en_USEnglish
French
French
German
German
Italian
Italian
Russian
Russian
Korean
Korean
Japanese
Japanese
Spanish
Spanish
Portuguese
Portuguese
Chinese
Chinese

Search the whole station

Peltier Chiller

TEC -20℃~90℃

TEMPERATURE ACCURACY ±0.1℃

Provide reliable and precise temperature control for wafer etching process

Send us about your inquiry
Dew point temperature

≤30℃


Power supply voltage

AC208V-DC250V
three-phase voltage


CDA activation temperature

＜30℃



LNEYA Peltier chiller thermoelectric cooler temperature range from -20 to 90℃, tailor-made for the semiconductor industry;
Based on the proven Peltier heat conduction principle, the Peltier temperature control system can provide repeatable temperature control for plasma etching applications; dynamic temperature control of the electrostatic chuck (ESC) enables it to be applied to all types of etching processes.

TEC SERIES

-20°C

lowest

90°C

Highest

±0.1°C

Temperature control accuracy


Model TEC-1200W TEC-2500W TEC-4500W
Temp. Range -20℃~90℃ -20℃~90℃ -20℃~90℃
Cooling Capacity 20℃ 1200w 2450w 4500w
10℃ 900w 1925w 3500w
0℃ 600w 1400w 2600w
 -10℃ 350w 875w 1600w
 -20℃ 80w 350w 700w
Heating Power ＞3000w ＞6000w ＞12000w
Pump type DC magnetic pump DC magnetic pump DC magnetic pump
Pressure（bar） ≤4 ≤4 ≤4
Flow 15L/min at 2bar 15L/min at 2bar 15L/min at 2bar
Fluid Galden HT135 Galden HT135 Galden HT135
Cooling Water Temp DI＜20℃ DI＜20℃ DI＜20℃
Cooling Water Flow ≤12L/min ≤20L/min ≤32L/min
Pressure 0.5-0.8bar 0.5-0.8bar 0.5-0.8bar
Flow 2-3m³/h 2-3m³/h 2-3m³/h

Working principle

1.Chuck wafer carrier
2.Circulation pump
3.Controller
4.Thermoelectric heat exchange module
5.Power module
6.Cooling water inlet
7.Cooling water outlet

This on-site temperature control solution significantly improves process uniformity between wafer batches and between chambers.
How it works: Real-time monitoring of the chamber’s reflow wave body temperature is used to dynamically adjust the supply temperature to compensate for changes in heat load during the process.
*On-site temperature control system
*Fast ramp rates significantly improve chamber throughput
*Compressor-free point-of-use system reduces energy consumption by approximately 50%

PELTIER CHILLER FEATURES

They operate completely without refrigerant and require very little maintenance.
Improve the stability of Wafer-Wafer
Modular components make maintenance more convenient; use of perfluorinated liquid.
When heating and direct cooling, the hot and cold parts are not in direct contact with the thermal fluid;
Temperature drift protection function makes the etching profile more stable;
High reliability and low cost of use; small industrial space occupancy; extremely low thermal fluid filling volume;
Low energy consumption, no compressor and refrigerant system, and output only when there is load, greatly reducing energy consumption.

ALL Semiconductor chillers model

FLTZ 5℃~90℃
Process Chillers

Cooling capacity 6kW~40kW
Cooling water flow 1.5m³/h~9m³/h
Temp accuracy ±0.05℃

Learn more

FLTZ -25℃～90℃
Thermal Chillers

Cooling capacity 2kW~15kW
Cooling water flow 1.2m³/h~10.2m³/h
Temp accuracy ±0.05℃

Learn more

FLTZ -45℃～90℃
Low Temperature Chillers

Cooling capacity 1kW~8kW
Cooling water flow 1.5m³/h~8m³/h
Temp accuracy ±0.05℃

Learn more

FLTZ -80℃～+90℃
Recirculating Water Chillers

Cooling capacity 0.6kW~3kW
Cooling water flow 1.8m³/h~6m³/h
Temp accuracy ±0.05℃

Learn more

FLTZ -100℃～+90℃
Recirculation Chiller

Cooling capacity 1.5kW~3kW
Cooling water flow 50L/min~100L/min 2bar~7bar
Temp accuracy ±0.05℃

Leran more

You can trust our Peltier chiller factory

We are a very powerful chiller supplier with our own factory and more than 20 years of experience in the field of temperature control

Global service

Served more than 30,000 customers.
Exported to more than 20 countries.

Certification patents

Has obtained CE certification, SGS certification, ISO certification.

After-sales service

Provide comprehensive technical training.
With 24/7 solutions.

Professional team

Founded in 2010, with 15 years of industry experience.
20% of employees are technicians.

Quality control

Visual inspection.
Performance test.
Electrical safety test.

FAQ

Peltier chiller fast and precise temperature control, able to meet any demanding process requirements

There are 3 models of Peltier chillers in our LNEYA TEC series, all of which are water-cooled.

Yes. We accept customization. Deionized water is used as cooling water, and the water temperature is less than 20℃

As an external energy-saving temperature control unit in the semiconductor testing industry. Thermoelectric cooler TEC consists of a Peltier module, a radiator, a water cooling head, a water pump, a water tank and a power supply.

Contact LNEYA

Submit your request to us and we will contact you within 24 hours

*
*
Submitting….
Submitted successfully!
Submission failed! Please try again later
Email error!
Phone error!

Add our account manager via the QR code below

WeChat/Phone

86 18914253067

WhatsApp

+86 18914253067

Email Address

market@lneya.com