Wuxi Guanya Refrigeration Technology co., ltd
Semiconductor Chiller

Semiconductor Chiller

  • Semiconductor Chiller
  • 半导体循环器1.jpg
  • 半导体循环器3.jpg
  • 半导体循环器2.jpg
Semiconductor Chiller


  • Product Description
  • System Introduce
Temperature control range -5 ° C to 85 ° C, the temperature of the thermal fluid can be adjusted, the temperature control accuracy is high, the accuracy is ± 0.3 ° C.

The device uses international brand accessories and has stable performance and can work continuously for 24 hours. The product can be applied to cooling of a heat generating portion of a semiconductor manufacturing apparatus, cooling of a heat generating portion of the laser device, analysis of a heat generating portion of the detecting device, and the like.

Some models are specially upgraded, not only for cooling, but also for heating. The temperature control range can reach -5°C to 85°C, which improves the performance of precision cooling water circulation equipment and expands the application range of the equipment.

Model

LL-0250SS

LL-0500SS

LL-1000SS

Temperature Range

-5℃~+85℃

-5℃~+85℃

-5℃~+85℃

Temperature Control Prcision

±0.3℃

±0.3℃

±0.3℃

Refrigerating Output

At 20℃

2.5kw

5kw

10kw

At 10℃

1.8kw

3.6kw

7.2kw

Liquid Storage Volume

25L

35L

50L

Operation Panel

Display set temperature and measured temperature,7-inch touch screen operation

Data Logging

Set temperature, measure temperature, can be exported in EXCEL file format

Flow Output

2~20L/min

2~20L/min

3~30L/min

Flow Regulation Mode

Mechanical flow regulating device

Flow and pressure

Adopt Johnson Auto-control Pressure Sensor and Turbine Flow Sensor

Circulating Pump

Southern/Grandford/Welle Brand Pressure 2bar

Compression Engine

Hitachi/Mitsubishi/Panasonic/Emerson Valley Wheel

Refrigeration Unit

Danfoss brands such as expansion valves, drying filters, etc.

Electric Parts

Circuit breaker, contactor selection Schneider brand

Cryogen

R134A

Safe Guarding

It has self-diagnosis function, freezer overload protection, high voltage pressure switch, overload relay, thermal protection device and many other safety protection functions.

Interface Dimension

G3/4

Source

1.5kw  220V 50HZ

2.5kw  220V 50HZ

4kw 380V 50HZ

Size

400*600*1200

450*850*1300

550*1000*1750


Production Workshop Real Map

Typical Applications:

1.Semiconductor Manufacturing Device Cooling:

Single chip cleaning, printing machine, automatic clamp installation equipment, spraying equipment, ion plating equipment, etching device, single-chip processing device, slicing machine, packaging machine, the temperature of the developer management, exposure device, magnetic part of the heating device, etc.

2.Laser Equipment Cooling:

Laser processing, heating part of the welding machine, laser marking device, chemical reaction plant, carbon dioxide laser processing machine, etc.

3.Other Industries Cooling:

Plasma welding, automatic packaging machine, mold cooling, washing machine, gold-plated groove, resin molding machine, precision grinding machine, injection molding machine of molding parts, etc.

4.Analysis Of Testing Machine Cooling:

Electronic microscope, ICP lighting light source part of the spectrum analysis device, heating part of the spectrophotometer, X-ray analytical device of heat source, automatic pulse heating part of the banner, the light source of atomic absorption spectrophotometer, etc.

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E-mail: sales@cnzlj.com
Add: No.203, Hongyun Road, Hongshan Street, Optoelectronics Park, Xinwu District, Wuxi City, Jiangsu Province, China
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