Semicnductor multi-channel chiller
FLTZ 30℃~100℃- Temperture accuracy±0.1℃
- RefrigentR404A
- Flow control25~75/min 6bar max
- Power range380V 3kW~17kW
Temperature control in semiconductor production and testing processes
Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours
Ensure stable and reliable overall semiconductor process flow from front-end to back-end
Mainly used for precise temperature control in semiconductor production and testing processes, heating within 40 ° C using a compressor hot gas heating method
Configuration Details
Model | FLTZ-203W-2T | |
Pipeline | Channel 1 | Channel 2 |
Temperature range | -20℃~+90℃ | -20℃~~90℃ |
Temperature control accuracy | ±0.1℃ | ±0.1℃ |
Cooling capacity | 4kW@-10℃ | 4kW@-10℃ |
Heating capacity | 2kW | 2kW |
Heat transfer medium flow | 20L/min@0.5MPa | 20L/min@0.5MPa |
Heat transfer medium interface | ZG3/4 | ZG3/4 |
Ambient temperature | 10~35℃ | 10~35℃ |
Ambient humidity | 30~70% | 30~70% |
Cooling water temperature | 15~20℃ | 15~20℃ |
Cooling water flow | 20L/min | 20L/min |
Circuit breaker | 30A | |
Process temperature control | Control remote target temperature based on self-created model-free self-building tree algorithm and cascade algorithm | |
Weight | 400kg | |
Dimensions | 500*900*1600 |
Model | FLTZ-406W/ETCU-015W | |
Pipeline | Channel 1 | Channel 2 |
Temperature range | -45℃~+40℃ | +10℃~+80℃ |
Temperature control accuracy | ±0.1℃ | ±0.1℃ |
Cooling capacity | 11kW@-20℃ 5kW@-40℃ |
13kW@+10℃ |
Heating capacity | 2kW | 6kW |
Heat transfer medium flow | 17L/min@0.7MPa | 17L/min@0.7MPa |
Heat transfer medium interface | ZG3/4 | ZG3/4 |
Ambient temperature | 10~35℃ | 10~35℃ |
Ambient humidity | 30~70% | 30~70% |
Cooling water temperature | 15~20℃ | 15~20℃ |
Cooling water flow | 40L/min | 20L/min |
Circuit breaker | 80A | |
Process temperature control | Control remote target temperature based on self-created model-free self-building tree algorithm and cascade algorithm | |
Weight | 550kg | |
Dimensions | 600*1000*1850 |
Model | FLTZ-203W/ETCU-008W/FLTZ-203W | ||
Pipeline | Channel 1 | Channel 2 | Channel 3 |
Temperature range | -10℃~+60℃ | +30℃~+80℃ | -10℃~+80℃ |
Temperature control accuracy | ±0.1℃ | ±0.1℃ | ±0.1℃ |
Cooling capacity | 4kW@-10℃/21kW@+20℃ | 6 kW@+30℃ | 3kW@-10℃ |
Heating capacity | 4kW | 4.5+6kW | 3kW |
Heat transfer medium flow | 17L/min@0.7MPa | 17L/min@0.7MPa | 17L/min@0.7MPa |
Heat transfer medium interface | ZG3/4 | ZG3/4 | ZG3/4 |
Ambient temperature | 10~35 ℃ | 10~35 ℃ | 10~35 ℃ |
Ambient humidity | 30~70% | 30~70% | 30~70% |
Cooling water temperature | 15~20℃ | 15~20℃ | 15~20℃ |
Cooling water flow | 30L/min@15~20℃ | 15L/min@15~20℃ | 15L/min@15~20℃ |
Circuit breaker | 100A | ||
Process temperature control | Control remote target temperature based on self-created model-free self-building tree algorithm and cascade algorithm | ||
Weight | 600kg | ||
Dimensions | 600*1000*1700 |
Model | FLT-215W/ETCU-015W/ETCU-008W | ||
Pipeline | Channel 1 | Channel 2 | Channel 3 |
Temperature range | -20℃~+50℃ | +30℃~+100℃ | +30℃~+40℃ |
Temperature control accuracy | ±0.1℃ | ±0.1℃ | ±0.1℃ |
Cooling capacity | 15kW@-10℃ | 13kW@PCW+15℃ | 8kW@PCW+10℃ |
Heating capacity | 2kW | 6kW | Pump Heat Loss |
Heat transfer medium flow | 30L/min@0.85MPa | 30L/min@0.85MPa | 20L/min@0.8MPa |
Heat transfer medium interface | ZG3/4 | ZG3/4 | ZG3/4 |
Ambient temperature | 10~35 ℃ | 10~35 ℃ | 10~35 ℃ |
Ambient humidity | 30~70% | 30~70% | 30~70% |
Cooling water temperature | 15~20℃ | 15~20℃ | 15~20℃ |
Cooling water flow | 30L/min@15~20℃ | 15L/min@15~20℃ | 15L/min@15~20℃ |
Circuit breaker | 75A | ||
Process temperature control | Control remote target temperature based on self-created model-free self-building tree algorithm and cascade algorithm | ||
Weight | 600kg | ||
Dimensions | 600*1000*1700 |
Model | FLTZ-203W/2T Dual system | FLTZ-305W/2T Dual system | FLTZ-406W/2T Dual system | |||
Temperature range | -20℃~90℃ | -30℃~90℃ | -45℃~90℃ | |||
Temperature control accuracy | ±0.1℃ | |||||
Flow control and pressure | 15~45l/min 6bar max | |||||
Heating | 2.5kw | 2.5kw | 2.5kw | 2.5kw | 3.5kw | 3.5kw |
Cooling capacity | 3KW at-15℃ | 3KW at-15℃ | 5KW at-15℃ | 5KW at-15℃ | 2.5KW at -35℃ | 2.5KW at -35℃ |
Internal circulation liquid volume | 5L | 5L | 8L | 8L | 8L | 8L |
Expansion tank volume | 15L | 25L | 25L | |||
Heat transfer medium | Fluorination, antifreeze, thermal silicone oil, etc. | |||||
Refrigerant | R404A/ R448 | |||||
Heat transfer medium interface | ZG3/4 | |||||
Cooling water interface | ZG3/4 | |||||
Cooling water | 50L/min at20℃ | 600L/min at20℃ | 50L/min at20℃ | |||
Power supply | Three-phase220V / Three-phase 400V /Three-phase 460V | |||||
Process temperature control | Control remote target temperature based on self-created model-free self-building tree algorithm and cascade algorithm |
Product Description
Multi-channel independent temperature control can have separate temperature ranges, cooling and heating capabilities, heat transfer medium flow, etc. Two independent systems are used. Steam compression refrigeration or ETCU compressor-free heat exchange system can be selected according to the required temperature range. The system can use expansion tanks, condensers, cooling water systems, etc., which can effectively reduce equipment size and reduce operating steps.
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