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Recirculating Water Chillers

FLTZ -80℃~90℃

Have strong cooling capacity, wide temperature control range and precise temperature control accuracy (±0.05℃), and are designed for semiconductor, aerospace and other applications.

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fltz series

-80°C

più basso

90°C

Il più alto

±0.05°C

Precisione del controllo della temperatura

have unparalleled advantages in low-temperature refrigeration applications.

Contact LNEYA sales engineer for catalog or price.


Modello FLTZ-803W~810W
Intervallo di temperatura  -80℃～+90℃
Precisione del controllo della temperatura ±0,05℃（Temperatura di uscita a stato stazionario）
Controllo del flusso 7～45L/min 6bar max
Cooling capacityat-70℃ 0.6kW~3kW
Capacità di riscaldamento 2kW~3.5kW
Internal circulating fluid volume 4L~10L
Volume del vaso di espansione 10L~20L
Heat-conduction medium Liquido fluorurato
Cooling water@20℃ 1.8m3/h~6m3/h
Dimensioni cm 550*700*1750~800*1200*1850

The recirculating water chiller system is a fully closed circulation system. It does not absorb moisture in the air at low temperatures, and does not volatilize heat transfer media or produce oil mist at high temperatures.


Compressor hot gas heating within -40 degrees Celsius
Variable frequency pump adjusts circulating fluid pressure and flow.




LNEYA has been focusing on low-temperature chillers for 15 years. Refrigeration below -60℃ is our advantageous temperature range. If you need, we can do -150℃
to meet your various application needs.


The key to ensuring high precision and high efficiency

Applicazioni

FLTZ -80℃~90℃
recirculating water chillers are often used in the front-end and back-end processes of semiconductors due to their excellent cooling capacity.

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Lon implantation

Lon implantation is an important process in semiconductor manufacturing for adjusting the electrical properties of materials. This process requires strict temperature control to ensure the depth and distribution accuracy of ion implantation. FLTZ -80℃~90℃ recirculating water chillers can provide a stable temperature environment to improve implantation accuracy.

Wafer temperature control

Wafers need to be kept in a specific temperature range during the lithography and etching processes. FLTZ -80℃~90℃
recirculating water chillers can provide a stable low or high temperature environment to avoid temperature fluctuations affecting process effects.

Thermal cycle test

Semiconductor components will experience extreme temperature differences in actual use, so their reliability needs to be tested through thermal cycle tests.Recirculating water chillers can provide a temperature range of -80℃ to 90℃, simulating temperature fluctuations in actual working environments and testing the temperature resistance and stability of semiconductor components.

Other models for semiconductor industry

Thermal chillers

Temp range 5~90℃

Temp accuracy ±0.05℃

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Process chillers

Temp range -25~90℃

Temp accuracy ±0.05℃

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Low temperature chillers

Temp range -45~90℃

Temp accuracy ±0.05℃

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Recirculation chillers

Temp range -100~90℃

Temp accuracy ±0.05℃

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You can trust our Semiconductor chiller factory

General chillers use silicone oil, ethylene glycol aqueous solution, ethanol, DI, etc. as heat transfer media, while FLTZ -80℃~90℃ circulating water chillers use fluorinated liquid. This is because fluorinated liquid evaporates faster and is non-flammable, has better cooling effect and higher safety, and is often used for semiconductor process cooling.

Servizio globale

Ha servito più di 30.000 clienti.
Esportato in più di 20 paesi.

Brevetti di certificazione

Ha ottenuto la certificazione CE, la certificazione SGS e la certificazione ISO.

Servizio post-vendita

Fornire una formazione tecnica completa.
Con soluzioni 24/7.

Team di professionisti

Fondata nel 2010, con 15 anni di esperienza nel settore.
20% dei dipendenti sono tecnici.

Controllo qualità

Ispezione visiva.
Test di prestazione.
Test di sicurezza elettrica.

Get in touch with our Recirculating Water chiller experts

Due to the cooling temperature of the FLTZ -80 ℃~90 ℃ circulating water-cooled chiller being as low as -80 ℃, in order to ensure that you can use it even in hot environments, we have adopted a water-cooled condenser.

Generally, chillers use silicone oil, ethylene glycol aqueous solution, ethanol, DI, and other heat transfer media, while FLTZ -80 ℃~90 ℃ circulating water chillers use fluorinated liquid. This is because fluorinated liquid evaporates faster, is non flammable, has better cooling effect and higher safety, and is commonly used for semiconductor process cooling.

It has a wide temperature range and can easily achieve cooling from -80 ℃ to 90 ℃. Using this water-cooled chiller not only requires no equipment replacement, but also no medium replacement. By combining the model free self building algorithm with the cascade algorithm, it is possible to accurately control the temperature of remote targets and achieve rapid cooling. Send us an email directly to sales@cnzlj.com

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