Semiconductor Chillers

The semiconductor temperature control device Chiller is mainly used for precise temperature control in semiconductor production and testing processes.

Its products include fluid fluorinated liquid temperature control (minimum -100 ° C), rapid temperature change of gas cooling and heating, rapid temperature change chuck, low-temperature gas refrigeration machine (-120 ° C), direct cooling refrigeration unit (-150 ° C), etc. The company applies various algorithms (PID, feedforward PID, and model free self building tree algorithm) in the system to achieve fast response and high control accuracy.