220V 50HZ/60hz 1.6kw

Product Description

The semiconductor temperature control device Chiller is mainly used for precise temperature control in semiconductor production and testing processes. Its products include fluid fluorinated liquid temperature control (minimum -100 degrees), rapid temperature change of gas cooling and heating, rapid temperature change chuck, low-temperature gas refrigeration machine (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies various algorithms (PID, feedforward PID, and model free self built tree algorithm) in the system to achieve fast response and high control accuracy.

The important information such as the exhaust and suction temperature (pressure), condensation temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), electrical power, current and voltage of each component, and water tank level of the chiller are all comprehensively managed, monitored and recorded through sensors connected to the control system.

Application scenarios of temperature control in semiconductor process

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Applications

Send us a message about the FLT series chiller
Send us a message about the FLT series chiller
*
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]]> https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/heat-exchange-chiller-etcu.html/feed 0 FLT 5℃~-40℃ https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-chillers.html https://www.lneya.com/special-chiller/component-test-temp-control-systems/cooling-chiller-flt/flt-chillers.html#respond Thu, 22 Feb 2024 06:38:27 +0000 https://www.lneya.com/?p=6825
FLT 5℃~-40℃

FLT 5℃~-40℃

Mainly used for precise temperature control in semiconductor production and testing processes, heating within 40 ° C using a compressor hot gas heating method
Cooling Chiller
  • Temperture accuracy±0.1℃
  • Flow control25~75/min 6bar max
  • RefrigentR404A
  • Power range380V 3.5kW~16kW
cooling chillersemiconductor chiller
INQUIRY

Product data download

Temperature control in semiconductor production and testing processes

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Ensure stable and reliable overall semiconductor process flow from front-end to back-end

Application Process

1.Silicon wafer manufacturing 2.Deposition 3.Photolithography 4.ion implantation

5.Wafer cleaning 6.Electroplating 7.Packaging testing

Configuration Details

Model

FLT-002

FLT-002W

FLT-003

FLT-003W

FLT-004

FLT-004W

FLT-006

FLT-006W

FLT-008

FLT-008W

FLT-010

FLT-010W

FLT-015

FLT-015W

Tempearature Control

 5℃～40℃

Temperature accuracy

±0.1℃  

Flow control  

10～25L/min  5bar max

15～45L/min  6bar max

25～75L/min  6bar max

Refrigeration capacity@10℃

 6kw

 8kw

 10kw

15 kw

 20kw

 25kw

 40kw

Internal circulation liquid volume

4L

5L

6L

8L

10L

12L

20L

Expansion tank capacity

10L

10L

15L

15L

20L

25L

35L

Refrigerant

R410A

Secondary Refrigerant

Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, DI, etc. (DI temperature needs to be controlled above 10 ℃)

Entry and exit interfaces

G1/2

G1/2

G3/4

G3/4

G3/4

G1

G1

Cooling water outlet

G1/2

G1/2

G3/4

G1

G1

G1

G1 1/8

Cooling water flow rate@20℃

1.5m³/h

2m³/h

2.5m³/h

4m³/h

4.5m³/h

5.6m³/h

9m³/h

power supply 380V

3.5kW

4kW

5.5kW

7kW

9.5kW

12kW

16kW

Temperature extension

By adding an electric heater, expand the temperature range from -25 ℃ to 80 ℃

Product Description

The semiconductor temperature control device Chiller is mainly used for precise temperature control in semiconductor production and testing processes. Its products include fluid fluorinated liquid temperature control (minimum -100 degrees), rapid temperature change of gas cooling and heating, rapid temperature change chuck, low-temperature gas refrigeration machine (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies various algorithms (PID, feedforward PID, and model free self built tree algorithm) in the system to achieve fast response and high control accuracy.

The important information such as the exhaust and suction temperature (pressure), condensation temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), electrical power, current and voltage of each component, and water tank level of the chiller are all comprehensively managed, monitored and recorded through sensors connected to the control system.

Heating method within 40 ℃ adopts compressor hot gas heating.

The chiller circulation system adopts a fully enclosed design, and the circulation pump adopts a magnetic drive pump.

Chiller 100% helium testing, 100% safety regulations testing to ensure system safety and reliability.

The chiller runs the copying machine continuously for 24 hours at 100%.

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Heating function

Due to the use of heat generated during heating, circulating heating can be achieved without the need for a heater.

Communication function

Standard equipment includes serial communication (RS232C, RS485) and contact input/output. Can communicate with customer devices or build systems.

client output signal

REQUEST A QUOTE

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Send us a message about the FLT series chiller
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