Wuxi Guanya Refrigeration Technology co., ltd
Semiconductor Chiller

Semiconductor Chiller

  • Semiconductor Chiller
  • 半导体 (8).jpg
  • 半导体 (4).jpg
  • 半导体 (5).jpg
Semiconductor Chiller

  • Product Description
  • System Introduce

Temperature control range -5 to 85, the temperature of the thermal fluid can be adjusted, the temperature control accuracy is high, the accuracy is ± 0.3.

The device uses international brand accessories and has stable performance and can work continuously for 24 hours. The product can be applied to cooling of a heat generating portion of a semiconductor manufacturing apparatus, cooling of a heat generating portion of the laser device, analysis of a heat generating portion of the detecting device, and the like.

Some models are specially upgraded, not only for cooling, but also for heating. The temperature control range can reach -5 to 85, which improves the performance of precision cooling water circulation equipment and expands the application range of the equipment.





Temperature Range




Temperature Control Prcision




Refrigerating Output

At 20℃




At 10℃




Liquid Storage Volume




Operation Panel

Display set temperature and measured temperature,7-inch touch screen operation

Data Logging

Set temperature, measure temperature, can be exported in EXCEL file format

Flow Output




Flow Regulation Mode

Mechanical flow regulating device

Flow and pressure

Adopt Johnson Auto-control Pressure Sensor and Turbine Flow Sensor

Circulating Pump

Southern/Grandford/Welle Brand Pressure 2bar

Compression Engine

Hitachi/Mitsubishi/Panasonic/Emerson Valley Wheel

Refrigeration Unit

Danfoss brands such as expansion valves, drying filters, etc.

Electric Parts

Circuit breaker, contactor selection Schneider brand



Safe Guarding

It has self-diagnosis function, freezer overload protection, high voltage pressure switch, overload relay, thermal protection device and many other safety protection functions.

Interface Dimension



1.5kw  220V 50HZ

2.5kw  220V 50HZ

4kw 380V 50HZ





Typical Applications:

1.Semiconductor Manufacturing Device Cooling:

Single chip cleaning, printing machine, automatic clamp installation equipment, spraying equipment, ion plating equipment, etching device, single-chip processing device, slicing machine, packaging machine, the temperature of the developer management, exposure device, magnetic part of the heating device, etc.

2.Laser Equipment Cooling:

Laser processing, heating part of the welding machine, laser marking device, chemical reaction plant, carbon dioxide laser processing machine, etc.

3.Other Industries Cooling:

Plasma welding, automatic packaging machine, mold cooling, washing machine, gold-plated groove, resin molding machine, precision grinding machine, injection molding machine of molding parts, etc.

4.Analysis Of Testing Machine Cooling:

Electronic microscope, ICP lighting light source part of the spectrum analysis device, heating part of the spectrophotometer, X-ray analytical device of heat source, automatic pulse heating part of the banner, the light source of atomic absorption spectrophotometer, etc.

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Add: No.203, Hongyun Road, Hongshan Street, Optoelectronics Park, Xinwu District, Wuxi City, Jiangsu Province, China
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