Semiconductor Chiller

Product Description
System Introduce

Temperature control range -5℃ to 85℃, the temperature of the thermal fluid can be adjusted, the temperature control accuracy is high, the accuracy is ± 0.3℃.

The device uses international brand accessories and has stable performance and can work continuously for 24 hours. The product can be applied to cooling of a heat generating portion of a semiconductor manufacturing apparatus, cooling of a heat generating portion of the laser device, analysis of a heat generating portion of the detecting device, and the like.

Some models are specially upgraded, not only for cooling, but also for heating. The temperature control range can reach -5℃ to 85℃, which improves the performance of precision cooling water circulation equipment and expands the application range of the equipment.

Model		LL-0250SS	LL-0500SS	LL-1000SS
Temperature Range		-5℃～+85℃	-5℃～+85℃	-5℃～+85℃
Temperature Control Prcision		±0.3℃	±0.3℃	±0.3℃
Refrigerating Output	At 20℃	2.5kw	5kw	10kw
	At 10℃	1.8kw	3.6kw	7.2kw
Liquid Storage Volume		25L	35L	50L
Operation Panel		Display set temperature and measured temperature,7-inch touch screen operation
Data Logging		Set temperature, measure temperature, can be exported in EXCEL file format
Flow Output		2～20L/min	2～20L/min	3～30L/min
Flow Regulation Mode		Mechanical flow regulating device
Flow and pressure		Adopt Johnson Auto-control Pressure Sensor and Turbine Flow Sensor
Circulating Pump		Southern/Grandford/Welle Brand Pressure 2bar
Compression Engine		Hitachi/Mitsubishi/Panasonic/Emerson Valley Wheel
Refrigeration Unit		Danfoss brands such as expansion valves, drying filters, etc.
Electric Parts		Circuit breaker, contactor selection Schneider brand
Cryogen		R134A
Safe Guarding		It has self-diagnosis function, freezer overload protection, high voltage pressure switch, overload relay, thermal protection device and many other safety protection functions.
Interface Dimension		G3/4
Source		1.5kw 220V 50HZ	2.5kw 220V 50HZ	4kw 380V 50HZ
Size		4006001200	4508501300	55010001750

Typical Applications:

1.Semiconductor Manufacturing Device Cooling:

Single chip cleaning, printing machine, automatic clamp installation equipment, spraying equipment, ion plating equipment, etching device, single-chip processing device, slicing machine, packaging machine, the temperature of the developer management, exposure device, magnetic part of the heating device, etc.

2.Laser Equipment Cooling:

Laser processing, heating part of the welding machine, laser marking device, chemical reaction plant, carbon dioxide laser processing machine, etc.

3.Other Industries Cooling:

Plasma welding, automatic packaging machine, mold cooling, washing machine, gold-plated groove, resin molding machine, precision grinding machine, injection molding machine of molding parts, etc.

4.Analysis Of Testing Machine Cooling:

Electronic microscope, ICP lighting light source part of the spectrum analysis device, heating part of the spectrophotometer, X-ray analytical device of heat source, automatic pulse heating part of the banner, the light source of atomic absorption spectrophotometer, etc.

Semiconductor Chiller

1.Semiconductor Manufacturing Device Cooling:

2.Laser Equipment Cooling:

3.Other Industries Cooling:

4.Analysis Of Testing Machine Cooling:

SLJ -110℃～-150℃

Single Fluid Heat Transfer System SR

Reactor Temperature System ZLF